MUN; JEONGIL

Patent Applications and Registrations

Patent applications and USPTO patent grants for MUN; JEONGIL.The latest application filed is for "semiconductor processing equipment including electrostatic chuck for plasma processing".

Company Profile

4.4.6

MUN; JEONGIL - HWASEONG-SI KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Semiconductor Processing Equipment Including Electrostatic Chuck For Plasma Processing App 20220189746 - MUN; JEONGIL ; et al.	2022-06-16
Sensor device and etching apparatus having the same Grant 11,264,291 - Yang , et al. March 1, 2	2022-03-01
Method Of Forming Plasma Processing Apparatus, Related Apparatus, And Method Of Forming Semiconductor Device Using The Same App 20220044912 - MUN; Jeongil ; et al.	2022-02-10
Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method Grant 11,215,506 - Kim , et al. January 4, 2	2022-01-04
Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor device Grant 11,092,495 - Mun , et al. August 17, 2	2021-08-17
Substrate Processing Apparatus, Substrate Processing Module, And Semiconductor Device Fabrication Method App 20210148760 - KIM; Kyeonghun ; et al.	2021-05-20
Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method Grant 10,935,429 - Kim , et al. March 2, 2	2021-03-02
Sensor Device And Etching Apparatus Having The Same App 20200411390 - YANG; SEEYUB ; et al.	2020-12-31
Substrate Processing Apparatus, Substrate Processing Module, And Semiconductor Device Fabrication Method App 20200209063 - KIM; Kyeonghun ; et al.	2020-07-02
Optical Emission Spectroscopy System, Method Of Calibrating The Same, And Method Of Fabricating Semiconductor Device App 20200049560 - MUN; Jeongil ; et al.	2020-02-13

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