MUTHUKRISHNAN; Shankar

Patent Applications and Registrations

Patent applications and USPTO patent grants for MUTHUKRISHNAN; Shankar.The latest application filed is for "temperature offset and zone control tuning".

Company Profile

4.5.11

MUTHUKRISHNAN; Shankar - Los Gatos CA
Muthukrishnan; Shankar - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Temperature Offset And Zone Control Tuning App 20200251362 - Kind Code	2020-08-06
Hydrogenation and nitridization processes for reducing oxygen content in a film Grant 10,504,779 - Swenberg , et al. Dec	2019-12-10
Hydrogenation And Nitridization Processes For Reducing Oxygen Content In A Film App 20190157143 - SWENBERG; Johanes S. ; et al.	2019-05-23
Hydrogenation and nitridization processes for reducing oxygen content in a film Grant 10,236,207 - Swenberg , et al.	2019-03-19
Hydrogenation And Nitridization Processes For Reducing Oxygen Content In A Film App 20170365512 - SWENBERG; Johanes S. ; et al.	2017-12-21
Crystallization of amorphous films and grain growth using combination of laser and rapid thermal annealing Grant 9,263,265 - Sharma , et al. February 16, 2	2016-02-16
Millisecond Annealing In Ammonia Ambient For Precise Placement Of Nitrogen In Thin Film Stacks App 20150311067 - SHARMA; Shashank ; et al.	2015-10-29
Crystallization Of Amorphous Films And Grain Growth Using Combination Of Laser And Rapid Thermal Annealing App 20150064933 - SHARMA; Shashank ; et al.	2015-03-05
Stabilization of high-k dielectric materials Grant 8,323,754 - Olsen , et al. December 4, 2	2012-12-04
Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system Grant 7,794,544 - Nguyen , et al. September 14, 2	2010-09-14
Nitrogen profile engineering in HI-K nitridation for device performance enhancement and reliability improvement App 20070049043 - Muthukrishnan; Shankar ; et al.	2007-03-01
Method for fabricating a dielectric stack App 20060153995 - Narwankar; Pravin K. ; et al.	2006-07-13
Vapor deposition of hafnium silicate materials with tris(dimethylamino)silane App 20060062917 - Muthukrishnan; Shankar ; et al.	2006-03-23
Plasma treatment of hafnium-containing materials App 20060019033 - Muthukrishnan; Shankar ; et al.	2006-01-26
Stabilization of high-k dielectric materials App 20050260357 - Olsen, Christopher ; et al.	2005-11-24
Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system App 20050252449 - Nguyen, Son T. ; et al.	2005-11-17

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