Murphy; Neal T.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Murphy; Neal T..The latest application filed is for "detecting endpoint using luminescence in the fabrication of a microelectronics device".

Company Profile

0.4.6

Murphy; Neal T. - Richardson TX

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Versatile system for conditioning slurry in CMP process Grant 7,695,589 - Stark , et al. April 13, 2	2010-04-13
Detecting endpoint using luminescence in the fabrication of a microelectronics device App 20070042509 - Chen; Jingqiu ; et al.	2007-02-22
Versatile System For Conditioning Slurry In Cmp Process App 20060276042 - Stark; David A. ; et al.	2006-12-07
Versatile system for conditioning slurry in CMP process App 20060026906 - Stark; David A. ; et al.	2006-02-09
System and method for controlling a vapor dryer process Grant 6,643,952 - Murphy , et al. November 11, 2	2003-11-11
Application of ozonated DI water to scrubbers for resist strip and particle removal processes Grant 6,634,368 - Jung , et al. October 21, 2	2003-10-21
System and method for controlling a vapor dryer process App 20030056389 - Murphy, Neal T. ; et al.	2003-03-27
Application of an ozonated DI water spray to resist residue removal processes App 20020096256 - Murphy, Neal T. ; et al.	2002-07-25
Application of an ozonated DI water spray to resist residue removal processes Grant 6,387,822 - Murphy , et al. May 14, 2	2002-05-14
System and method for controlling a vapor dryer process App 20010029683 - Murphy, Neal T. ; et al.	2001-10-18

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