Patent | Date |
---|
Substrate holder, plating apparatus, method for manufacturing substrate holder, and method for holding substrate Grant 11,384,447 - Miyamoto , et al. July 12, 2 | 2022-07-12 |
Substrate Holder, Plating Apparatus, Method For Manufacturing Substrate Holder, And Method For Holding Substrate App 20210277534 - MIYAMOTO; Matsutaro ;   et al. | 2021-09-09 |
Paddle, Processing Apparatus Having The Paddle, And Method Of Producing The Paddle App 20210262111 - Masuda; Yasuyuki ;   et al. | 2021-08-26 |
Plating apparatus and plating method Grant 11,047,063 - Fujikata , et al. June 29, 2 | 2021-06-29 |
Substrate holder and plating apparatus Grant 11,015,261 - Mukaiyama , et al. May 25, 2 | 2021-05-25 |
Substrate-holder Inspection Apparatus, Plating Apparatus Including The Same, And Appearance Inspection Apparatus App 20200255968 - MUKAIYAMA; Yoshitaka ;   et al. | 2020-08-13 |
Substrate attachment/detachment device, plating device, control device for a substrate attachment/detachment device, and storage medium that stores a program for causing a computer to execute a method of controlling a substrate attachment/detachment device Grant 10,665,495 - Yokoyama , et al. | 2020-05-26 |
Plating apparatus and plating method Grant 10,577,714 - Mukaiyama , et al. | 2020-03-03 |
Plating Apparatus And Plating Method App 20190226114 - FUJIKATA; Jumpei ;   et al. | 2019-07-25 |
Plating apparatus and plating method Grant 10,294,578 - Fujikata , et al. | 2019-05-21 |
Substrate Holder And Plating Apparatus App 20190084777 - MUKAIYAMA; Yoshitaka ;   et al. | 2019-03-21 |
Substrate Attachment/detachment Device, Plating Device, Control Device For A Substrate Attachment/detachment Device, And Storage Medium That Stores A Program For Causing A Computer To Execute A Method Of Controlling A Substrate Attachment/detachment Device App 20180182659 - YOKOYAMA; Toshio ;   et al. | 2018-06-28 |
Plating Apparatus And Plating Method App 20170298531 - MUKAIYAMA; Yoshitaka ;   et al. | 2017-10-19 |
Apparatus And Method For Supplying Plating Solution To Plating Tank, Plating System, Powder Container, And Plating Method App 20170226656 - DOU; Chunhui ;   et al. | 2017-08-10 |
Semiconductor wafer holder and electroplating system for plating a semiconductor wafer Grant 9,714,476 - Yoshioka , et al. July 25, 2 | 2017-07-25 |
Plating Apparatus And Plating Method App 20160145760 - FUJIKATA; Jumpei ;   et al. | 2016-05-26 |
Method Of Operating An Electroless Plating Apparatus App 20160130702 - NAKAGAWA; Yoichi ;   et al. | 2016-05-12 |
Semiconductor Wafer Holder And Electroplating System For Plating A Semiconductor Wafer App 20150122635 - YOSHIOKA; Junichiro ;   et al. | 2015-05-07 |
Semiconductor wafer holder and electroplating system for plating a semiconductor wafer Grant 8,961,755 - Yoshioka , et al. February 24, 2 | 2015-02-24 |
Wet Processing Apparatus And Plating Apparatus App 20150013905 - NAKAGAWA; Yoichi ;   et al. | 2015-01-15 |
Semiconductor Wafer Holder And Electroplating System For Plating A Semiconductor Wafer App 20120048727 - Yoshioka; Junichiro ;   et al. | 2012-03-01 |
Semiconductor wafer holder and electroplating system for plating a semiconductor wafer Grant 8,075,756 - Yoshioka , et al. December 13, 2 | 2011-12-13 |
Plating apparatus and method Grant 8,012,332 - Yoshioka , et al. September 6, 2 | 2011-09-06 |
Semiconductor Wafer Holder And Electroplating System For Plating A Semiconductor Wafer App 20110036722 - Yoshioka; Junichiro ;   et al. | 2011-02-17 |
Semiconductor wafer holder and electroplating system for plating a semiconductor wafer Grant 7,833,393 - Yoshioka , et al. November 16, 2 | 2010-11-16 |
Plating Apparatus And Method App 20080245669 - Yoshioka; Junichiro ;   et al. | 2008-10-09 |
Plating apparatus and method Grant 7,402,227 - Yoshioka , et al. July 22, 2 | 2008-07-22 |
Semiconductor wafer holder and electroplating system for plating a semiconductor wafer App 20060151317 - Yoshioka; Junichiro ;   et al. | 2006-07-13 |
Semiconductor wafer holder and electroplating system for plating a semiconductor wafer Grant 7,022,211 - Yoshioka , et al. April 4, 2 | 2006-04-04 |
Plating apparatus and method App 20050082163 - Yoshioka, Junichiro ;   et al. | 2005-04-21 |
Electrolytic solution supply and recovery facility and liquid component replenishment apparatus App 20040256221 - Mishima, Koji ;   et al. | 2004-12-23 |
Semiconductor wafer holder and electroplating system for plating a semiconductor wafer App 20020029963 - Yoshioka, Junichiro ;   et al. | 2002-03-14 |
Plating apparatus and method App 20020027080 - Yoshioka, Junichiro ;   et al. | 2002-03-07 |