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Patent applications and USPTO patent grants for Muto; Harunobu.The latest application filed is for "multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method".
Patent | Date |
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Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method Grant 6,946,662 - Ono , et al. September 20, 2 | 2005-09-20 |
Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method App 20040061064 - Ono, Haruhito ;   et al. | 2004-04-01 |
Electron beam exposure apparatus, device for shaping a beam of charged particles and method for manufacturing the device App 20020027204 - Muto, Harunobu ;   et al. | 2002-03-07 |
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