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Plasma Etching Method, Method For Producing Semiconductor Device, And Plasma Etching Device App 20130029494 - Sasaki; Masaru ;   et al. | 2013-01-31 |
Antenna, Dielectric Window, Plasma Processing Apparatus And Plasma Processing Method App 20130008607 - MATSUMOTO; Naoki ;   et al. | 2013-01-10 |
Method for controlling film forming apparatus, film forming method, film forming apparatus, organic EL electronic device, and storage medium having program for controlling film forming apparatus stored therein Grant 8,328,999 - Moyama December 11, 2 | 2012-12-11 |
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Sample Table And Microwave Plasma Processing Apparatus App 20120211165 - Yoshikawa; Wataru ;   et al. | 2012-08-23 |
Solar Cell Wherein Solar Photovolatic Thin Film Is Directly Formed On Base App 20100326511 - Wakayama; Yoshihide ;   et al. | 2010-12-30 |
Film Forming Device Control Method, Film Forming Method, Film Forming Device, Organic El Electronic Device, And Recording Medium Storing Its Control Program App 20100259162 - Moyama; Kazuki | 2010-10-14 |
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Light-emitting Device, Method For Manufacturing Light-emitting Device, And Substrate Processing Apparatus App 20090206728 - Nozawa; Toshihisa ;   et al. | 2009-08-20 |
Apparatus for Manufacturing Light Emitting Elements and Method of Manufacturing Light Emitting Elements App 20090202708 - Moyama; Kazuki ;   et al. | 2009-08-13 |
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Assembly for sputtering aluminum-neodymium alloys App 20060081465 - Moyama; Kazuki | 2006-04-20 |
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