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Pad-temperature Regulating Apparatus, And Polishing Apparatus App 20220305617 - KAMIKI; Keisuke ;   et al. | 2022-09-29 |
Method Of Calibrating Radiation Thermometer And System Thereof App 20220228924 - Uozumi; Shuji ;   et al. | 2022-07-21 |
Cleaning apparatus for heat exchanger and polishing apparatus Grant 11,383,345 - Motoshima , et al. July 12, 2 | 2022-07-12 |
Temperature Regulating Apparatus And Polishing Apparatus App 20220212312 - Kamiki; Keisuke ;   et al. | 2022-07-07 |
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Substrate Polishing Apparatus, Substrate Polishing Method, And Apparatus For Regulating Temperature Of Polishing Surface Of Polishing Pad Used In Polishing Apparatus App 20210229235 - SONE; Tadakazu ;   et al. | 2021-07-29 |
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Dummy Disk, Dressing Disk, And Surface Height Measurement Method Using Dummy Disk App 20200246936 - Kind Code | 2020-08-06 |
Polishing method and polishing apparatus Grant 10,710,208 - Maruyama , et al. | 2020-07-14 |
Substrate Cleaning Device App 20200188962 - UOZUMI; SHUJI ;   et al. | 2020-06-18 |
Temperature Adjusting Device And Polishing Device App 20200164480 - Motoshima; Yasuyuki | 2020-05-28 |
Method Of Checking Leakage Of Fluid And Polishing Apparatus App 20190389030 - Maruyama; Toru ;   et al. | 2019-12-26 |
Substrate transfer hand Grant 10,475,691 - Maruyama , et al. Nov | 2019-11-12 |
Apparatus and method for regulating surface temperature of polishing pad Grant 10,414,018 - Maruyama , et al. Sept | 2019-09-17 |
Pad Temperature Adjustment Apparatus For Adjusting Temperature Of Polishing Pad, And Polishing Apparatus App 20190193237 - MOTOSHIMA; Yasuyuki | 2019-06-27 |
Substrate Polishing Apparatus, Substrate Polishing Method, And Apparatus For Regulating Temperature Of Polishing Surface Of Poli App 20190168354 - SONE; Tadakazu ;   et al. | 2019-06-06 |
Substrate Cleaning Device And Substrate Cleaning Method App 20190164769 - KAJITA; Shinji ;   et al. | 2019-05-30 |
Heat Exchanger For Regulating Temperature Of Polishing Surface Of Polishing Pad, Polishing Apparatus Having Such Heat Exchanger, Polishing Method For Substrate Using Such Heat Exchanger, And Computer-readable Storage Medium Storing A Program For Regulating Temperature Of Polishing Surface Of Polishi App 20190126428 - MARUYAMA; Toru ;   et al. | 2019-05-02 |
Polishing Method And Polishing Apparatus App 20190118334 - MARUYAMA; Toru ;   et al. | 2019-04-25 |
Method and apparatus for polishing a substrate Grant 10,259,098 - Motoshima , et al. | 2019-04-16 |
Polishing method and polishing apparatus Grant 10,195,712 - Maruyama , et al. Fe | 2019-02-05 |
Polishing apparatus including pad contact member with baffle in liquid flow path therein Grant 10,099,340 - Motoshima October 16, 2 | 2018-10-16 |
Method And Apparatus For Polishing A Substrate App 20180222007 - MOTOSHIMA; Yasuyuki ;   et al. | 2018-08-09 |
Polishing method and polishing apparatus Grant 10,035,238 - Maruyama , et al. July 31, 2 | 2018-07-31 |
Method and apparatus for polishing a substrate Grant 9,969,046 - Motoshima , et al. May 15, 2 | 2018-05-15 |
Polishing Method And Polishing Apparatus App 20180021917 - MARUYAMA; Toru ;   et al. | 2018-01-25 |
Polishing Method And Polishing Apparatus App 20170361420 - MARUYAMA; Toru ;   et al. | 2017-12-21 |
Polishing method and polishing apparatus Grant 9,782,870 - Maruyama , et al. October 10, 2 | 2017-10-10 |
Apparatus And Method For Regulating Surface Temperature Of Polishing Pad App 20170239778 - MARUYAMA; Toru ;   et al. | 2017-08-24 |
Polishing Apparatus App 20170106492 - Motoshima; Yasuyuki | 2017-04-20 |
Method and apparatus for polishing a substrate Grant 9,579,768 - Motoshima , et al. February 28, 2 | 2017-02-28 |
Adjusting a substrate polishing condition Grant 9,561,575 - Motoshima , et al. February 7, 2 | 2017-02-07 |
Polishing apparatus having temperature regulator for polishing pad Grant 9,475,167 - Maruyama , et al. October 25, 2 | 2016-10-25 |
Substrate Transfer Hand App 20160264365 - Maruyama; Toru ;   et al. | 2016-09-15 |
Adjusting A Substrate Polishing Condition App 20160096250 - MOTOSHIMA; Yasuyuki ;   et al. | 2016-04-07 |
Adjusting a substrate polishing condition Grant 9,233,448 - Motoshima , et al. January 12, 2 | 2016-01-12 |
Method And Apparatus For Polishing A Substrate App 20150224621 - MOTOSHIMA; Yasuyuki ;   et al. | 2015-08-13 |
Polishing Method And Polishing Apparatus App 20150079881 - MARUYAMA; Toru ;   et al. | 2015-03-19 |
Substrate Polishing Apparatus, Substrate Polishing Method, And Apparatus For Regulating Temperature Of Polishing Surface Of Polishing Pad Used In Polishing Apparatus App 20140364040 - SONE; Tadakazu ;   et al. | 2014-12-11 |
Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatus Grant 8,845,391 - Sone , et al. September 30, 2 | 2014-09-30 |
Substrate holding apparatus, substrate holding method, and substrate processing apparatus Grant 8,777,198 - Sekimoto , et al. July 15, 2 | 2014-07-15 |
Polishing Method And Polishing Apparatus App 20140127973 - MOTOSHIMA; Yasuyuki ;   et al. | 2014-05-08 |
Method And Apparatus For Polishing A Substrate App 20130023186 - MOTOSHIMA; Yasuyuki ;   et al. | 2013-01-24 |
Polishing Apparatus Having Temperature Regulator For Polishing Pad App 20120220196 - MARUYAMA; Toru ;   et al. | 2012-08-30 |
Substrate Holding Apparatus, Substrate Holding Method, And Substrate Processing Apparatus App 20120141246 - SEKIMOTO; Masahiko ;   et al. | 2012-06-07 |
Substrate holding apparatus, substrate holding method, and substrate processing apparatus Grant 8,141,513 - Sekimoto , et al. March 27, 2 | 2012-03-27 |
Substrate Polishing Apparatus, Substrate Polishing Method, And Apparatus For Regulating Temperature Of Polishing Surface Of Polishing Pad Used In Polishing Apparatus App 20110159782 - SONE; Tadakazu ;   et al. | 2011-06-30 |
Substrate Holding Apparatus, Substrate Holding Method, And Substrate Processing Apparatus App 20110094442 - SEKIMOTO; Masahiko ;   et al. | 2011-04-28 |
Substrate holding apparatus, substrate holding method, and substrate processing apparatus Grant 7,886,685 - Sekimoto , et al. February 15, 2 | 2011-02-15 |
Substrate processing apparatus and substrate processing method Grant 7,575,636 - Katsuoka , et al. August 18, 2 | 2009-08-18 |
Substrate processing apparatus and substrate processing method Grant 7,442,257 - Katsuoka , et al. October 28, 2 | 2008-10-28 |
Substrate holding apparatus, substrate holding method, and substrate processing apparatus App 20070070575 - Sekimoto; Masahiko ;   et al. | 2007-03-29 |
Substrate processing apparatus and substrate processing method App 20060243204 - Katsuoka; Seiji ;   et al. | 2006-11-02 |
Substrate processing apparatus and substrate processing method App 20060243205 - Katsuoka; Seiji ;   et al. | 2006-11-02 |
Substrate processing apparatus and substrate processing method App 20060236929 - Katsuoka; Seiji ;   et al. | 2006-10-26 |
Substrate processing apparatus and substrate processing method Grant 7,087,117 - Katsuoka , et al. August 8, 2 | 2006-08-08 |
Substrate processing apparatus and substrate processing method App 20050072358 - Katsuoka, Seiji ;   et al. | 2005-04-07 |