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Patent applications and USPTO patent grants for Murakami; Masaichi.The latest application filed is for "scanning exposure method and system".
Patent | Date |
---|---|
Scanning exposure method and system Grant 6,873,400 - Murakami , et al. March 29, 2 | 2005-03-29 |
Scanning exposure method and system App 20010052966 - Fujitsuka, Seiji ;   et al. | 2001-12-20 |
Projection exposure apparatus Grant 5,920,378 - Murakami , et al. July 6, 1 | 1999-07-06 |
Projection exposure apparatus and method having a positional deviation detection system that employs light from an exposure illumination system Grant 5,912,726 - Toguchi , et al. June 15, 1 | 1999-06-15 |
Exposure apparatus Grant 5,486,896 - Hazama , et al. January 23, 1 | 1996-01-23 |
Projection-exposing apparatus Grant 4,806,987 - Mori , et al. February 21, 1 | 1989-02-21 |
Method and apparatus for detecting diversion Grant 4,741,622 - Suwa , et al. May 3, 1 | 1988-05-03 |
Projection optical apparatus Grant 4,704,020 - Murakami , et al. November 3, 1 | 1987-11-03 |
Method of aligning a semiconductor substrate and a photomask Grant 4,679,942 - Suwa , et al. July 14, 1 | 1987-07-14 |
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