Mukherjee; Shaunak

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mukherjee; Shaunak.The latest application filed is for "systems and methods for depositing low-k dielectric films".

Company Profile

6.7.16

Mukherjee; Shaunak - San Jose CA
Mukherjee; Shaunak - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Low-k dielectric films Grant 11,393,678 - Durand , et al. July 19, 2	2022-07-19
Low-k dielectric with self-forming barrier layer Grant 11,289,369 - Ding , et al. March 29, 2	2022-03-29
Systems And Methods For Depositing Low-k Dielectric Films App 20210272800 - Mukherjee; Shaunak ; et al.	2021-09-02
SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material Grant 11,011,371 - Gadre , et al. May 18, 2	2021-05-18
Low-K Dielectric Films App 20210050212 - Durand; William J. ; et al.	2021-02-18
Low-K Dielectric With Self-Forming Barrier Layer App 20200388532 - Ding; Yi ; et al.	2020-12-10
High deposition rate and high quality nitride Grant 10,790,140 - Han , et al. September 29, 2	2020-09-29
High Aspect Ratio Deposition App 20200216959 - MUKHERJEE; Shaunak ; et al.	2020-07-09
Non-uv High Hardness Low K Film Deposition App 20200075321 - MUKHERJEE; Shaunak ; et al.	2020-03-05
Sibn Film For Conformal Hermetic Dielectric Encapsulation Without Direct Rf Exposure To Underlying Structure Material App 20190326110 - GADRE; Milind ; et al.	2019-10-24
Radical Assisted Cure Of Dielectric Films App 20190214228 - CHEN; Yihong ; et al.	2019-07-11
High Deposition Rate And High Quality Nitride App 20180233356 - HAN; Xinhai ; et al.	2018-08-16
Selectively lateral growth of silicon oxide thin film Grant 10,002,757 - Chen , et al. June 19, 2	2018-06-19
Selectively Lateral Growth Of Silicon Oxide Thin Film App 20170323777 - CHEN; Yihong ; et al.	2017-11-09
Selectively lateral growth of silicon oxide thin film Grant 9,741,558 - Chen , et al. August 22, 2	2017-08-22
Selectively Lateral Growth Of Silicon Oxide Thin Film App 20170125239 - CHEN; Yihong ; et al.	2017-05-04
Low Temp Single Precursor Arc Hard Mask For Multilayer Patterning Application App 20170125241 - MUKHERJEE; Shaunak ; et al.	2017-05-04
Selectively lateral growth of silicon oxide thin film Grant 9,508,545 - Chen , et al. November 29, 2	2016-11-29
Selectively Lateral Growth Of Silicon Oxide Thin Film App 20160233084 - CHEN; Yihong ; et al.	2016-08-11
Radical Assisted Cure Of Dielectric Films App 20160138161 - CHEN; Yihong ; et al.	2016-05-19
Integrated Pre-clean And Deposition Of Low-damage Layers App 20160017487 - CHEN; Yihong ; et al.	2016-01-21
Plasma-enhanced And Radical-based Cvd Of Porous Carbon-doped Oxide Films Assisted By Radical Curing App 20160017495 - CHEN; Yihong ; et al.	2016-01-21
Enabling Radical-based Deposition Of Dielectric Films App 20150167160 - CHEN; Yihong ; et al.	2015-06-18

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