Patent | Date |
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Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same Grant 11,424,148 - Penley , et al. August 23, 2 | 2022-08-23 |
Flow Control System, Method, And Apparatus App 20220004209 - Mudd; Daniel T. ;   et al. | 2022-01-06 |
Flow control system, method, and apparatus Grant 11,144,075 - Mudd , et al. October 12, 2 | 2021-10-12 |
Controlled delivery of process gas using a remote pressure measurement device Grant 11,003,198 - Mudd , et al. May 11, 2 | 2021-05-11 |
Flow Control System, Method, And Apparatus App 20210004027 - Mudd; Daniel T. ;   et al. | 2021-01-07 |
Flow Control System, Method, And Apparatus App 20200400470 - Mudd; Daniel T. ;   et al. | 2020-12-24 |
Flow control system, method, and apparatus Grant 10,782,165 - Mudd , et al. Sept | 2020-09-22 |
Method Of Achieving Improved Transient Response In Apparatus For Controlling Flow And System For Accomplishing Same App 20200258764 - A1 | 2020-08-13 |
Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same Grant 10,679,880 - Penley , et al. | 2020-06-09 |
Flow control showerhead with integrated flow restrictors for improved gas delivery to a semiconductor process Grant 10,497,542 - Mudd , et al. De | 2019-12-03 |
Flow Control System, Method, And Apparatus App 20180216976 - Mudd; Daniel T. ;   et al. | 2018-08-02 |
Wider dynamic accuracy range for gas delivery devices Grant 9,976,887 - Mudd , et al. May 22, 2 | 2018-05-22 |
Flow control system, method, and apparatus Grant 9,958,302 - Mudd , et al. May 1, 2 | 2018-05-01 |
Method Of Achieving Improved Transient Response In Apparatus For Controlling Flow And System For Accomplishing Same App 20180090353 - Penley; Sean ;   et al. | 2018-03-29 |
Flow Control Showerhead With Integrated Flow Restrictors For Improved Gas Delivery To A Semiconductor Process App 20170194172 - MUDD; Daniel T. ;   et al. | 2017-07-06 |
Pressure based mass flow controller Grant 9,690,301 - Mudd , et al. June 27, 2 | 2017-06-27 |
Gas delivery system for outputting fast square waves of process gas during semiconductor processing Grant 9,448,564 - Mudd , et al. September 20, 2 | 2016-09-20 |
Flow Control System, Method, And Apparatus App 20160216713 - Mudd; Daniel T. ;   et al. | 2016-07-28 |
Reverse Flow Mode For Regulating Pressure Of An Accumulated Volume With Fast Upstream Bleed Down App 20160041564 - MUDD; Daniel T. ;   et al. | 2016-02-11 |
Pressure-based Mass Flow Controller With Reverse Flow Mode For Fast Bleed Down App 20160018828 - MUDD; Daniel T. ;   et al. | 2016-01-21 |
Controlled Delivery Of Process Gas Using A Remote Pressure Measurement Device App 20160011604 - MUDD; Daniel T. ;   et al. | 2016-01-14 |
Flow node to deliver process gas using a remote pressure measurement device Grant 9,188,989 - Mudd , et al. November 17, 2 | 2015-11-17 |
Gas Delivery System For Outputting Fast Square Waves Of Process Gas During Semiconductor Processing App 20140230915 - MUDD; Daniel T. ;   et al. | 2014-08-21 |
Low flow injector to deliver a low flow of gas to a remote location Grant 8,770,215 - Mudd , et al. July 8, 2 | 2014-07-08 |
Pressure Based Mass Flow Controller App 20140069527 - MUDD; Daniel T. ;   et al. | 2014-03-13 |