Motoda; Kimio
Patent Applications and Registrations
Patent applications and USPTO patent grants for Motoda; Kimio.The latest application filed is for "substrate processing apparatus and substrate processing method".
- Motoda; Kimio - Kumamoto JP
- Motoda; Kimio - Koshi-shi Kumamoto
- Motoda; Kimio - Koshi JP
- Motoda; Kimio - Kumamoto-Ken JP
- MOTODA, KIMIO - KUMAMOTO-SHI JP
| Patent | Date |
|---|---|
| Bonding apparatus and bonding method Grant 10,964,563 - Wada , et al. March 30, 2 | 2021-03-30 |
| Substrate Processing Apparatus And Substrate Processing Method App 20210035827 - Motoda; Kimio ; et al. | 2021-02-04 |
| Bonding Apparatus And Bonding Method App 20180323089 - Wada; Norio ; et al. | 2018-11-08 |
| Coating apparatus and method for filling coating liquid Grant 9,238,245 - Ishii , et al. January 19, 2 | 2016-01-19 |
| Coating Apparatus And Method For Filling Coating Liquid App 20140000518 - Ishii; Takayuki ; et al. | 2014-01-02 |
| Floating-type substrate conveying and processing apparatus Grant 7,905,195 - Yamasaki , et al. March 15, 2 | 2011-03-15 |
| Floating-type substrate conveying and processing apparatus App 20070017442 - Yamasaki; Tsuyoshi ; et al. | 2007-01-25 |
| Coating method and apparatus for semiconductor process Grant 6,749,688 - Tateyama , et al. June 15, 2 | 2004-06-15 |
| Coating apparatus Grant 6,514,343 - Motoda February 4, 2 | 2003-02-04 |
| Coating Method And Apparatus For Semiconductor Process App 20020110640 - TATEYAMA, KIYOHISA ; et al. | 2002-08-15 |
| Substrate processing apparatus Grant 6,168,665 - Sakai , et al. January 2, 2 | 2001-01-02 |
| Method and apparatus for cleaning treatment Grant 6,159,288 - Satou , et al. December 12, 2 | 2000-12-12 |
| Scrubbing apparatus and scrubbing method Grant 6,058,544 - Motoda , et al. May 9, 2 | 2000-05-09 |
| Apparatus for forming coating film for semiconductor processing Grant 6,010,570 - Motoda , et al. January 4, 2 | 2000-01-04 |
| Coating method and apparatus for semiconductor process Grant 5,919,520 - Tateyama , et al. July 6, 1 | 1999-07-06 |
| Apparatus for treating a substrate with resist and resist-treating method Grant 5,906,860 - Motoda , et al. May 25, 1 | 1999-05-25 |
| Method and apparatus for processing substrates Grant 5,853,812 - Kawasaki , et al. December 29, 1 | 1998-12-29 |
| Coating apparatus therefor Grant 5,762,708 - Motoda , et al. June 9, 1 | 1998-06-09 |
| Resist processing apparatus for a rectangular substrate Grant 5,718,763 - Tateyama , et al. February 17, 1 | 1998-02-17 |
| Method of forming a coating film Grant 5,695,817 - Tateyama , et al. December 9, 1 | 1997-12-09 |
| Apparatus for coating resist on substrate Grant 5,688,322 - Motoda , et al. November 18, 1 | 1997-11-18 |
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