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Patent applications and USPTO patent grants for MURAOKA; Peter.The latest application filed is for "apparatus and method for controlling edge ring variation".
Patent | Date |
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Apparatus And Method For Controlling Edge Ring Variation App 20210254957 - GHANTASALA; Sathyendra ;   et al. | 2021-08-19 |
Calibration Jig And Calibration Method App 20190385880 - MYLES; Andrew ;   et al. | 2019-12-19 |
Methods for stabilizing contact surfaces of electrostatic chucks Grant 8,906,164 - Kimball , et al. December 9, 2 | 2014-12-09 |
Methods For Stabilizing Contact Surfaces of Electrostatic Chucks App 20120031427 - Kimball; Chris ;   et al. | 2012-02-09 |
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