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Patent applications and USPTO patent grants for MUSHA; Kazuhiro.The latest application filed is for "substrate transport device and substrate transporting method".
Patent | Date |
---|---|
Substrate Transport Device And Substrate Transporting Method App 20210107149 - MUSHA; Kazuhiro ;   et al. | 2021-04-15 |
Substrate Transport Device And Substrate Transporting Method App 20210101281 - MUSHA; Kazuhiro ;   et al. | 2021-04-08 |
Vacuum processing apparatus Grant 10,612,130 - Minami , et al. | 2020-04-07 |
Vacuum Processing Apparatus App 20190233224 - MINAMI; Hirofumi ;   et al. | 2019-08-01 |
Seal mechanism and treatment apparatus Grant 8,840,116 - Musha , et al. September 23, 2 | 2014-09-23 |
Substrate conveyance method and substrate conveyance system Grant 8,717,737 - Minami , et al. May 6, 2 | 2014-05-06 |
Substrate Conveyance Method and Substrate Conveyance System App 20130129462 - Minami; Hirofumi ;   et al. | 2013-05-23 |
Transport apparatus Grant 8,382,421 - Musha , et al. February 26, 2 | 2013-02-26 |
Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatus Grant 8,366,375 - Musha , et al. February 5, 2 | 2013-02-05 |
Holding Apparatus, Conveying Apparatus, And Rotation-transmitting Apparatus App 20120114456 - Musha; Kazuhiro ;   et al. | 2012-05-10 |
Discharge unit and discharge apparatus Grant 8,167,417 - Miyata , et al. May 1, 2 | 2012-05-01 |
Holding Apparatus, Conveying Apparatus, And Rotation-transmitting Apparatus App 20120025054 - Musha; Kazuhiro ;   et al. | 2012-02-02 |
Seal Mechanism and Treatment Apparatus App 20110227294 - Musha; Kazuhiro ;   et al. | 2011-09-22 |
Discharge Unit And Discharge Apparatus App 20110199441 - MIYATA; Takahiro ;   et al. | 2011-08-18 |
Stage Equipped With Alignment Function, Processing Apparatus Having The Stage Equipped With Alignment Function, And Method Of Aligning Substrate App 20110062641 - Sato; Seiichi ;   et al. | 2011-03-17 |
Rotation Introduction Mechanism, Substrate Transfer Apparatus, And Vacuum Processing Apparatus App 20100135751 - Musha; Kazuhiro ;   et al. | 2010-06-03 |
Substrate Holding Mechanism and Substrate Assembly Apparatus Including the Same App 20100109220 - Musha; Kazuhiro ;   et al. | 2010-05-06 |
Transport Apparatus App 20100040447 - MUSHA; Kazuhiro ;   et al. | 2010-02-18 |
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