Mudrow; Matthew
Patent Applications and Registrations
Patent applications and USPTO patent grants for Mudrow; Matthew.The latest application filed is for "spatially tunable deposition to compensate within wafer differential bow".
- Mudrow; Matthew - Tigard OR
| Patent | Date |
|---|---|
| Spatially Tunable Deposition To Compensate Within Wafer Differential Bow App 20220298632 - Shaikh; Fayaz A. ; et al. | 2022-09-22 |
| High Temperature Heating Of A Substrate In A Processing Chamber App 20220199379 - LEE; James F. ; et al. | 2022-06-23 |
| Showerhead With Configurable Gas Outlets App 20220136107 - LEE; James F. ; et al. | 2022-05-05 |
| High power low pressure UV bulb with plasma resistant coating Grant 10,354,857 - Chen , et al. July 16, 2 | 2019-07-16 |
| Rapid chamber clean using concurrent in-situ and remote plasma sources Grant 10,161,034 - Fox , et al. Dec | 2018-12-25 |
| Rapid Chamber Clean Using Concurrent In-situ And Remote Plasma Sources App 20180305814 - Fox; Keith ; et al. | 2018-10-25 |
| High Power Low Pressure Uv Bulb With Plasma Resistant Coating App 20180182607 - Chen; Xiaolan ; et al. | 2018-06-28 |
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