Muller; Karl Paul
Patent Applications and Registrations
Patent applications and USPTO patent grants for Muller; Karl Paul.The latest application filed is for "distribution plate for a reaction chamber with multiple gas inlets and separate mass flow control loops".
- Muller; Karl Paul - Wappingers Falls NY
- Muller; Karl Paul - Wappinger Falls NY
| Patent | Date |
|---|---|
| Distribution plate for a reaction chamber with multiple gas inlets and separate mass flow control loops Grant 6,294,026 - Roithner , et al. September 25, 2 | 2001-09-25 |
| Overlay measurement technique using moire patterns Grant 6,150,231 - Muller , et al. November 21, 2 | 2000-11-21 |
| Pad stack with a poly SI etch stop for TEOS mask removal with RIE Grant 5,776,808 - Muller , et al. July 7, 1 | 1998-07-07 |
| In-situ wafer temperature control apparatus for single wafer tools Grant 5,667,622 - Hasegawa , et al. September 16, 1 | 1997-09-16 |
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