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Patent applications and USPTO patent grants for Motojima; Yasuyuki.The latest application filed is for "substrate processing method and apparatus".
Patent | Date |
---|---|
Substrate processing method and apparatus Grant 8,225,803 - Katsuoka , et al. July 24, 2 | 2012-07-24 |
Substrate Processing Method And Apparatus App 20110203518 - KATSUOKA; Seiji ;   et al. | 2011-08-25 |
Substrate processing method and apparatus Grant 7,959,977 - Katsuoka , et al. June 14, 2 | 2011-06-14 |
Substrate Processing Method And Apparatus App 20100221432 - Katsuoka; Seiji ;   et al. | 2010-09-02 |
Substrate processing method and apparatus Grant 7,735,451 - Katsuoka , et al. June 15, 2 | 2010-06-15 |
Substrate processing apparatus and substrate processing method App 20070214620 - Miyazaki; Mitsuru ;   et al. | 2007-09-20 |
Substrate processing apparatus and substrate processing method Grant 7,235,135 - Miyazaki , et al. June 26, 2 | 2007-06-26 |
Substrate processing apparatus and substrate processing method App 20050158478 - Katsuoka, Seiji ;   et al. | 2005-07-21 |
Substrate processing method and apparatus App 20040131766 - Katsuoka, Seiji ;   et al. | 2004-07-08 |
Substrate processing apparatus and substrate processing method App 20040040131 - Miyazaki, Mitsuru ;   et al. | 2004-03-04 |
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