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Patent applications and USPTO patent grants for Mukherjee; Tamal.The latest application filed is for "atomic layer etch and ion beam etch patterning".
Patent | Date |
---|---|
Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials Grant 11,450,513 - Yang , et al. September 20, 2 | 2022-09-20 |
Atomic Layer Etch And Ion Beam Etch Patterning App 20220254649 - TAN; Samantha SiamHwa ;   et al. | 2022-08-11 |
Atomic Layer Etching For Subtractive Metal Etch App 20220199422 - YANG; Wenbing ;   et al. | 2022-06-23 |
Acousto-optic gyroscopes Grant 11,112,245 - Piazza , et al. September 7, 2 | 2021-09-07 |
Atomic Layer Etching And Smoothing Of Refractory Metals And Other High Surface Binding Energy Materials App 20210005425 - Yang; Wenbing ;   et al. | 2021-01-07 |
High Energy Atomic Layer Etching App 20200402770 - Yang; Wenbing ;   et al. | 2020-12-24 |
High energy atomic layer etching Grant 10,763,083 - Yang , et al. Sep | 2020-09-01 |
Acousto-optic Gyroscopes App 20190120624 - Piazza; Gianluca ;   et al. | 2019-04-25 |
High Energy Atomic Layer Etching App 20190108982 - Yang; Wenbing ;   et al. | 2019-04-11 |
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