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Patent applications and USPTO patent grants for Musselwhite; Nathan.The latest application filed is for "film stack simplification for high aspect ratio patterning and vertical scaling".
Patent | Date |
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Film Stack Simplification For High Aspect Ratio Patterning And Vertical Scaling App 20220051938 - Wu; Hui-Jung ;   et al. | 2022-02-17 |
Efficient Cleaning And Etching Of High Aspect Ratio Structures App 20210249274 - ZHU; Ji ;   et al. | 2021-08-12 |
Metal doped carbon based hard mask removal in semiconductor fabrication Grant 11,062,897 - Yu , et al. July 13, 2 | 2021-07-13 |
Method and apparatus for processing wafer-shaped articles Grant 10,446,416 - Mui , et al. Oc | 2019-10-15 |
Metal Doped Carbon Based Hard Mask Removal In Semiconductor Fabrication App 20180358220 - Yu; Yongsik ;   et al. | 2018-12-13 |
Method And Apparatus For Processing Wafer-shaped Articles App 20180047593 - MUI; David ;   et al. | 2018-02-15 |
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