Mumbauer; Paul D.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Mumbauer; Paul D..The latest application filed is for "selective etching of oxides from substrates".
- Mumbauer; Paul D. - Orwigsburg PA
- Mumbauer; Paul D. - Mohrsville PA
- Mumbauer, Paul D. - Coopersburg PA
| Patent | Date |
|---|---|
| Systems and methods for achieving isothermal batch processing of substrates used for the production of micro-electro-mechanical-systems Grant 7,771,563 - Grant , et al. August 10, 2 | 2010-08-10 |
| Selective etching of oxides from substrates Grant 7,431,853 - Mumbauer , et al. October 7, 2 | 2008-10-07 |
| Selective etching of oxides from substrates App 20060207968 - Mumbauer; Paul D. ; et al. | 2006-09-21 |
| Chemical vapor deposition reactor and method for utilizing vapor vortex App 20040028810 - Grant, Robert W. ; et al. | 2004-02-12 |
| Vortex based CVD reactor App 20020195055 - Grant, Robert W. ; et al. | 2002-12-26 |
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