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Patent applications and USPTO patent grants for Murakami; Hiraku.The latest application filed is for "processing apparatus and method for controlling processing apparatus".
Patent | Date |
---|---|
Method of cleaning plasma processing apparatus Grant 10,553,409 - Murakami , et al. Fe | 2020-02-04 |
Processing Apparatus And Method For Controlling Processing Apparatus App 20190318914 - OKUNISHI; Naohiko ;   et al. | 2019-10-17 |
Plasma processing apparatus and method for processing object Grant 10,264,630 - Yoshida , et al. | 2019-04-16 |
Method Of Cleaning Plasma Processing Apparatus App 20180330930 - MURAKAMI; Hiraku ;   et al. | 2018-11-15 |
Plasma processing method Grant 9,818,582 - Murakami , et al. November 14, 2 | 2017-11-14 |
Plasma Processing Method App 20160372308 - MURAKAMI; Hiraku ;   et al. | 2016-12-22 |
Plasma Processing Apparatus And Method For Processing Object App 20150245460 - YOSHIDA; Ryoichi ;   et al. | 2015-08-27 |
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