MURAKI; Masato

Patent Applications and Registrations

Patent applications and USPTO patent grants for MURAKI; Masato.The latest application filed is for "robot device".

Company Profile

2.81.58

MURAKI; Masato - Kanagawa JP
Muraki; Masato - Inagi JP
Muraki; Masato - Inagi-shi JP
Muraki; Masato - Tokyo JP
Muraki; Masato - Yokohama JP
Muraki; Masato - Kawasaki-shi Kanagawa-ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Robot Device App 20200246982 - Kind Code	2020-08-06
Drawing apparatus, and method of manufacturing article by controlling a plurality of charged particle optical systems based on respective sets of sub-drawing regions Grant 10,361,067 - Muraki , et al.	2019-07-23
Drawing method and method of manufacturing article Grant 9,690,201 - Tsujita , et al. June 27, 2	2017-06-27
Drawing apparatus, lithography system, pattern data creation method, drawing method, and method of manufacturing articles Grant 9,583,311 - Muraki , et al. February 28, 2	2017-02-28
Lithography system and method of manufacturing articles Grant 9,558,916 - Muraki , et al. January 31, 2	2017-01-31
Drawing apparatus, and method of manufacturing article Grant 9,455,124 - Muraki , et al. September 27, 2	2016-09-27
Drawing Apparatus And Device Manufacturing Method App 20160126061 - Muraki; Masato ; et al.	2016-05-05
Drawing Apparatus, Lithography System, Pattern Data Creation Method, Drawing Method, And Method Of Manufacturing Articles App 20160126062 - Muraki; Masato ; et al.	2016-05-05
Lithography System And Method Of Manufacturing Articles App 20160118221 - Muraki; Masato ; et al.	2016-04-28
Drawing apparatus, and method of manufacturing article Grant 9,293,292 - Muraki , et al. March 22, 2	2016-03-22
Drawing apparatus, and method of manufacturing article Grant 9,245,715 - Morita , et al. January 26, 2	2016-01-26
Drawing apparatus, and method of manufacturing article Grant 9,171,698 - Muraki , et al. October 27, 2	2015-10-27
Blanking apparatus, drawing apparatus, and method of manufacturing article Grant 9,040,935 - Morita , et al. May 26, 2	2015-05-26
Drawing apparatus, data processing method, and method of manufacturing article that transform partially overlapping regions using different transformation rules Grant 9,001,387 - Muraki , et al. April 7, 2	2015-04-07
Drawing Apparatus, And Method Of Manufacturing Article App 20150044614 - SENTOKU; Koichi ; et al.	2015-02-12
Drawing Apparatus, And Method Of Manufacturing Article App 20150001419 - MURAKI; Masato ; et al.	2015-01-01
Drawing Apparatus, And Method Of Manufacturing Article App 20150004807 - Muraki; Masato ; et al.	2015-01-01
Blanking Apparatus, Drawing Apparatus, And Method Of Manufacturing Article App 20150001417 - MORITA; Tomoyuki ; et al.	2015-01-01
Drawing Apparatus, And Method Of Manufacturing Article App 20140319367 - MURAKI; Masato ; et al.	2014-10-30
Drawing Apparatus, And Method Of Manufacturing Article App 20140322653 - MURAKI; Masato ; et al.	2014-10-30
Holding Apparatus, Processing Apparatus, And Method Of Manufacturing Article App 20140320841 - MURAKI; Masato ; et al.	2014-10-30
Irradiation Apparatus For Irradiating Charged Particle Beam, Method For Irradiation Of Charged Particle Beam, And Method For Manufacturing Article App 20140322833 - Yamaguchi; Wataru ; et al.	2014-10-30
Drawing apparatus, drawing method, and method of manufacturing article Grant 8,759,797 - Muraki , et al. June 24, 2	2014-06-24
Charged particle optical system, drawing apparatus, and method of manufacturing article Grant 8,716,672 - Sano , et al. May 6, 2	2014-05-06
Drawing Apparatus, And Method Of Manufacturing Article App 20140106279 - MORITA; Tomoyuki ; et al.	2014-04-17
Charged particle beam exposure apparatus Grant 8,692,218 - Muraki , et al. April 8, 2	2014-04-08
Drawing Apparatus, Data Processing Method, And Method Of Manufacturing Article App 20130335503 - Muraki; Masato ; et al.	2013-12-19
Drawing apparatus and method of manufacturing article Grant 8,610,082 - Sano , et al. December 17, 2	2013-12-17
Charged Particle Optical System, Drawing Apparatus, And Method Of Manufacturing Article App 20130273478 - Sano; Kentaro ; et al.	2013-10-17
Drawing Apparatus, Drawing Method, And Method Of Manufacturing Article App 20130264497 - Muraki; Masato ; et al.	2013-10-10
Drawing Apparatus, And Method Of Manufacturing Article App 20130216954 - Oishi; Satoru ; et al.	2013-08-22
Drawing Method And Method Of Manufacturing Article App 20130196517 - Tsujita; Kouichirou ; et al.	2013-08-01
Drawing Apparatus And Method Of Manufacturing Article App 20120241641 - Sano; Kentaro ; et al.	2012-09-27
Drawing Apparatus, Drawing Method And Method Of Manufacturing Article App 20120219914 - Muraki; Masato	2012-08-30
Method of manufacturing image display apparatus using sputtering Grant 8,083,562 - Mitani , et al. December 27, 2	2011-12-27
Electron source manufacturing method Grant 8,075,361 - Muraki December 13, 2	2011-12-13
Electron beam apparatus and method of generating an electron beam irradiation pattern Grant 8,008,622 - Fujita , et al. August 30, 2	2011-08-30
Charged particle beam exposure apparatus Grant 7,692,166 - Muraki , et al. April 6, 2	2010-04-06
Electron Beam Apparatus And Method of Generating An Electron Beam Irradiation Pattern App 20100078556 - Fujita; Ryo ; et al.	2010-04-01
Electron Beam Apparatus And Method Of Generating An Electron Beam Irradiation Pattern App 20100078555 - FUJITA; Ryo ; et al.	2010-04-01
Conductive Member Manufacturing Method, And Electron Source Manufacturing Method Using The Same App 20100062674 - Muraki; Masato	2010-03-11
Electron beam apparatus and method of generating an electron beam irradiation pattern Grant 7,635,851 - Fujita , et al. December 22, 2	2009-12-22
Method Of Manufacturing Image Display Apparatus App 20090203284 - Mitani; Hiromasa ; et al.	2009-08-13
Aberration measuring apparatus for charged particle beam optical system, charged particle beam lithography machine having the aberration measuring apparatus, and device fabrication method using the apparatus Grant 7,378,671 - Muraki , et al. May 27, 2	2008-05-27
Charged Particle Beam Exposure Apparatus App 20080067402 - Muraki; Masato ; et al.	2008-03-20
Charged Particle Beam Exposure Apparatus App 20080067403 - Muraki; Masato ; et al.	2008-03-20
Mechanism for sealing Grant 7,341,393 - Hosoda , et al. March 11, 2	2008-03-11
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus Grant 7,276,707 - Iwasaki , et al. October 2, 2	2007-10-02
Aberration adjusting method, device fabrication method, and charged particle beam lithography machine Grant 7,230,252 - Muraki , et al. June 12, 2	2007-06-12
Electron beam apparatus and method of generating an electron beam irradiation pattern App 20070057200 - Fujita; Ryo ; et al.	2007-03-15
Charged particle beam exposure apparatus, charged particle beam exposure method and device manufacturing method Grant 7,173,262 - Hosoda , et al. February 6, 2	2007-02-06
Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method Grant 7,126,141 - Ono , et al. October 24, 2	2006-10-24
Electron beam writing equipment and electron beam writing method Grant 7,098,464 - Sohda , et al. August 29, 2	2006-08-29
Aberration measuring apparatus for charged particle beam optical system, charged particle beam lithography machine having the aberration measuring apparatus, and device fabrication method using the apparatus App 20060169898 - Muraki; Masato ; et al.	2006-08-03
Aberration adjusting method, device fabrication method, and charged particle beam lithography machine App 20060169927 - Muraki; Masato ; et al.	2006-08-03
Charged particle beam exposure method, charged particle beam exposure apparatus, and device manufacturing method Grant 7,049,610 - Muraki , et al. May 23, 2	2006-05-23
Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method Grant 7,038,226 - Ono , et al. May 2, 2	2006-05-02
Electron beam writing equipment using plural beams and method Grant 7,015,482 - Sohda , et al. March 21, 2	2006-03-21
Charged particle beam exposure apparatus and method Grant 7,005,658 - Muraki February 28, 2	2006-02-28
Charged particle beam exposure apparatus, charged particle beam exposure method, and device manufacturing method using the same apparatus Grant 7,005,659 - Muraki , et al. February 28, 2	2006-02-28
Charged particle beam exposure apparatus, charged particle beam exposure method and device manufacturing method App 20060017019 - Hosoda; Masaki ; et al.	2006-01-26
Mechanism for sealing App 20060006342 - Hosoda; Masaki ; et al.	2006-01-12
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus App 20050263713 - Iwasaki, Yuichi ; et al.	2005-12-01
Charged-particle-beam exposure apparatus and method of controlling same Grant 6,969,862 - Muraki , et al. November 29, 2	2005-11-29
Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method App 20050253082 - Ono, Haruhito ; et al.	2005-11-17
Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method Grant 6,965,153 - Ono , et al. November 15, 2	2005-11-15
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus Grant 6,953,938 - Iwasaki , et al. October 11, 2	2005-10-11
Charged particle beam exposure method and apparatus and device manufacturing method using the apparatus Grant 6,946,665 - Muraki , et al. September 20, 2	2005-09-20
Electron beam exposure apparatus, deflection apparatus, and electron beam exposure method Grant 6,919,574 - Hashimoto , et al. July 19, 2	2005-07-19
Electron beam exposure apparatus, electron beam exposure apparatus calibration method, and semiconductor element manufacturing method Grant 6,917,045 - Hashimoto , et al. July 12, 2	2005-07-12
Charged-particle beam exposure apparatus, charged-particle beam exposure method, control data determination method, and device manufacturing method using this method Grant 6,903,352 - Muraki , et al. June 7, 2	2005-06-07
Charged particle beam exposure apparatus, device manufacturing method, and charged particle beam applied apparatus Grant 6,903,353 - Muraki , et al. June 7, 2	2005-06-07
Electron beam writing equipment and electron beam writing method App 20050072939 - Sohda, Yasunari ; et al.	2005-04-07
Exposure apparatus Grant 6,870,171 - Hosoda , et al. March 22, 2	2005-03-22
Charged particle beam exposure method and apparatus Grant 6,864,488 - Muraki March 8, 2	2005-03-08
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus App 20050035300 - Iwasaki, Yuichi ; et al.	2005-02-17
Charged particle beam exposure method and apparatus and device manufacturing method using the apparatus App 20050029473 - Muraki, Masato ; et al.	2005-02-10
Charged particle beam exposure method, charged particle beam exposure apparatus, and device manufacturing method App 20050006603 - Muraki, Masato ; et al.	2005-01-13
Charged particle beam exposure apparatus, charged particle beam exposure method, and device manufacturing method using the same apparatus App 20050006601 - Muraki, Masato ; et al.	2005-01-13
Correcting method for correcting exposure data used for a charged particle beam exposure system Grant 6,835,937 - Muraki , et al. December 28, 2	2004-12-28
Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method Grant 6,818,911 - Tamamori , et al. November 16, 2	2004-11-16
Exposure apparatus App 20040188636 - Hosoda, Masaki ; et al.	2004-09-30
Exposure apparatus, control method thereof, and device manufacturing method Grant 6,784,442 - Muraki , et al. August 31, 2	2004-08-31
Charged-particle beam exposure apparatus and device manufacturing method using the same Grant 6,777,697 - Yui , et al. August 17, 2	2004-08-17
Electron beam monitoring sensor and electron beam monitoring method Grant 6,768,118 - Nakayama , et al. July 27, 2	2004-07-27
Charged-particle-beam exposure apparatus and method of controlling same App 20040135102 - Muraki, Masato ; et al.	2004-07-15
Electron beam exposure apparatus, deflection apparatus, and electron beam exposure method App 20040061080 - Hashimoto, Shin-Ichi ; et al.	2004-04-01
Electron beam exposure apparatus, electron beam exposure apparatus calibration method, and semiconductor element manufacturing method App 20040061065 - Hashimoto, Shin-Ichi ; et al.	2004-04-01
Electron beam monitoring sensor and electron beam monitoring method App 20040026627 - Nakayama, Yoshinori ; et al.	2004-02-12
Electron beam writing equipment App 20040021095 - Sohda, Yasunari ; et al.	2004-02-05
Electron beam exposure method, a method of constructing exposure control data, and a computer-readable medium Grant 6,657,210 - Muraki December 2, 2	2003-12-02
Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method App 20030218140 - Tamamori, Kenji ; et al.	2003-11-27
Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method App 20030209673 - Ono, Haruhito ; et al.	2003-11-13
Reflection and refraction optical system and projection exposure apparatus using the same Grant 6,636,349 - Takahashi , et al. October 21, 2	2003-10-21
Exposure apparatus, control method thereof, and device manufacturing method App 20030122087 - Muraki, Masato ; et al.	2003-07-03
Charged particle beam exposure method and apparatus App 20030107006 - Muraki, Masato	2003-06-12
Charged-particle Beam Exposure Apparatus And Device Manufacturing Method Using The Same App 20030094584 - Yui, Yoshikiyo ; et al.	2003-05-22
Charged-particle beam exposure apparatus and device manufacturing method Grant 6,566,664 - Muraki May 20, 2	2003-05-20
Charged particle beam exposure method and apparatus Grant 6,559,456 - Muraki May 6, 2	2003-05-06
Charged-particle Beam Exposure Apparatus And Device Manufacturing Method App 20030066974 - Muraki, Masato	2003-04-10
Mask Pattern Transfer Method, Mask Pattern Transfer Apparatus Using The Method, And Device Manufacturing Method App 20030034460 - Ono, Haruhito ; et al.	2003-02-20
Charged particle beam exposure apparatus and method App 20020179855 - Muraki, Masato	2002-12-05
Control system for a charged particle exposure apparatus Grant 6,483,120 - Yui , et al. November 19, 2	2002-11-19
Transfer Apparatus And Transfer Method App 20020163628 - Yui, Yoshikiyo ; et al.	2002-11-07
Charged particle beam exposure apparatus, device manufacturing method, and charged particle beam applied apparatus App 20020160311 - Muraki, Masato ; et al.	2002-10-31
Electron beam exposure apparatus and its control method Grant 6,472,672 - Muraki October 29, 2	2002-10-29
Transfer apparatus and transfer method Grant 6,466,301 - Yui , et al. October 15, 2	2002-10-15
Electron Beam Exposure Apparatus And Device Manufacturing Method App 20020020820 - MURAKI, MASATO	2002-02-21
Charged-particle beam exposure apparatus, charged-particle beam exposure method, control data determination method, and device manufacturing method using this method App 20020008207 - Muraki, Masato ; et al.	2002-01-24
Reflection and refraction optical system and projection exposure apparatus using the same App 20010022687 - Takahashi, Kazuhiro ; et al.	2001-09-20
Charged-particle beam exposure apparatus, exposure system, control method therefor, and device manufacturing method App 20010004185 - Muraki, Masato ; et al.	2001-06-21
Electron beam exposure apparatus Grant 6,225,637 - Terashima , et al. May 1, 2	2001-05-01
Electron beam exposure apparatus and method Grant 6,166,387 - Muraki , et al. December 26, 2	2000-12-26
Electron beam exposure method and apparatus Grant 6,137,113 - Muraki October 24, 2	2000-10-24
Electron beam exposure system and method of manufacturing devices using the same Grant 6,124,599 - Muraki September 26, 2	2000-09-26
Electron beam exposure apparatus and its control method Grant 6,107,636 - Muraki August 22, 2	2000-08-22
Electron beam exposure apparatus Grant 6,054,713 - Miyake , et al. April 25, 2	2000-04-25
Electron beam exposure apparatus Grant 5,981,954 - Muraki November 9, 1	1999-11-09
Electron beam exposure method, and device manufacturing method using same Grant 5,973,332 - Muraki , et al. October 26, 1	1999-10-26
Electron beam exposure apparatus Grant 5,939,725 - Muraki August 17, 1	1999-08-17
Position detection apparatus, electron beam exposure apparatus, and methods associated with them Grant 5,929,454 - Muraki , et al. July 27, 1	1999-07-27
Electron beam exposure apparatus and method of controlling same Grant 5,905,267 - Muraki May 18, 1	1999-05-18
Electron beam exposure apparatus and method of controlling same Grant 5,864,142 - Muraki , et al. January 26, 1	1999-01-26
Electron beam exposure apparatus and method, and device manufacturing method Grant 5,834,783 - Muraki , et al. November 10, 1	1998-11-10
Projection exposure apparatus having illumination device with ring-like or spot-like light source Grant 5,726,740 - Shiozawa , et al. March 10, 1	1998-03-10
Exposure method and apparatus Grant 5,499,076 - Muraki March 12, 1	1996-03-12
Projection exposure apparatus Grant 5,489,966 - Kawashima , et al. February 6, 1	1996-02-06
Illumination device including an optical integrator defining a plurality of secondary light sources and related method Grant 5,463,497 - Muraki , et al. October 31, 1	1995-10-31
Illumination device and projection exposure apparatus using the same Grant 5,363,170 - Muraki November 8, 1	1994-11-08
Illumination device for projection exposure apparatus Grant 5,345,292 - Shiozawa , et al. September 6, 1	1994-09-06
Position detecting method and apparatus Grant 5,189,494 - Muraki February 23, 1	1993-02-23
Method of detecting relative positional deviation between two objects Grant 5,182,455 - Muraki January 26, 1	1993-01-26
Illumination device including amplitude-division and beam movements Grant 5,153,773 - Muraki , et al. October 6, 1	1992-10-06
Position detecting method and device using image pickup of a mark Grant 5,120,974 - Muraki June 9, 1	1992-06-09
Projection exposure apparatus Grant 5,117,254 - Kawashima , et al. May 26, 1	1992-05-26
Illuminating device Grant 4,974,919 - Muraki , et al. December 4, 1	1990-12-04
Exposure system with exposure controlling acoustooptic element Grant 4,947,047 - Muraki August 7, 1	1990-08-07