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Patent applications and USPTO patent grants for Murai; Shiaki.The latest application filed is for "electron beam control device".
Patent | Date |
---|---|
Defect inspection apparatus for phase shift mask Grant 6,879,393 - Koizumi , et al. April 12, 2 | 2005-04-12 |
Electron beam control device Grant 6,803,584 - Murai , et al. October 12, 2 | 2004-10-12 |
Electron beam control device App 20030234367 - Murai, Shiaki ;   et al. | 2003-12-25 |
Defect inspection apparatus for phase shift mask App 20020036772 - Koizumi, Yasuhiro ;   et al. | 2002-03-28 |
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