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Developing method, developing apparatus and storage medium Grant 10,120,285 - Yoshihara , et al. November 6, 2 | 2018-11-06 |
Liquid Processing Apparatus App 20180308719 - TAKIGUCHI; Yasushi ;   et al. | 2018-10-25 |
Liquid processing apparatus Grant 10,014,190 - Takiguchi , et al. July 3, 2 | 2018-07-03 |
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Developing Apparatus, Developing Method And Storage Medium App 20150036110 - YOSHIHARA; Kousuke ;   et al. | 2015-02-05 |
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Substrate Cleaning Apparatus, Substrate Cleaning Method, And Storage Medium App 20150027492 - TAKIGUCHI; Yasushi ;   et al. | 2015-01-29 |
Liquid Processing Apparatus App 20150027503 - TAKIGUCHI; Yasushi ;   et al. | 2015-01-29 |