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Motosugi; Tomoo Patent Filings

Motosugi; Tomoo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Motosugi; Tomoo.The latest application filed is for "settling time determination method and multi charged particle beam writing method".

Company Profile
0.7.9
  • Motosugi; Tomoo - Yokohama JP
  • MOTOSUGI; Tomoo - Yokohama-shi JP
  • Motosugi; Tomoo - Kanagawa JP
  • Motosugi; Tomoo - Shizuoka JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Settling time determination method and multi charged particle beam writing method
Grant 11,244,807 - Motosugi February 8, 2
2022-02-08
Settling Time Determination Method And Multi Charged Particle Beam Writing Method
App 20210193436 - MOTOSUGI; Tomoo
2021-06-24
Charged particle beam drawing method and charged particle beam drawing apparatus
Grant 10,217,606 - Ito , et al. Feb
2019-02-26
Charged Particle Beam Drawing Method And Charged Particle Beam Drawing Apparatus
App 20180033592 - ITO; Rumi ;   et al.
2018-02-01
Charged particle beam drawing apparatus and charged particle beam drawing method
Grant 9,852,883 - Motosugi December 26, 2
2017-12-26
Charged Particle Beam Drawing Apparatus And Charged Particle Beam Drawing Method
App 20170243718 - MOTOSUGI; Tomoo
2017-08-24
Charged particle beam writing apparatus, charged particle beam writing method, and shot correction method of charged particle beam writing method
Grant 9,583,310 - Motosugi February 28, 2
2017-02-28
Charged Particle Beam Writing Apparatus, Charged Particle Beam Writing Method, And Shot Correction Method Of Charged Particle Beam Writing Method
App 20160111252 - MOTOSUGI; Tomoo
2016-04-21
Charged particle beam writing apparatus, and charged particle beam writing method
Grant 9,190,245 - Motosugi , et al. November 17, 2
2015-11-17
Charged particle beam writing method and charged particle beam writing apparatus
Grant 9,147,552 - Motosugi , et al. September 29, 2
2015-09-29
Charged Particle Beam Writing Apparatus, And Charged Particle Beam Writing Method
App 20150228455 - MOTOSUGI; Tomoo ;   et al.
2015-08-13
Charged Particle Beam Writing Method And Charged Particlebeam Writing Apparatus
App 20150041671 - MOTOSUGI; Tomoo ;   et al.
2015-02-12
Method and apparatus for writing
Grant 8,309,283 - Kato , et al. November 13, 2
2012-11-13
Lithography method of electron beam
App 20100178611 - Anze; Hirohito ;   et al.
2010-07-15
Method And Apparatus For Writing
App 20100173235 - KATO; Yasuo ;   et al.
2010-07-08
Forming Method Of Resist Pattern And Writing Method Of Charged Particle Beam
App 20070243487 - Anze; Hirohito ;   et al.
2007-10-18

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