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Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same Grant 9,363,609 - Friza , et al. June 7, 2 | 2016-06-07 |
Method for Fabricating a Cavity Structure, for Fabricating a Cavity Structure for a Semiconductor Structure and a Semiconductor Microphone Fabricated by the Same App 20140037116 - Friza; Wolfgang ;   et al. | 2014-02-06 |
Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same Grant 8,575,037 - Friza , et al. November 5, 2 | 2013-11-05 |
Integrated circuit including an array of diodes coupled to a layer of resistance changing material Grant 8,284,596 - Kasko , et al. October 9, 2 | 2012-10-09 |
Method for Fabricating a Cavity Structure, for Fabricating a Cavity Structure for a Semiconductor Structure and a Semiconductor Microphone Fabricated by the Same App 20120161257 - Friza; Wolfgang ;   et al. | 2012-06-28 |
Interconnect structure for semiconductor devices Grant 8,138,538 - Moll , et al. March 20, 2 | 2012-03-20 |
Array of low resistive vertical diodes and method of production Grant 8,125,006 - Gruening-von Schwerin , et al. February 28, 2 | 2012-02-28 |
Method for producing an integrated circuit and arrangement comprising a substrate Grant 8,013,377 - Baars , et al. September 6, 2 | 2011-09-06 |
Memory circuit with field effect transistor and method for manufacturing a memory circuit with field effect transistor Grant 7,952,138 - Muemmler , et al. May 31, 2 | 2011-05-31 |
Integrated circuit and methods of manufacturing the same Grant 7,851,356 - Tegen , et al. December 14, 2 | 2010-12-14 |
Integrated circuit including an array of memory cells and method Grant 7,804,708 - Gruening-von Schwerin , et al. September 28, 2 | 2010-09-28 |
Transistor array for semiconductor memory devices and method for fabricating a vertical channel transistor array Grant 7,781,773 - Thies , et al. August 24, 2 | 2010-08-24 |
Conductive line comprising a capping layer Grant 7,777,266 - Baars , et al. August 17, 2 | 2010-08-17 |
Interconnect Structure For Semiconductor Devices App 20100090264 - Moll; Hans-Peter ;   et al. | 2010-04-15 |
Storage capacitor, a memory device and a method of manufacturing the same Grant 7,687,343 - Moll , et al. March 30, 2 | 2010-03-30 |
Array Of Low Resistive Vertical Diodes And Method Of Production App 20100032635 - Gruening-von Schwerin; Ulrike ;   et al. | 2010-02-11 |
Semiconductor component with MIM capacitor Grant 7,659,602 - Tegen , et al. February 9, 2 | 2010-02-09 |
Integrated Circuit Including An Array Of Memory Cells And Method App 20100027325 - Schwerin; Ulrike Gruening-von ;   et al. | 2010-02-04 |
Integrated Circuit And Method Of Manufacturing The Same App 20100013047 - Thies; Andreas ;   et al. | 2010-01-21 |
Integrated Circuit Including An Array Of Diodes Coupled To A Layer Of Resistance Changing Material App 20090303780 - Kasko; Igor ;   et al. | 2009-12-10 |
Semiconductor Component With Mim Capacitor App 20090294907 - Tegen; Stefan ;   et al. | 2009-12-03 |
Manufacturing method for an integrated semiconductor structure Grant 7,566,611 - Baars , et al. July 28, 2 | 2009-07-28 |
Conductive Line Comprising A Capping Layer App 20090140307 - Baars; Peter ;   et al. | 2009-06-04 |
Method For Producing An Integrated Circuit And Arrangement Comprising A Substrate App 20090121315 - Baars; Peter ;   et al. | 2009-05-14 |
Integrated Circuit and Methods of Manufacturing the Same App 20090085084 - Tegen; Stefan ;   et al. | 2009-04-02 |
Manufacturing method for an integrated circuit, corresponding intermediate integrated circuit structure and corresponding integrated circuit App 20090085157 - Muemmler; Klaus ;   et al. | 2009-04-02 |
Memory device and method of manufacturing a memory device Grant 7,482,221 - Muemmler , et al. January 27, 2 | 2009-01-27 |
Integrated circuit and corresponding manufacturing method App 20090008694 - Muemmler; Klaus ;   et al. | 2009-01-08 |
Memory cell array and method of manufacturing the same Grant 7,473,952 - Manger , et al. January 6, 2 | 2009-01-06 |
Method of manufacturing a semiconductor device Grant 7,468,306 - Thies , et al. December 23, 2 | 2008-12-23 |
Contact structure for a stack DRAM storage capacitor Grant 7,439,125 - Tegen , et al. October 21, 2 | 2008-10-21 |
Transistor Array for Semiconductor Memory Devices and Method for Fabricating a Vertical Channel Transistor Array App 20080150012 - Thies; Andreas ;   et al. | 2008-06-26 |
Semiconductor device and method of fabricating a semiconductor device App 20080151592 - Baars; Peter ;   et al. | 2008-06-26 |
Storage capacitor, a memory device and a method of manufacturing the same App 20080128773 - Moll; Peter ;   et al. | 2008-06-05 |
Manufacturing method for an integrated semiconductor structure Grant 7,374,992 - Baars , et al. May 20, 2 | 2008-05-20 |
Memory Device And A Method Of Manufacturing The Same App 20080111174 - Baars; Peter ;   et al. | 2008-05-15 |
Method of manufacturing a field effect transistor device with recessed channel and corner gate device Grant 7,371,645 - Muemmler , et al. May 13, 2 | 2008-05-13 |
Transistor array for semiconductor memory devices and method for fabricating a vertical channel transistor array Grant 7,355,230 - Thies , et al. April 8, 2 | 2008-04-08 |
Manufacturing method for an integrated semiconductor structure App 20070281417 - Baars; Peter ;   et al. | 2007-12-06 |
Manufacturing method for an integrated semiconductor structure App 20070281416 - Baars; Peter ;   et al. | 2007-12-06 |
Semiconductor memory device and method of production App 20070253233 - Mueller; Torsten ;   et al. | 2007-11-01 |
Method of fabricating a semiconductor device App 20070190773 - Baars; Peter ;   et al. | 2007-08-16 |
Memory Device and Method of Manufacturing the Same App 20070161277 - Baars; Peter ;   et al. | 2007-07-12 |
Method of manufacturing a field effect transistor device with recessed channel and corner gate device App 20070155119 - Muemmler; Klaus ;   et al. | 2007-07-05 |
Memory device and method of manufacturing a memory device App 20070037334 - Muemmler; Klaus ;   et al. | 2007-02-15 |
Method of manufacturing a semiconductor device App 20060267139 - Thies; Andreas ;   et al. | 2006-11-30 |
Contact structure for a stack DRAM storage capacitor App 20060270146 - Tegen; Stefan ;   et al. | 2006-11-30 |
Memory device and method of manufacturing the same App 20060255384 - Baars; Peter ;   et al. | 2006-11-16 |
Memory cell array and method of manufacturing the same App 20060244024 - Manger; Dirk ;   et al. | 2006-11-02 |
Transistor array for semiconductor memory devices and method for fabricating a vertical channel transistor array App 20060113587 - Thies; Andreas ;   et al. | 2006-06-01 |
DRAM cell array having vertical memory cells and methods for fabricating a DRAM cell array and a DRAM App 20050088895 - Manger, Dirk ;   et al. | 2005-04-28 |