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Patent applications and USPTO patent grants for Muehlbeyer; Michael.The latest application filed is for "diaphragm changing device".
Patent | Date |
---|---|
Diaphragm changing device Grant 10,139,733 - Bieg , et al. Nov | 2018-11-27 |
Diaphragm Changing Device App 20160282724 - Bieg; Hermann ;   et al. | 2016-09-29 |
Imaging device in a projection exposure facility Grant 8,514,371 - Hummel , et al. August 20, 2 | 2013-08-20 |
Apparatus for manipulation of an optical element Grant 8,179,621 - Muehlbeyer , et al. May 15, 2 | 2012-05-15 |
Diaphragm Changing Device App 20120075611 - Bieg; Hermann ;   et al. | 2012-03-29 |
Diaphragm changing device Grant 8,089,707 - Bieg , et al. January 3, 2 | 2012-01-03 |
Device consisting of at least one optical element Grant 7,995,884 - Kwan , et al. August 9, 2 | 2011-08-09 |
Imaging device in a projection exposure facility Grant 7,961,294 - Hummel , et al. June 14, 2 | 2011-06-14 |
Apparatus For Manipulation Of An Optical Element App 20100157270 - Muehlbeyer; Michael ;   et al. | 2010-06-24 |
Diaphragm Changing Device App 20100134777 - Bieg; Hermann ;   et al. | 2010-06-03 |
Diaphragm changing device Grant 7,684,125 - Bieg , et al. March 23, 2 | 2010-03-23 |
Imaging Device in a Projection Exposure Machine App 20090141258 - Back; Stephan ;   et al. | 2009-06-04 |
Apparatus For Manipulation Of An Optical Element App 20090050776 - Muehlbeyer; Michael ;   et al. | 2009-02-26 |
Imaging Device In A Projection Exposure Facility App 20090040487 - Hummel; Wolfgang ;   et al. | 2009-02-12 |
Imaging device in a projection exposure machine Grant 7,486,382 - Back , et al. February 3, 2 | 2009-02-03 |
Imaging device in a projection exposure facility Grant 7,304,717 - Hummel , et al. December 4, 2 | 2007-12-04 |
Apparatus for manipulation of an optical element App 20070052301 - Muehlbeyer; Michael ;   et al. | 2007-03-08 |
Imaging device in a projection exposure machine App 20060164619 - Back; Stephan ;   et al. | 2006-07-27 |
Method for the targeted deformation of an optical element App 20050280910 - Fehr, Jean Noel ;   et al. | 2005-12-22 |
System for damping oscillations Grant 6,897,599 - Sorg , et al. May 24, 2 | 2005-05-24 |
Optical system with isolated measuring structure Grant 6,864,988 - Hof , et al. March 8, 2 | 2005-03-08 |
Oscillation damping system Grant 6,700,715 - Sorg , et al. March 2, 2 | 2004-03-02 |
Optical system with a plurality of optical elements App 20030010902 - Hof, Albrecht ;   et al. | 2003-01-16 |
Optical imaging device, in particular lens system, with at least one system diaphragm Grant 6,445,510 - Schuster , et al. September 3, 2 | 2002-09-03 |
System for damping oscillations App 20020109437 - Sorg, Franz ;   et al. | 2002-08-15 |
Oscillation damping system App 20020075574 - Sorg, Franz ;   et al. | 2002-06-20 |
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