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Patent applications and USPTO patent grants for Munro; Eric.The latest application filed is for "apparatus and method for e-beam dark field imaging".
Patent | Date |
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Holey mirror arrangement for dual-energy e-beam inspector Grant 7,217,924 - Mankos , et al. May 15, 2 | 2007-05-15 |
Wien filter with reduced chromatic aberration Grant 7,164,139 - Toth , et al. January 16, 2 | 2007-01-16 |
Apparatus and method for E-beam dark field imaging Grant 7,141,791 - Masnaghetti , et al. November 28, 2 | 2006-11-28 |
Apparatus and method for e-beam dark field imaging App 20060060780 - Masnaghetti; Douglas K. ;   et al. | 2006-03-23 |
Electron beam lithography apparatus focused through spherical aberration introduction Grant 6,620,565 - Katsap , et al. September 16, 2 | 2003-09-16 |
Electron beam inspection system and method Grant 5,578,821 - Meisberger , et al. November 26, 1 | 1996-11-26 |
Electron beam inspection system and method Grant 5,502,306 - Meisburger , et al. March 26, 1 | 1996-03-26 |
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