Patent | Date |
---|
Plasma treatment method Grant 7,550,180 - Shirasuna , et al. June 23, 2 | 2009-06-23 |
Plasma Treatment Method And Plasma Treatment Apparatus App 20080271676 - Shirasuna; Toshiyasu ;   et al. | 2008-11-06 |
Vacuum processing apparatus in which high frequency powers having mutually different frequencies are used to generate plasma for processing an article Grant 7,051,671 - Aoki , et al. May 30, 2 | 2006-05-30 |
Deposited film forming apparatus and deposited film forming method Grant 6,946,167 - Hosoi , et al. September 20, 2 | 2005-09-20 |
Vacuum processing method and semiconductor device manufacturing method in which high-frequency powers having mutually different frequencies are applied to at least one electrode Grant 6,861,373 - Aoki , et al. March 1, 2 | 2005-03-01 |
Plasma processing method and method for manufacturing semiconductor device Grant 6,849,123 - Niino , et al. February 1, 2 | 2005-02-01 |
Vacuum processing method, vacuum processing apparatus, semiconductor device manufacturing method and semiconductor device App 20040232415 - Aoki, Makoto ;   et al. | 2004-11-25 |
Plasma treatment apparatus Grant 6,761,128 - Shirasuna , et al. July 13, 2 | 2004-07-13 |
Plasma treatment method and plasma treatment apparatus App 20040112864 - Shirasuna, Toshiyasu ;   et al. | 2004-06-17 |
Deposited film forming apparatus and deposited film forming method App 20040083974 - Hosoi, Kazuto ;   et al. | 2004-05-06 |
Deposited film forming apparatus Grant 6,702,898 - Hosoi , et al. March 9, 2 | 2004-03-09 |
Vacuum processing method Grant 6,696,108 - Murayama , et al. February 24, 2 | 2004-02-24 |
Plasma processing apparatus Grant 6,649,020 - Okamura , et al. November 18, 2 | 2003-11-18 |
Plasma processing method and plasma processing apparatus App 20030196601 - Murayama, Hitoshi ;   et al. | 2003-10-23 |
Plasma processing method and method for manufacturing semiconductor device App 20030143821 - Niino, Hiroaki ;   et al. | 2003-07-31 |
Vacuum processing method, vacuum processing apparatus, semiconductor device manufacturing method and semiconductor device App 20030049558 - Aoki, Makoto ;   et al. | 2003-03-13 |
Vacuum processing method App 20020160124 - Murayama, Hitoshi ;   et al. | 2002-10-31 |
Plasma CVD apparatus and plasma processing method Grant 6,435,130 - Takaki , et al. August 20, 2 | 2002-08-20 |
Deposited film forming apparatus and deposited film forming method App 20020100421 - Hosoi, Kazuto ;   et al. | 2002-08-01 |
Apparatus and method for forming deposited film App 20020038630 - Otsuka, Takashi ;   et al. | 2002-04-04 |
Plasma treatment method and plasma treatment apparatus App 20020038632 - Shirasuna, Toshiyasu ;   et al. | 2002-04-04 |
Vacuum processing methods App 20020029818 - Murayama, Hitoshi ;   et al. | 2002-03-14 |
Vacuum processing apparatus and vacuum processing method Grant 6,250,251 - Akiyama , et al. June 26, 2 | 2001-06-26 |
Plasma processing apparatus and method Grant 6,165,274 - Akiyama , et al. December 26, 2 | 2000-12-26 |
Process for forming deposited film for light-receiving member, light-received member produced by the process deposited film forming apparatus, and method for cleaning deposited film forming apparatus Grant 5,817,181 - Okamura , et al. October 6, 1 | 1998-10-06 |
Process for forming deposited film for light-receiving member, light-receiving member produced by the process, deposited film forming apparatus, and method for cleaning deposited film forming apparatus Grant 5,455,138 - Okamura , et al. October 3, 1 | 1995-10-03 |