| Patent | Date |
|---|
Micromechanical micromirror array and corresponding operating method
Grant 11,307,404 - Grutzeck , et al. April 19, 2 | 2022-04-19 |
Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure
Grant 11,124,412 - Muchow , et al. September 21, 2 | 2021-09-21 |
Micromechanical Component And Method For Producing A Micromechanical Component
App 20210271073 - Eberspaecher; Alexander ; et al. | 2021-09-02 |
Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis
Grant 11,066,295 - Kaupmann , et al. July 20, 2 | 2021-07-20 |
Micromechanical component and method for producing a micromechanical component
Grant 10,989,913 - Finn , et al. April 27, 2 | 2021-04-27 |
Micromirror device and method for operating a micromirror device
Grant 10,871,646 - Schatz , et al. December 22, 2 | 2020-12-22 |
Micromechanical component and method for producing a micromechanical component
Grant 10,866,407 - Maier , et al. December 15, 2 | 2020-12-15 |
Interposer Substrate, Mems Device And Corresponding Manufacturing Method
App 20200346921 - Koepernik; Corinna ; et al. | 2020-11-05 |
Micromechanical actuator device and method for tilting a micromechanical actuator device
Grant 10,775,610 - Steuer , et al. Sept | 2020-09-15 |
Micromechanical spring device and method for manufacturing a micromechanical spring device
Grant 10,737,930 - Grutzeck , et al. A | 2020-08-11 |
Micromechanical Micromirror Array And Corresponding Operating Method
App 20200249467 - Kind Code | 2020-08-06 |
Manufacturing Method For A Micromechanical Window Structure And Corresponding Micromechanical Window Structure
App 20200231433 - Muchow; Joerg ; et al. | 2020-07-23 |
Micromechanical component and method for producing a micromechanical component
Grant 10,696,542 - Grutzeck , et al. June 30, 2 | 2020-06-30 |
Magnetic actuator
Grant 10,690,906 - Pinter , et al. | 2020-06-23 |
Micromechanical constituent and method for adjusting an adjustable element
Grant 10,627,617 - Schatz , et al. | 2020-04-21 |
Mechanical component and manufacturing method for a mechanical component
Grant 10,589,988 - Heinzelmann , et al. | 2020-03-17 |
Micromechanical Component Having An Oscillator, A Method For The Manufacture Thereof, And A Method For Exciting A Motion Of An A
App 20190359478 - Kaupmann; Philip ; et al. | 2019-11-28 |
Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another
Grant 10,488,650 - Grutzeck , et al. Nov | 2019-11-26 |
Micromechanical Component And Method For Producing A Micromechanical Component
App 20190219814 - Finn; Andreas ; et al. | 2019-07-18 |
Micromirror Device And Method For Operating A Micromirror Device
App 20190179137 - Schatz; Frank ; et al. | 2019-06-13 |
Micromechanical Component And Method For Producing A Micromechanical Component
App 20190146210 - Maier; Daniel ; et al. | 2019-05-16 |
Micromirror arrangement and projection device
Grant 10,222,609 - Straub , et al. | 2019-03-05 |
Micromirror array and method for the manufacture thereof
Grant 10,175,473 - Muchow , et al. J | 2019-01-08 |
Micromechanical Constituent And Method For Adjusting An Adjustable Element
App 20180314056 - Schatz; Frank ; et al. | 2018-11-01 |
Micromechanical Actuator Device And Method For Tilting A Micromechanical Actuator Device
App 20180252912 - Steuer; Benjamin ; et al. | 2018-09-06 |
Micromirror
Grant 10,048,487 - Nitsche , et al. August 14, 2 | 2018-08-14 |
Manufacturing Method For A Micromechanical Window Structure And Corresponding Micromechanical Window Structure
App 20180194616 - Muchow; Joerg ; et al. | 2018-07-12 |
Micromirror device and projection device
Grant 10,001,643 - Straub , et al. June 19, 2 | 2018-06-19 |
Micromechanical Spring Device And Method For Manufacturing A Micromechanical Spring Device
App 20180155185 - GRUTZECK; Helmut ; et al. | 2018-06-07 |
Micromechanical component and method for producing a micromechanical component
Grant 9,979,269 - Muchow , et al. May 22, 2 | 2018-05-22 |
Micromechanical Component And Method For Producing A Micromechanical Component
App 20180105416 - Grutzeck; Helmut ; et al. | 2018-04-19 |
Mirror system and projection device
Grant 9,885,866 - Straub , et al. February 6, 2 | 2018-02-06 |
Micromechanical Component and Method for Adjusting an Adjustable Part Simultaneously about Two Axes of Rotation Inclined in Relation to One Another
App 20170343795 - Grutzeck; Helmut ; et al. | 2017-11-30 |
Magnetically drivable micromirror
Grant 9,791,663 - Pinter , et al. October 17, 2 | 2017-10-17 |
Micromechanical component and corresponding test method for a micromechanical component
Grant 9,764,945 - Reiss , et al. September 19, 2 | 2017-09-19 |
Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly
Grant 9,739,998 - Muchow , et al. August 22, 2 | 2017-08-22 |
Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting
Grant 9,725,311 - Franz , et al. August 8, 2 | 2017-08-08 |
Micromirror Array And Method For The Manufacture Thereof
App 20170205621 - MUCHOW; Joerg ; et al. | 2017-07-20 |
Micromirror Arrangement And Projection Device
App 20170146792 - Straub; Rainer ; et al. | 2017-05-25 |
Micromirror Device And Projection Device
App 20170108693 - Straub; Rainer ; et al. | 2017-04-20 |
Mechanical component, mechanical system, and method for operating a mechanical component
Grant 9,593,013 - Iyad Al Dibs , et al. March 14, 2 | 2017-03-14 |
Mirror System And Projection Device
App 20170052363 - Straub; Rainer ; et al. | 2017-02-23 |
Micromechanical component and method for producing a micromechanical component
Grant 9,360,664 - Armbruster , et al. June 7, 2 | 2016-06-07 |
Micromechanical Component And Method For Producing A Micromechanical Component
App 20150357897 - MUCHOW; Joerg ; et al. | 2015-12-10 |
Cascaded micromechanical actuator structure
Grant 9,195,054 - Pirk , et al. November 24, 2 | 2015-11-24 |
Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting
App 20150232330 - FRANZ; Jochen ; et al. | 2015-08-20 |
Micromechanical component and manufacturing method for a micromechanical component
Grant 9,052,510 - Lindenkreuz , et al. June 9, 2 | 2015-06-09 |
Micromirror And Manufacturing Method For At Least One Micromirror Which Is Situatable Or Situated In A Micromirror Device
App 20150153566 - Armbruster; Simon ; et al. | 2015-06-04 |
Micromechanical component and method for producing a micromechanical component
Grant 9,045,331 - Nitsche , et al. June 2, 2 | 2015-06-02 |
Micromechanical Component And Corresponding Test Method For A Micromechanical Component
App 20150061695 - REISS; Sebastian ; et al. | 2015-03-05 |
Micromechanical Component And Method For Producing A Micromechanical Component
App 20150062677 - ARMBRUSTER; Simon ; et al. | 2015-03-05 |
Micromirror
App 20150036203 - Nitsche; Heiko ; et al. | 2015-02-05 |
Micromechanical component, micromirror device, and manufacturing method for a micromechanical component
App 20140376071 - ARMBRUSTER; Simon ; et al. | 2014-12-25 |
Micromechanical component and a method for operating a micromechanical component
Grant 8,896,897 - Pinter , et al. November 25, 2 | 2014-11-25 |
Micromechanical component having an inclined structure and corresponding manufacturing method
Grant 8,847,336 - Pirk , et al. September 30, 2 | 2014-09-30 |
Micromechanical component and production method for a micromechanical component
Grant 8,813,573 - Njikam Njimonzie , et al. August 26, 2 | 2014-08-26 |
Mechanical Component, Mechanical System, And Method For Operating A Mechanical Component
App 20140117888 - IYAD AL DIBS; Mohamad ; et al. | 2014-05-01 |
Mechanical Component And Manufacturing Method For A Mechanical Component
App 20140118005 - HEINZELMANN; Wolfgang ; et al. | 2014-05-01 |
Magnetically Drivable Micromirror
App 20140092458 - Pinter; Stefan ; et al. | 2014-04-03 |
Micromechanical Assembly, Method For Manufacturing A Micromechanical Assembly And Method For Operating A Micromechanical Assembly
App 20130308173 - MUCHOW; Joerg ; et al. | 2013-11-21 |
Electrode comb, micromechanical component, and method for producing an electrode comb or a micromechanical component
Grant 8,581,470 - Pirk , et al. November 12, 2 | 2013-11-12 |
Micromechanical Component And Method For Producing A Micromechanical Component
App 20130271807 - Nitsche; Heiko ; et al. | 2013-10-17 |
Micromechanical component, light-deflecting device, and manufacturing methods for a micromechanical component and a light-deflecting device
Grant 8,462,414 - Fiess , et al. June 11, 2 | 2013-06-11 |
Connecting structure for micromechanical oscillating devices
Grant 8,462,415 - Pinter , et al. June 11, 2 | 2013-06-11 |
Magnetic yoke, micromechanical component and method for producing a magnetic yoke and a micromechanical component
Grant 8,344,831 - Pinter , et al. January 1, 2 | 2013-01-01 |
Tire sensor module and method for its manufacture
Grant 8,248,225 - Buck , et al. August 21, 2 | 2012-08-21 |
Magnetic actuator
App 20120147444 - PINTER; Stefan ; et al. | 2012-06-14 |
Micromechanical Component And Production Method For A Micromechanical Component
App 20120133242 - Njikam Njimonzie; Frederic ; et al. | 2012-05-31 |
Electrostatic drive, method for operating a micromechanical component having an electrostatic drive, and method for manufacturing an electrostatic drive
Grant 8,188,634 - Krueger , et al. May 29, 2 | 2012-05-29 |
Micromechanical component and production method for a micromechanical component
App 20120125117 - Njikam Njimonzie; Frederic ; et al. | 2012-05-24 |
Micromechanical component and manufacturing method for a micromechanical component
App 20110292529 - Lindenkreuz; Steffi ; et al. | 2011-12-01 |
Connecting Structure For Micromechanical Oscillating Devices
App 20110286069 - PINTER; Stefan ; et al. | 2011-11-24 |
Micromechanical Component And A Method For Operating A Micromechanical Component
App 20110261428 - Pinter; Stefan ; et al. | 2011-10-27 |
Electrostatic Drive, Micromechanical Component, And Manufacturing Method For An Electrostatic Drive And A Micromechanical Component
App 20110254404 - Pirk; Tjalf ; et al. | 2011-10-20 |
Cascaded Micromechanical Actuator Structure
App 20110248601 - Pirk; Tjalf ; et al. | 2011-10-13 |
Magnetic Yoke, Micromechanical Component, And Method For The Manufacture Thereof
App 20110199172 - Pirk; Tjalf ; et al. | 2011-08-18 |
Micromechanical Component Having An Inclined Structure And Corresponding Manufacturing Method
App 20110147862 - Pirk; Tjalf ; et al. | 2011-06-23 |
Electrode Comb, Micromechanical Component, And Method For Producing An Electrode Comb Or A Micromechanical Component
App 20110101821 - Pirk; Tjalf ; et al. | 2011-05-05 |
Micromechanical sensor element
Grant 7,918,136 - Muchow , et al. April 5, 2 | 2011-04-05 |
Micromechanical component, light-deflecting device, and manufacturing methods for a micromechanical component and a light-deflecting device
App 20110032591 - Fiess; Reinhold ; et al. | 2011-02-10 |
Magnetic Yoke, Micromechanical Component And Method For Producing A Magnetic Yoke And A Micromechanical Component
App 20110006866 - Pinter; Stefan ; et al. | 2011-01-13 |
Electrostatic Drive, Method For Operating A Micromechanical Component Having An Electrostatic Drive, And Method For Manufacturing An Electrostatic Drive
App 20100201292 - Krueger; Michael ; et al. | 2010-08-12 |
Micromechanical component and method for manufacturing such a component
Grant 7,667,282 - Muchow , et al. February 23, 2 | 2010-02-23 |
Micromechanical device and method for producing a micromechanical device
Grant 7,647,832 - Muchow , et al. January 19, 2 | 2010-01-19 |
Micromechanical Sensor Element
App 20090084182 - Muchow; Joerg ; et al. | 2009-04-02 |
Pressure sensor featuring pressure loading of the fastening element
Grant 7,343,806 - Muchow , et al. March 18, 2 | 2008-03-18 |
Membrane sensor
Grant 7,279,759 - Muller-Fiedler , et al. October 9, 2 | 2007-10-09 |
Micromechanical piezoresistive pressure sensor device
Grant 7,252,008 - Muchow , et al. August 7, 2 | 2007-08-07 |
Micromechanical device and method for producing a micromechanical device
App 20070126069 - Muchow; Joerg ; et al. | 2007-06-07 |
Pressure sensor featuring pressure loading of the fastening element
App 20060162462 - Muchow; Joerg ; et al. | 2006-07-27 |
Micromechanical pressure sensor
Grant 7,055,392 - Muchow , et al. June 6, 2 | 2006-06-06 |
Micromechanical component and method for manufacturing such a component
App 20060021961 - Muchow; Joerg ; et al. | 2006-02-02 |
Micromechanical piezoresistive pressure sensor device
App 20050252302 - Muchow, Joerg ; et al. | 2005-11-17 |
Micromechanical apparatus, pressure sensor, and method
App 20050016288 - Muchow, Joerg ; et al. | 2005-01-27 |
Micromechanical pressure sensor
App 20050000292 - Muchow, Joerg ; et al. | 2005-01-06 |
Micromechanical component and equalization method
Grant 6,782,756 - Muchow , et al. August 31, 2 | 2004-08-31 |
Micromechanical pressure sensor device and corresponding measurement system
App 20040079159 - Muchow, Joerg | 2004-04-29 |
Micromechanical sensor and method for the manufacture thereof
Grant 6,318,175 - Muchow , et al. November 20, 2 | 2001-11-20 |
Method of fabricating a micromechanical sensor
Grant 5,616,514 - Muchow , et al. April 1, 1 | 1997-04-01 |
Microvalve of multilayer silicon construction
Grant 5,216,273 - Doering , et al. June 1, 1 | 1993-06-01 |
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