Patent | Date |
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Arrayed column detector Grant 11,239,048 - Brodie , et al. February 1, 2 | 2022-02-01 |
Arrayed Column Detector App 20210280386 - Brodie; Alan D. ;   et al. | 2021-09-09 |
Imaging apparatus having a plurality of movable beam columns, and method of inspecting a plurality of regions of a substrate intended to be substantially identical Grant 10,026,588 - Werder , et al. July 17, 2 | 2018-07-17 |
Imaging Apparatus Having A Plurality Of Movable Beam Columns, And Method Of Inspecting A Plurality Of Regions Of A Substrate Intended To Be Substantially Identical App 20160064185 - Werder; Kurt Stephen ;   et al. | 2016-03-03 |
High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope Grant 9,099,276 - Muray , et al. August 4, 2 | 2015-08-04 |
High-voltage Energy-dispersive Spectroscopy Using A Low-voltage Scanning Electron Microscope App 20150213995 - Muray; Lawrence P. ;   et al. | 2015-07-30 |
Layered scanning charged particle apparatus package having an embedded heater Grant 8,115,168 - Muray , et al. February 14, 2 | 2012-02-14 |
Layered scanning charged particle microscope package for a charged particle and radiation detector Grant 8,110,801 - Indermuehle , et al. February 7, 2 | 2012-02-07 |
Layered scanning charged particle microscope with differential pumping aperture Grant 8,106,358 - Spallas , et al. January 31, 2 | 2012-01-31 |
Integrated deflectors for beam alignment and blanking in charged particle columns Grant 8,003,952 - Muray , et al. August 23, 2 | 2011-08-23 |
Layered Scanning Charged Particle Apparatus Package Having An Embedded Heater App 20100224778 - Muray; Lawrence P. ;   et al. | 2010-09-09 |
Layered Scanning Charged Particle Microscope Package For A Charged Particle And Radiation Detector App 20100224779 - Indermuehle; Scott W. ;   et al. | 2010-09-09 |
Layered Scanning Charged Particle Microscope With Differential Pumping Aperture App 20100224777 - Spallas; James P. ;   et al. | 2010-09-09 |
Integrated Deflectors For Beam Alignment And Blanking In Charged Particle Columns App 20080217531 - Muray; Lawrence P. ;   et al. | 2008-09-11 |
MEMS structure with mechanical overdeflection limiter Grant 6,805,454 - Staker , et al. October 19, 2 | 2004-10-19 |
MEMS structure with raised electrodes Grant 6,791,742 - Staker , et al. September 14, 2 | 2004-09-14 |
MEMS structure with raised electrodes App 20040095629 - Staker, Bryan P. ;   et al. | 2004-05-20 |
MEMS structure with surface potential control Grant 6,693,735 - Muray , et al. February 17, 2 | 2004-02-17 |
MEMS structure with mechanical overdeflection limiter App 20040001263 - Staker, Bryan P. ;   et al. | 2004-01-01 |
MEMS structure with mechanical overdeflection limiter Grant 6,641,273 - Staker , et al. November 4, 2 | 2003-11-04 |
Silicon on insulator standoff and method for manufacture thereof App 20030197176 - Spallas, James P. ;   et al. | 2003-10-23 |
Integrated microcolumn and scanning probe microscope arrays Grant 6,369,385 - Muray , et al. April 9, 2 | 2002-04-09 |
Electrostatic alignment of a charged particle beam Grant 6,288,401 - Chang , et al. September 11, 2 | 2001-09-11 |