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name:-0.010967969894409
name:-0.00053000450134277
Murakami; Masaichi Patent Filings

Murakami; Masaichi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Murakami; Masaichi.The latest application filed is for "scanning exposure method and system".

Company Profile
0.8.1
  • Murakami; Masaichi - Machida JP
  • Murakami, Masaichi - Tokyo JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Scanning exposure method and system
Grant 6,873,400 - Murakami , et al. March 29, 2
2005-03-29
Scanning exposure method and system
App 20010052966 - Fujitsuka, Seiji ;   et al.
2001-12-20
Projection exposure apparatus
Grant 5,920,378 - Murakami , et al. July 6, 1
1999-07-06
Projection exposure apparatus and method having a positional deviation detection system that employs light from an exposure illumination system
Grant 5,912,726 - Toguchi , et al. June 15, 1
1999-06-15
Exposure apparatus
Grant 5,486,896 - Hazama , et al. January 23, 1
1996-01-23
Projection-exposing apparatus
Grant 4,806,987 - Mori , et al. February 21, 1
1989-02-21
Method and apparatus for detecting diversion
Grant 4,741,622 - Suwa , et al. May 3, 1
1988-05-03
Projection optical apparatus
Grant 4,704,020 - Murakami , et al. November 3, 1
1987-11-03
Method of aligning a semiconductor substrate and a photomask
Grant 4,679,942 - Suwa , et al. July 14, 1
1987-07-14

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