| Patent | Date |
|---|
Substrate processing apparatus
Grant 11,443,972 - Muramoto September 13, 2 | 2022-09-13 |
Substrate Processing System And Substrate Processing Method
App 20220139699 - ISHII; Hiroaki ; et al. | 2022-05-05 |
Substrate processing apparatus and substrate processing method
Grant 11,211,264 - Iwao , et al. December 28, 2 | 2021-12-28 |
Substrate processing apparatus
Grant 11,101,146 - Okita , et al. August 24, 2 | 2021-08-24 |
Substrate Processing Method And Substrate Processing Apparatus
App 20210197224 - ABE; Hiroshi ; et al. | 2021-07-01 |
Substrate Processing Apparatus And Substrate Processing Method
App 20210175098 - IWAO; Michinori ; et al. | 2021-06-10 |
Substrate Holding Apparatus And Substrate Processing Apparatus
App 20210134652 - MURAMOTO; Ryo | 2021-05-06 |
Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method
Grant 10,998,220 - Ishii , et al. May 4, 2 | 2021-05-04 |
Substrate processing apparatus, substrate processing system, and substrate processing method
Grant 10,964,556 - Muramoto , et al. March 30, 2 | 2021-03-30 |
Substrate processing device
Grant 10,910,240 - Muramoto February 2, 2 | 2021-02-02 |
Substrate inverting device, substrate processing apparatus, and substrate supporting device, and substrate inverting method, substrate processing method, and substrate supporting method
Grant 10,622,242 - Muramoto | 2020-04-14 |
Heater cleaning method
Grant 10,573,542 - Muramoto Feb | 2020-02-25 |
Substrate Processing Apparatus
App 20190252214 - OKITA; Nobuaki ; et al. | 2019-08-15 |
Substrate processing apparatus
Grant 10,249,517 - Iwao , et al. | 2019-04-02 |
Substrate Inverting Device, Substrate Processing Apparatus, And Substrate Catch-and-hold Device
App 20190096729 - MURAMOTO; Ryo | 2019-03-28 |
Substrate Inverting Device, Substrate Processing Apparatus, And Substrate Supporting Device, And Substrate Inverting Method, Substrate Processing Method, And Substrate Supporting Method
App 20190067077 - MURAMOTO; Ryo | 2019-02-28 |
Substrate Processing Device
App 20190019706 - TAKUSARI; Manabu ; et al. | 2019-01-17 |
Substrate Processing Device
App 20190013220 - MURAMOTO; Ryo | 2019-01-10 |
Substrate Holding/rotating Device, Substrate Processing Apparatus Including The Same, And Substrate Processing Method
App 20180277417 - ISHII; Hiroaki ; et al. | 2018-09-27 |
Substrate Processing Apparatus, Substrate Processing System, And Substrate Processing Method
App 20180261475 - MURAMOTO; Ryo ; et al. | 2018-09-13 |
Heater Cleaning Method
App 20180247843 - MURAMOTO; Ryo | 2018-08-30 |
Substrate treatment apparatus
Grant 10,032,654 - Negoro , et al. July 24, 2 | 2018-07-24 |
Substrate processing apparatus and heater cleaning method
Grant 9,991,141 - Muramoto June 5, 2 | 2018-06-05 |
Substrate Processing Apparatus
App 20170263491 - MURAMOTO; Ryo | 2017-09-14 |
Substrate processing apparatus and substrate conveying apparatus for use in the same
Grant 9,624,046 - Mitsuyoshi , et al. April 18, 2 | 2017-04-18 |
Substrate Processing Apparatus
App 20160365260 - IWAO; Michinori ; et al. | 2016-12-15 |
Substrate Processing Apparatus
App 20160351421 - IWAO; Michinori ; et al. | 2016-12-01 |
Substrate Processing Apparatus, Substrate Processing System, And Substrate Processing Method
App 20160240401 - MURAMOTO; Ryo ; et al. | 2016-08-18 |
Substrate Processing Method
App 20160236241 - NEGORO; Sei ; et al. | 2016-08-18 |
Substrate processing method and substrate processing apparatus
Grant 9,403,187 - Negoro , et al. August 2, 2 | 2016-08-02 |
Substrate processing method and substrate processing apparatus
Grant 9,340,761 - Negoro , et al. May 17, 2 | 2016-05-17 |
Substrate treatment apparatus
Grant 9,059,226 - Muramoto June 16, 2 | 2015-06-16 |
Substrate Treatment Method And Substrate Treatment Apparatus
App 20150072078 - NEGORO; Sei ; et al. | 2015-03-12 |
Substrate Processing Method And Substrate Processing Apparatus
App 20150060407 - NEGORO; Sei ; et al. | 2015-03-05 |
Substrate Processing Method And Substrate Processing Apparatus
App 20150060406 - NEGORO; Sei ; et al. | 2015-03-05 |
Substrate Processing Apparatus And Heater Cleaning Method
App 20150047677 - Muramoto; Ryo | 2015-02-19 |
Substrate Treatment Apparatus
App 20150013732 - NEGORO; Sei ; et al. | 2015-01-15 |
Substrate Processing Apparatus And Substrate Conveying Apparatus For Use In The Same
App 20140377044 - MITSUYOSHI; Ichiro ; et al. | 2014-12-25 |
Substrate treatment apparatus and substrate treatment method
Grant 8,877,076 - Negoro , et al. November 4, 2 | 2014-11-04 |
Substrate processing apparatus and substrate conveying apparatus for use in the same
Grant 8,851,821 - Mitsuyoshi , et al. October 7, 2 | 2014-10-07 |
Substrate Treatment Apparatus And Substrate Treatment Method
App 20130224956 - NEGORO; Sei ; et al. | 2013-08-29 |
Substrate Inverting Apparatus, Substrate Handling Method, And Substrate Processing Apparatus
App 20130051967 - MURAMOTO; Ryo | 2013-02-28 |
Substrate Treatment Apparatus
App 20120234364 - MURAMOTO; Ryo | 2012-09-20 |
Substrate treatment apparatus
Grant 8,033,288 - Shiomi , et al. October 11, 2 | 2011-10-11 |
Substrate Processing Apparatus And Substrate Conveying Apparatus For Use In The Same
App 20100068014 - Mitsuyoshi; Ichiro ; et al. | 2010-03-18 |
Substrate Treatment Apparatus
App 20080216880 - Shiomi; Akio ; et al. | 2008-09-11 |
| 