| Patent | Date |
|---|
Multi-modal Maximum Power Point Tracking Optimization Solar Photovoltaic System
App 20220302709 - Moslehi; Mehrdad M. ; et al. | 2022-09-22 |
Multi-modal maximum power point tracking optimization solar photovoltaic system
Grant 11,190,021 - Moslehi , et al. November 30, 2 | 2021-11-30 |
Rapidly Deployable And Transportable High-power-density Smart Power Generators
App 20210288607 - Moslehi; Mehrdad M. | 2021-09-16 |
Solar Photovoltaic Blinds And Curtains For Residential And Commercial Buildings
App 20210215396 - Moslehi; Mehrdad M. ; et al. | 2021-07-15 |
Distributed Multi-modal Power Maximizing Integrated Circuit For Solar Photovoltaic Modules
App 20210126580 - Moslehi; Mehrdad M. | 2021-04-29 |
Solar Photovoltaic Module Remote Access Module Switch And Real-time Temperature Monitoring
App 20210058028 - Moslehi; Mehrdad M. | 2021-02-25 |
Apparatus and methods for uniformly forming porous semiconductor on a substrate
Grant 10,829,864 - Kramer , et al. November 10, 2 | 2020-11-10 |
Multi-modal Maximum Power Point Tracking Optimization Solar Photovoltaic System
App 20200303924 - MOSLEHI; Mehrdad M. ; et al. | 2020-09-24 |
Solar photovoltaic module remote access module switch and real-time temperature monitoring
Grant 10,784,815 - Moslehi Sept | 2020-09-22 |
Phtovoltaic Module Mounting And Installation System
App 20190137142 - Mascolo; Gianluigi ; et al. | 2019-05-09 |
Smart photovoltaic cells and modules
Grant 10,181,541 - Moslehi Ja | 2019-01-15 |
Backplane reinforcement and interconnects for solar cells
Grant 10,181,535 - Moslehi , et al. Ja | 2019-01-15 |
Apparatus And Methods For Uniformly Forming Porous Semiconductor On A Substrate
App 20180347063 - Kramer; Karl-Josef ; et al. | 2018-12-06 |
High-throughput batch porous silicon manufacturing equipment design and processing methods
Grant 10,138,565 - Yonehara , et al. Nov | 2018-11-27 |
High-throughput Batch Porous Silicon Manufacturing Equipment Design And Processing Methods
App 20180323087 - Yonehara; Takao ; et al. | 2018-11-08 |
Photovoltaic module mounting and installation system
Grant 10,036,577 - Mascolo , et al. July 31, 2 | 2018-07-31 |
Bipolar mobile electrostatic carriers for wafer processing
Grant 9,997,389 - Moslehi , et al. June 12, 2 | 2018-06-12 |
Trench isolation for monolithically isled solar photovoltaic cells and modules
Grant 9,929,288 - Moslehi , et al. March 27, 2 | 2018-03-27 |
Systems and methods for laser splitting and device layer transfer
Grant 9,929,054 - Yonehara , et al. March 27, 2 | 2018-03-27 |
Solar cell metallization
Grant 9,911,875 - Kommera , et al. March 6, 2 | 2018-03-06 |
Apparatus and methods for uniformly forming porous semiconductor on a substrate
Grant 9,890,465 - Kramer , et al. February 13, 2 | 2018-02-13 |
High-productivity porous semiconductor manufacturing equipment
Grant 9,869,031 - Kamian , et al. January 16, 2 | 2018-01-16 |
High productivity deposition reactor comprising a gas flow chamber having a tapered gas flow space
Grant 9,870,937 - Moslehi , et al. January 16, 2 | 2018-01-16 |
Shade Management Of Solar Cells And Solar Cell Regions
App 20180013023 - MOSLEHI; MEHRDAD M. | 2018-01-11 |
Trench Formation Method For Releasing A Substrate From A Semiconductor Template
App 20170372887 - Wang; David Xuan-Qi ; et al. | 2017-12-28 |
High-efficiency solar photovoltaic cells and modules using thin crystalline semiconductor absorbers
Grant 9,842,949 - Moslehi , et al. December 12, 2 | 2017-12-12 |
Three-dimensional Thin Film Semiconductor Substrate With Through-holes And Methods Of Manufacturing
App 20170345957 - Moslehi; Mehrdad M. ; et al. | 2017-11-30 |
Temporary Field Assisted Passivation For Testing Of Partially Processed Photovoltaic Solar Cells
App 20170331427 - MOSLEHI; Mehrdad M. | 2017-11-16 |
Solar Module Structures And Assembly Methods For Three-dimensional Thin-film Solar Cells
App 20170323989 - Moslehi; Mehrdad M. | 2017-11-09 |
Metal foil metallization for backplane-attached solar cells and modules
Grant 9,806,220 - Moslehi , et al. October 31, 2 | 2017-10-31 |
Aluminum oxide passivation and damage removal for solar cells
Grant 9,799,522 - Kapur , et al. October 24, 2 | 2017-10-24 |
Aluminum Oxide Passivation For Solar Cells
App 20170287715 - Deshazer; Heather ; et al. | 2017-10-05 |
Multi-level Solar Cell Metallization
App 20170278991 - Moslehi; Mehrdad M. ; et al. | 2017-09-28 |
High-throughput batch porous silicon manufacturing equipment design and processing methods
Grant 9,771,662 - Yonehara , et al. September 26, 2 | 2017-09-26 |
Damage free laser patterning of transparent layers for forming doped regions on a solar cell substrate
Grant 9,768,343 - Rana , et al. September 19, 2 | 2017-09-19 |
High-throughput Batch Porous Silicon Manufacturing Equipment Design And Processing Methods
App 20170243767 - Yonehara; Takao ; et al. | 2017-08-24 |
Electrical Parametric Testing For Back Contact Semiconductor Solar Cells
App 20170244360 - Kommera; Swaroop ; et al. | 2017-08-24 |
Solar Photovoltaic Module Remote Access Module Switch And Real-time Temperature Monitoring
App 20170244358 - Moslehi; Mehrdad M. | 2017-08-24 |
High Efficiency Solar Cell Structures And Manufacturing Methods
App 20170236954 - Kramer; Karl-Josef ; et al. | 2017-08-17 |
Flat Top Laser Beam Processing For Making A Solar Cell Substrate
App 20170236961 - Rana; Virendra V. ; et al. | 2017-08-17 |
Laser Irradiation Aluminum Doping For Monocrystalline Silicon Substrates
App 20170236969 - Moslehi; Mehrdad M. ; et al. | 2017-08-17 |
Systems And Methods For Monolithically Isled Solar Photovoltaic Cells And Modules
App 20170229591 - Moslehi; Mehrdad M. | 2017-08-10 |
Laser Processing For Solar Cell Base And Emitter Regions
App 20170222086 - Deshazer; Heather ; et al. | 2017-08-03 |
Surface Passivation Of High-efficiency Crystalline Silicon Solar Cells
App 20170222067 - Seutter; Sean M. ; et al. | 2017-08-03 |
Passivated Contacts For Back Contact Back Junction Solar Cells
App 20170194521 - Kapur; Pawan ; et al. | 2017-07-06 |
Self Aligned Contacts For Solar Cells
App 20170194520 - Deshpande; Anand ; et al. | 2017-07-06 |
Three-dimensional thin-film semiconductor substrate with through-holes and methods of manufacturing
Grant 9,680,041 - Moslehi , et al. June 13, 2 | 2017-06-13 |
Electroluminescence Testable Photovoltaic Modules Having Shade Management Solutions
App 20170133983 - Moslehi; Mehrdad M. ; et al. | 2017-05-11 |
Laser Processing For Back Contact Crystalline Silicon Solar Cell Fabrication
App 20170133546 - Rana; Virendra V. ; et al. | 2017-05-11 |
Photovoltaic Module Mounting And Installation System
App 20170133973 - Mascolo; Gianluigi ; et al. | 2017-05-11 |
Ion Implantation And Annealing For Thin-film Crystalline Solar Cells
App 20170104122 - Moslehi; Mehrdad M. ; et al. | 2017-04-13 |
Structures and methods for high-efficiency pyramidal three-dimensional solar cells
Grant 9,595,622 - Kapur , et al. March 14, 2 | 2017-03-14 |
Three-dimensional semiconductor template for making high efficiency solar cells
Grant 9,590,035 - Wang , et al. March 7, 2 | 2017-03-07 |
Systems and methods for enhanced light trapping in solar cells
Grant 9,583,651 - Moslehi , et al. February 28, 2 | 2017-02-28 |
Patterning Of Silicon Oxide Layers Using Pulsed Laser Ablation
App 20170005206 - Moslehi; Mehrdad M. ; et al. | 2017-01-05 |
Systems And Methods For Monolithically Integrated Bypass Switches And Photovoltaic Solar Cells
App 20160365467 - Moslehi; Mehrdad M. | 2016-12-15 |
Bipolar Mobile Electrostatic Carriers For Wafer Processing
App 20160358802 - Moslehi; Mehrdad M. ; et al. | 2016-12-08 |
Monolithically isled back contact back junction solar cells
Grant 9,515,217 - Moslehi , et al. December 6, 2 | 2016-12-06 |
Method for making a crystalline silicon solar cell substrate utilizing flat top laser beam
Grant 9,508,886 - Rana , et al. November 29, 2 | 2016-11-29 |
High-efficiency Photovoltaic Back-contact Solar Cell Structures And Manufacturing Methods
App 20160336465 - Moslehi; Mehrdad M. ; et al. | 2016-11-17 |
Annealing For Damage Free Laser Processing For High Efficiency Solar Cells
App 20160336473 - Rana; Virendra V. ; et al. | 2016-11-17 |
Systems And Methods For Laser Splitting And Device Layer Transfer
App 20160336233 - Yonehara; Takao ; et al. | 2016-11-17 |
Electrical parametric testing for back contact semiconductor solar cells
Grant 9,461,582 - Kommera , et al. October 4, 2 | 2016-10-04 |
Laser irradiation aluminum doping for monocrystalline silicon substrates
Grant 9,455,362 - Moslehi , et al. September 27, 2 | 2016-09-27 |
Laser processing for high-efficiency thin crystalline silicon solar cell fabrication
Grant 9,419,165 - Rana , et al. August 16, 2 | 2016-08-16 |
Apparatus for forming porous silicon layers on at least two surfaces of a plurality of silicon templates
Grant 9,401,276 - Moslehi , et al. July 26, 2 | 2016-07-26 |
Releasing apparatus for separating a semiconductor substrate from a semiconductor template
Grant 9,397,250 - Moslehi , et al. July 19, 2 | 2016-07-19 |
High-throughput Batch Porous Silicon Manufacturing Equipment Design And Processing Methods
App 20160186358 - Yonehara; Takao ; et al. | 2016-06-30 |
Trench Isolation For Monolithically Isled Solar Photovoltaic Cells And Modules
App 20160190366 - Moslehi; Mehrdad M. ; et al. | 2016-06-30 |
Photovoltaic Solar Module Metallization And Shade Management Connection And Fabrication Methods
App 20160190365 - Moslehi; Mehrdad M. | 2016-06-30 |
Fabrication methods for monolithically isled back contact back junction solar cells
Grant 9,379,258 - Kapur , et al. June 28, 2 | 2016-06-28 |
Laminated Backplane For Solar Cells
App 20160172512 - Stalcup; Thom ; et al. | 2016-06-16 |
Three-dimensional thin-film solar cells
Grant 9,349,887 - Moslehi May 24, 2 | 2016-05-24 |
Trench formation method for releasing a substrate from a semiconductor template
Grant 9,343,299 - Wang , et al. May 17, 2 | 2016-05-17 |
High productivity spray processing for the metallization of semiconductor workpieces
Grant 9,337,374 - Kramer , et al. May 10, 2 | 2016-05-10 |
Bipolar mobile electrostatic carriers for wafer processing
Grant 9,330,952 - Moslehi , et al. May 3, 2 | 2016-05-03 |
Ion implantation and annealing for thin film crystalline solar cells
Grant 9,318,644 - Moslehi , et al. April 19, 2 | 2016-04-19 |
Damage Free Laser Patterning Of Transparent Layers For Forming Doped Regions On A Solar Cell Substrate
App 20160093763 - Rana; Virendra V. ; et al. | 2016-03-31 |
Smart Photovoltaic Cells And Modules
App 20160087579 - Moslehi; Mehrdad M. | 2016-03-24 |
Smart photovoltaic cells and modules
Grant 9,293,619 - Moslehi , et al. March 22, 2 | 2016-03-22 |
Three-dimensional Thin-film Solar Cells
App 20160035918 - Moslehi; Mehrdad M. | 2016-02-04 |
Active Backplane For Thin Silicon Solar Cells
App 20160013335 - Moslehi; Mehrdad M. ; et al. | 2016-01-14 |
Patterning of silicon oxide layers using pulsed laser ablation
Grant 9,236,510 - Moslehi , et al. January 12, 2 | 2016-01-12 |
Systems and methods for monolithically integrated bypass switches in photovoltaic solar cells and modules
Grant 9,219,171 - Moslehi December 22, 2 | 2015-12-22 |
Systems and methods for laser splitting and device layer transfer
Grant 9,214,353 - Yonehara , et al. December 15, 2 | 2015-12-15 |
Annealing for damage free laser processing for high efficiency solar cells
Grant 9,214,585 - Rana , et al. December 15, 2 | 2015-12-15 |
Solar Photovoltaic Module Power Control And Status Monitoring System Utilizing Laminate-embedded Remote Access Module Switch
App 20150349708 - Moslehi; Mehrdad M. | 2015-12-03 |
High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods
Grant 9,196,759 - Moslehi , et al. November 24, 2 | 2015-11-24 |
Structures And Methods For High-efficiency Pyramidal Three-dimensional Solar Cells
App 20150325714 - Kapur; Pawan ; et al. | 2015-11-12 |
High-productivity Porous Semiconductor Manufacturing Equipment
App 20150315719 - Kamian; George D. ; et al. | 2015-11-05 |
Aluminum Oxide Passivation And Damage Removal For Solar Cells
App 20150311378 - Kapur; Pawan ; et al. | 2015-10-29 |
Three-dimensional Thin-film Semiconductor Substrate With Through-holes And Methods Of Manufacturing
App 20150303331 - Moslehi; Mehrdad M. ; et al. | 2015-10-22 |
Porous Silicon Electro-etching System And Method
App 20150299892 - Moslehi; Mehrdad M. ; et al. | 2015-10-22 |
Trench isolation for monolithically isled solar photovoltaic cells and modules
Grant 9,130,076 - Moslehi , et al. September 8, 2 | 2015-09-08 |
High-efficiency Photovoltaic Back-contact Solar Cell Structures And Manufacturing Methods
App 20150243814 - Moslehi; Mehrdad M. ; et al. | 2015-08-27 |
Single Passivated Contacts For Back Contact Back Junction Solar Cells
App 20150236174 - Kapur; Pawan ; et al. | 2015-08-20 |
Solar Photovoltaic Module Power Control And Status Monitoring System Utilizing Laminateembedded Remote Access Module Switch
App 20150236638 - Moslehi; Mehrdad M. | 2015-08-20 |
Amorphous Silicon Passivated Contacts For Back Contact Back Junction Solar Cells
App 20150236175 - Kapur; Pawan ; et al. | 2015-08-20 |
Smart Photovoltaic Cells And Modules
App 20150236182 - Moslehi; Mehrdad M. | 2015-08-20 |
Self Aligned Contacts for Solar Cells
App 20150221792 - Deshpande; Anand ; et al. | 2015-08-06 |
Integrated three-dimensional and planar metallization structure for thin film solar cells
Grant 9,099,584 - Parikh , et al. August 4, 2 | 2015-08-04 |
Methods for selectively coating three-dimensional features on a substrate
Grant 9,093,323 - Wang , et al. July 28, 2 | 2015-07-28 |
Monolithic Solar Cell Arrays And Fabrication Methods
App 20150207002 - Moslehi; Mehrdad M. ; et al. | 2015-07-23 |
Passivated Contacts For Back Contact Back Junction Solar Cells
App 20150206998 - Kapur; Pawan ; et al. | 2015-07-23 |
Discontinuous Emitter And Base Islands For Back Contact Solar Cells
App 20150200313 - Moslehi; Mehrdad M. ; et al. | 2015-07-16 |
Systems And Methods For Monolithically Isled Solar Photovoltaic Cells
App 20150194547 - Moslehi; Mehrdad M. | 2015-07-09 |
High-Throughput batch porous silicon manufacturing equipment design and processing methods
Grant 9,076,642 - Yonehara , et al. July 7, 2 | 2015-07-07 |
Systems And Methods For Monolithically Isled Solar Photovoltaic Cells
App 20150187969 - Moslehi; Mehrdad M. | 2015-07-02 |
Structures And Fabrication Methods For Solar Cells And Modules
App 20150179846 - Moslehi; Mehrdad M. | 2015-06-25 |
Fabrication Methods For Monolithically Isled Back Contact Back Junction Solar Cells
App 20150171240 - Kapur; Pawan ; et al. | 2015-06-18 |
Fabrication Methods For Back Contact Solar Cells
App 20150171230 - Kapur; Pawan ; et al. | 2015-06-18 |
Laser Processing For Solar Cell Base And Emitter Regions
App 20150162486 - Deshazer; Heather ; et al. | 2015-06-11 |
Structures And Methods For Improving Solar Cell Efficiency And Mechanical Strength
App 20150162465 - Kapur; Pawan ; et al. | 2015-06-11 |
Aluminum Oxide Passivation For Solar Cells
App 20150162487 - Deshazer; Heather ; et al. | 2015-06-11 |
Apparatus And Methods For Uniformly Forming Porous Semiconductor On A Substrate
App 20150159292 - Kramer; Karl-Josef ; et al. | 2015-06-11 |
Structure and method for creating a reusable template for detachable thin film substrates
Grant 9,053,957 - Parikh , et al. June 9, 2 | 2015-06-09 |
Photovoltaic Monolithic Solar Module Connection And Fabrication Methods
App 20150155398 - Moslehi; Mehrdad M. ; et al. | 2015-06-04 |
Backplane Reinforcement And Interconnects For Solar Cells
App 20150144190 - Moslehi; Mehrdad M. ; et al. | 2015-05-28 |
Patterning Of Silicon Oxide Layers Using Pulsed Laser Ablation
App 20150140721 - Moslehi; Mehrdad M. ; et al. | 2015-05-21 |
Trench Isolation For Monolithically Isled Solar Photovoltaic Cells And Modules
App 20150136227 - Moslehi; Mehrdad M. ; et al. | 2015-05-21 |
High-throughput Thermal Processing Methods For Producing High-efficiency Crystalline Silicon Solar Cells
App 20150132931 - Kapur; Pawan ; et al. | 2015-05-14 |
Metal Foil Metallization For Backplane-attached Solar Cells And Modules
App 20150129031 - Moslehi; Mehrdad M. ; et al. | 2015-05-14 |
Thin Film Solar Cell Lamination Stack For High Volume Manufacturing
App 20150129017 - Dutton; David ; et al. | 2015-05-14 |
Dielectric-passivated Metal Insulator Photovoltaic Solar Cells
App 20150129030 - Kapur; Pawan ; et al. | 2015-05-14 |
Resistance Component Extraction For Back Contact Back Junction Solar Cells
App 20150130499 - Kommera; Swaroop ; et al. | 2015-05-14 |
Truncated Pyramid Structures For See-through Solar Cells
App 20150125990 - Moslehi; Mehrdad M. ; et al. | 2015-05-07 |
Surface Passivation Of High-efficiency Crystalline Silicon Solar Cells
App 20150101662 - Seutter; Sean M. ; et al. | 2015-04-16 |
Solar Photovoltaic Blinds And Curtains For Residential And Commercial Buildings
App 20150101761 - Moslehi; Mehrdad M. ; et al. | 2015-04-16 |
High-productivity porous semiconductor manufacturing equipment
Grant 8,999,058 - Kamian , et al. April 7, 2 | 2015-04-07 |
Solar Module Structures And Assembly Methods For Three-dimensional Thin-film Solar Cells
App 20150068583 - Moslehi; Mehrdad M. | 2015-03-12 |
Solar Cell Metallization
App 20150068592 - Kommera; Swaroop ; et al. | 2015-03-12 |
Three-dimensional Semiconductor Template For Making High Efficiency Thin-film Solar Cells
App 20150061086 - Wang; David Xuan-Qi ; et al. | 2015-03-05 |
Annealing For Damage Free Laser Processing For High Efficiency Solar Cells
App 20150056742 - Rana; Virendra V. ; et al. | 2015-02-26 |
High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods using thin planar semiconductor absorbers
Grant 8,962,380 - Moslehi , et al. February 24, 2 | 2015-02-24 |
Backplane reinforcement and interconnects for solar cells
Grant 8,946,547 - Moslehi , et al. February 3, 2 | 2015-02-03 |
High-efficiency Solar Photovoltaic Cells And Modules Using Thin Crystalline Semiconductor Absorbers
App 20150020877 - Moslehi; Mehrdad M. ; et al. | 2015-01-22 |
Structures and methods for high-efficiency pyramidal three-dimensional solar cells
Grant 8,937,243 - Kapur , et al. January 20, 2 | 2015-01-20 |
Three-dimensional thin-film semiconductor substrate with through-holes and methods of manufacturing
Grant 8,916,772 - Moslehi , et al. December 23, 2 | 2014-12-23 |
Monolithically Isled Back Contact Back Junction Solar Cells Using Bulk Wafers
App 20140370650 - Moslehi; Mehrdad M. ; et al. | 2014-12-18 |
Back Contact Solar Cells Using Aluminum-based Alloy Metallization
App 20140360567 - Seutter; Sean M. ; et al. | 2014-12-11 |
Apparatus and methods for uniformly forming porous semiconductor on a substrate
Grant 8,906,218 - Kramer , et al. December 9, 2 | 2014-12-09 |
Systems And Methods For Monolithically Isled Solar Photovoltaic Cells And Modules
App 20140326295 - Moslehi; Mehrdad M. | 2014-11-06 |
Multi-level Solar Cell Metallization
App 20140318611 - Moslehi; Mehrdad M. ; et al. | 2014-10-30 |
Solar module structures and assembly methods for pyramidal three-dimensional thin-film solar cells
Grant 8,847,060 - Moslehi September 30, 2 | 2014-09-30 |
Structure and method for improving solar cell efficiency and mechanical strength
Grant 8,828,517 - Wang , et al. September 9, 2 | 2014-09-09 |
Resistance component extraction for back contact back junction solar cells
Grant 8,828,784 - Kommera , et al. September 9, 2 | 2014-09-09 |
Structures And Methods Of Formation Of Contiguous And Non-contiguous Base Regions For High Efficiency Back-contact Solar Cells
App 20140158193 - Desphande; Anande ; et al. | 2014-06-12 |
Solar module structures and assembly methods for three-dimensional thin-film solar cells
Grant 8,742,249 - Moslehi June 3, 2 | 2014-06-03 |
Temperature Calibration And Control For Semiconductor Reactors
App 20140146854 - Ashjaee; Jay ; et al. | 2014-05-29 |
Resistance Component Extraction For Back Contact Back Junction Solar Cells
App 20140147944 - Kommera; Swaroop ; et al. | 2014-05-29 |
Methods For Liquid Transer Coating Of Three-dimensional Substrates
App 20140127834 - Wang; David Xuan-Qi ; et al. | 2014-05-08 |
Systems And Methods For Monolithically Integrated Bypass Switches In Photovoltaic Solar Cells And Modules
App 20140102531 - Moslehi; Mehrdad M. | 2014-04-17 |
Smart Photovoltaic Cells And Modules
App 20140060610 - Moslehi; Mehrdad M. ; et al. | 2014-03-06 |
Three-dimensional semiconductor template for making high efficiency thin-film solar cells
Grant 8,664,737 - Wang , et al. March 4, 2 | 2014-03-04 |
High efficiency epitaxial chemical vapor deposition (CVD) reactor
Grant 8,656,860 - Kamian , et al. February 25, 2 | 2014-02-25 |
Systems And Methods For Laser Splitting And Device Layer Transfer
App 20140038392 - Yonehara; Takao ; et al. | 2014-02-06 |
High Productivity Spray Processing For Semiconductor Metallization And Interconnects
App 20140033971 - Kramer; Karl-Josef ; et al. | 2014-02-06 |
Patterning of silicon oxide layers using pulsed laser ablation
Grant 8,637,340 - Moslehi , et al. January 28, 2 | 2014-01-28 |
Systems And Methods For Enhanced Light Trapping In Solar Cells
App 20140017846 - Moslehi; Mehrdad M. ; et al. | 2014-01-16 |
Structures And Methods For High Efficiency Compound Semiconductor Solar Cells
App 20130337601 - Kapur; Pawan ; et al. | 2013-12-19 |
Ion Implantation Fabrication Process For Thin-film Crystalline Silicon Solar Cells
App 20130330872 - Rana; Virendra V. ; et al. | 2013-12-12 |
Three-dimensional Thin-film Semiconductor Substrate With Through-holes And Methods Of Manufacturing
App 20130319520 - Moslehi; Mehrdad M. ; et al. | 2013-12-05 |
High-Efficiency Thin-Film Solar Cells
App 20130284255 - Wang; David Xuan-Qi ; et al. | 2013-10-31 |
End Point Detection For Back Contact Solar Cell Laser Via Drilling
App 20130288425 - Rana; Virendra V. ; et al. | 2013-10-31 |
Method For Fabricating A Three-dimensional Thin-film Semiconductor Substrate From A Template
App 20130288418 - Wang; David Xuan-Qi ; et al. | 2013-10-31 |
Method For Releasing a Thin-Film Substrate
App 20130280887 - Ricolcol; Rafael ; et al. | 2013-10-24 |
Three-dimensional thin-film semiconductor substrate with through-holes and methods of manufacturing
Grant 8,551,866 - Moslehi , et al. October 8, 2 | 2013-10-08 |
Structure And Method For Creating A Reusable Template For Detachable Thin Film Substrates
App 20130241038 - Parikh; Suketu ; et al. | 2013-09-19 |
High-efficiency Photovoltaic Back-contact Solar Cell Structures And Manufacturing Methods Using Semiconductor Wafers
App 20130233378 - Moslehi; Mehrdad M ; et al. | 2013-09-12 |
Manufacturing Methods And Structures For Large-area Thin-film Solar Cells And Other Semiconductor Devices
App 20130228221 - Moslehi; Mehrdad M. ; et al. | 2013-09-05 |
High Efficiency Solar Cell Structures And Manufacturing Methods
App 20130213469 - Kramer; Karl-Josef ; et al. | 2013-08-22 |
Laser Processing For High-efficiency Thin Crystalline Silicon Solar Cell Fabrication
App 20130217172 - Rana; Virendra V. ; et al. | 2013-08-22 |
Methods for liquid transfer coating of three-dimensional substrates
Grant 8,512,581 - Wang , et al. August 20, 2 | 2013-08-20 |
High-throughput Batch Porous Silicon Manufacturing Equipment Design And Processing Methods
App 20130180847 - Yonehara; Takao ; et al. | 2013-07-18 |
Three-dimensional Thin-film Solar Cells
App 20130167904 - Moslehi; Mehrdad M. | 2013-07-04 |
High-efficiency Photovoltaic Back-contact Solar Cell Structures And Manufacturing Methods Using Three-dimensional Semiconductor Absorbers
App 20130167915 - Moslehi; Mehrdad M. ; et al. | 2013-07-04 |
Double-sided Reusable Template For Fabrication Of Semiconductor Substrates For Photovoltaic Cell And Microelectronics Device Manufacturing
App 20130171808 - Moslehi; Mehrdad M. ; et al. | 2013-07-04 |
Ion Implantation And Annealing For High Efficiency Back-contact Back-junction Solar Cells
App 20130171767 - Moslehi; Mehrdad M. ; et al. | 2013-07-04 |
Laser Annealing Applications In High-efficiency Solar Cells
App 20130164883 - Moslehi; Mehrdad M. ; et al. | 2013-06-27 |
Mobile Electrostatic Carriers For Thin Wafer Processing
App 20130141833 - Moslehi; Mehrdad M. ; et al. | 2013-06-06 |
Method And Apparatus For Reconditioning A Carrier Wafer For Reuse
App 20130137244 - Kramer; Karl-Josef ; et al. | 2013-05-30 |
Spatially Selective Laser Annealing Applications In High-efficiency Solar Cells
App 20130130430 - Moslehi; Mehrdad M. ; et al. | 2013-05-23 |
Ion implantation fabrication process for thin-film crystalline silicon solar cells
Grant 8,420,435 - Rana , et al. April 16, 2 | 2013-04-16 |
Laser processing for high-efficiency thin crystalline silicon solar cell fabrication
Grant 8,399,331 - Moslehi , et al. March 19, 2 | 2013-03-19 |
Active Backplane For Thin Silicon Solar Cells
App 20130000715 - Moslehi; Mehrdad M. ; et al. | 2013-01-03 |
High-efficiency Photovoltaic Back-contact Solar Cell Structures And Manufacturing Methods Using Thin Planar Semiconductor Absorbers
App 20120305063 - Moslehi; Mehrdad M. ; et al. | 2012-12-06 |
Three-dimensional thin-film solar cells
Grant 8,324,499 - Moslehi December 4, 2 | 2012-12-04 |
Method For Releasing A Thin Semiconductor Substrate From A Reusable Template
App 20120272490 - Moslehi; Mehrdad M. ; et al. | 2012-11-01 |
Method for releasing a thin-film substrate
Grant 8,293,558 - Wang , et al. October 23, 2 | 2012-10-23 |
High-efficiency thin-film solar cells
Grant 8,294,026 - Wang , et al. October 23, 2 | 2012-10-23 |
Method for fabricating a three-dimensional thin-film semiconductor substrate from a template
Grant 8,288,195 - Wang , et al. October 16, 2 | 2012-10-16 |
Laser Doping Techniques For High-efficiency Crystalline Semiconductor Solar Cells
App 20120225515 - Moslehi; Mehrdad M. ; et al. | 2012-09-06 |
Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing
Grant 8,241,940 - Moslehi , et al. August 14, 2 | 2012-08-14 |
Deposition Systems And Processes
App 20120192789 - Kramer; Karl-Josef ; et al. | 2012-08-02 |
Three-dimensional Thin-film Solar Cells
App 20120180867 - Moslehi; Mehrdad M. | 2012-07-19 |
Laser Annealing For Aluminum Doping And Formation Of Back-surface Field In Solar Cell Contacts
App 20120178203 - Moslehi; Mehrdad M. ; et al. | 2012-07-12 |
Three-dimensional Semiconductor Template For Making High Efficiency Thin-film Solar Cells
App 20120174861 - Wang; David Xuan-Qi ; et al. | 2012-07-12 |
Patterning Of Silicon Oxide Layers Using Pulsed Laser Ablation
App 20120171804 - Moslehi; Mehrdad M. ; et al. | 2012-07-05 |
Method For Reconstructing A Semiconductor Template
App 20120167819 - Kramer; Karl-Josef ; et al. | 2012-07-05 |
Apparatus And Methods For Uniformly Forming Porous Semiconductor On A Substrate
App 20120145553 - Kramer; Karl-Josef ; et al. | 2012-06-14 |
Method for releasing a thin semiconductor substrate from a reusable template
Grant 8,193,076 - Moslehi , et al. June 5, 2 | 2012-06-05 |
Apparatus And Method For Repeatedly Fabricating Thin Film Semiconductor Substrates Using A Template
App 20120125256 - Kramer; Karl-Josef ; et al. | 2012-05-24 |
High-throughput Flat Top Laser Beam Processing For Back Contact Solar Cells
App 20120122272 - Rana; Virendra V. ; et al. | 2012-05-17 |
Backplane Reinforcement And Interconnects For Solar Cells
App 20120103408 - Moslehi; Mehrdad M. ; et al. | 2012-05-03 |
Three-dimensional semiconductor template for making high efficiency thin-film solar cells
Grant 8,168,465 - Wang , et al. May 1, 2 | 2012-05-01 |
High Productivity Thin Film Deposition Method And System
App 20120085278 - Moslehi; Mehrdad M. ; et al. | 2012-04-12 |
Laser Processing For High-efficiency Thin Crystalline Silicon Solar Cell Fabrication
App 20120028399 - Moslehi; Mehrdad M. ; et al. | 2012-02-02 |
Solar Module Structures And Assembly Methods For Three-dimensional Thin-film Solar Cells
App 20120017971 - Moslehi; Mehrdad M. | 2012-01-26 |
Pyramidal Three-dimensional Thin-film Solar Cells
App 20120017988 - Moslehi; Mehrdad M. | 2012-01-26 |
Truncated Pyramid Structures For See-through Solar Cells
App 20120021560 - Moslehi; Mehrdad M. ; et al. | 2012-01-26 |
Solar Module Structures And Assembly Methods For Pyramidal Three-dimensional Thin-film Solar Cells
App 20120012160 - Moslehi; Mehrdad M. | 2012-01-19 |
Passivation Methods And Apparatus For Achieving Ultra-low Surface Recombination Velocities For High-efficiency Solar Cells
App 20110284068 - Moslehi; Mehrdad M. ; et al. | 2011-11-24 |
Template For Three-dimensional Thin-film Solar Cell Manufacturing And Methods Of Use
App 20110272013 - Moslehi; Mehrdad M. | 2011-11-10 |
Truncated pyramid structures for see-through solar cells
Grant 8,053,665 - Moslehi , et al. November 8, 2 | 2011-11-08 |
Double-sided Reusable Template For Fabrication Of Semiconductor Substrates For Photovoltaic Cell And Microelectronics Device Manufacturing
App 20110256654 - Moslehi; Mehrdad M. ; et al. | 2011-10-20 |
High-productivity Porous Semiconductor Manufacturing Equipment
App 20110030610 - Kamian; George D. ; et al. | 2011-02-10 |
Method For Releasing A Thin Semiconductor Substrate From A Reusable Template
App 20110021006 - Moslehi; Mehrdad M. ; et al. | 2011-01-27 |
Ion Implantation Fabrication Process For Thin-film Crystalline Silicon Solar Cells
App 20100304522 - Rana; Virendra V. ; et al. | 2010-12-02 |
Three-dimensional Thin-film Semiconductor Substrate With Through-holes And Methods Of Manufacturing
App 20100300518 - Moslehi; Mehrdad M. ; et al. | 2010-12-02 |
Shadow Mask Methods For Manufacturing Three-Dimensional Thin-Film Solar Cells
App 20100304521 - Seutter; Sean Michael ; et al. | 2010-12-02 |
Integrated 3-dimensional And Planar Metallization Structure For Thin Film Solar Cells
App 20100294356 - Parikh; Suketu ; et al. | 2010-11-25 |
Structure And Method For Improving Solar Cell Efficiency And Mechanical Strength
App 20100294333 - Wang; David Xuan-Qi ; et al. | 2010-11-25 |
Method For Releasing a Thin-Film Substrate
App 20100279494 - Wang; David Xuan-Qi ; et al. | 2010-11-04 |
Method For Fabricating A Three-dimensional Thin-film Semiconductor Substrate From A Template
App 20100267186 - Wang; David Xuan-Qi ; et al. | 2010-10-21 |
High Efficiency Epitaxial Chemical Vapor Deposition (cvd) Reactor
App 20100267245 - Kamian; George D. ; et al. | 2010-10-21 |
High-Efficiency Thin-Film Solar Cells
App 20100175752 - Wang; David Xuan-Qi ; et al. | 2010-07-15 |
Substrate release methods and apparatuses
Grant 7,745,313 - Wang , et al. June 29, 2 | 2010-06-29 |
Three-Dimensional Semiconductor Template for Making High Efficiency Thin-Film Solar Cells
App 20100148318 - Wang; David Xuan-Qi ; et al. | 2010-06-17 |
Substrates for High-Efficiency Thin-Film Solar Cells Based on Crystalline Templates
App 20100148319 - Wang; David Xuan-Qi ; et al. | 2010-06-17 |
Truncated Pyramid Structures For See-through Solar Cells
App 20100116316 - Moslehi; Mehrdad M. ; et al. | 2010-05-13 |
Substrate Release Methods And Apparatuses
App 20100022074 - Wang; David Xuan-Qi ; et al. | 2010-01-28 |
Methods For Liquid Transfer Coating Of Three-dimensional Substrates
App 20090042320 - Wang; David Xuan-Qi ; et al. | 2009-02-12 |
Thermally conductive chuck for vacuum processor
Grant 6,907,924 - Moslehi June 21, 2 | 2005-06-21 |
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure
Grant 6,905,578 - Moslehi , et al. June 14, 2 | 2005-06-14 |
Method for fabricating a semiconductor chip interconnect
Grant 6,812,126 - Paranjpe , et al. November 2, 2 | 2004-11-02 |
High-performance energy transfer method for thermal processing applications
Grant 6,753,272 - Lee , et al. June 22, 2 | 2004-06-22 |
Ultra high-speed chip semiconductor integrated circuit interconnect structure and fabrication method using free-space dielectrics
App 20040061229 - Moslehi, Mehrdad M. | 2004-04-01 |
Rapid cycle chuck for low-pressure processing
Grant 6,705,394 - Moslehi , et al. March 16, 2 | 2004-03-16 |
Apparatus for supporting a substrate in a reaction chamber
Grant 6,692,575 - Omstead , et al. February 17, 2 | 2004-02-17 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method
Grant 6,645,847 - Paranjpe , et al. November 11, 2 | 2003-11-11 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method
Grant 6,627,995 - Paranjpe , et al. September 30, 2 | 2003-09-30 |
Method and system for physically-assisted chemical-vapor deposition
Grant 6,596,133 - Moslehi , et al. July 22, 2 | 2003-07-22 |
System for fabricating a device on a substrate with a process gas
Grant 6,544,341 - Omstead , et al. April 8, 2 | 2003-04-08 |
Thermally conductive chuck for vacuum processor
App 20030029610 - Moslehi, Mehrdad M. | 2003-02-13 |
Apparatus for dispensing gas for fabricating substrates
Grant 6,508,197 - Omstead , et al. January 21, 2 | 2003-01-21 |
Edge sealing structure for substrate in low-pressure processing environment
Grant 6,508,885 - Moslehi , et al. January 21, 2 | 2003-01-21 |
Segmented-target ionized physical-vapor deposition apparatus and method of operation
Grant 6,488,822 - Moslehi December 3, 2 | 2002-12-03 |
Inductively-coupled-plasma ionized physical-vapor deposition apparatus, method and system
Grant 6,471,830 - Moslehi , et al. October 29, 2 | 2002-10-29 |
Method for forming a copper film on a substrate
Grant 6,461,675 - Paranjpe , et al. October 8, 2 | 2002-10-08 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method
App 20020137332 - Paranjpe, Ajit P. ; et al. | 2002-09-26 |
Method of chemical-vapor deposition of a material
Grant 6,444,263 - Paranjpe , et al. September 3, 2 | 2002-09-03 |
Method and apparatus for thin film deposition using an active shutter
Grant 6,444,103 - Moslehi , et al. September 3, 2 | 2002-09-03 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method
App 20020102838 - Paranjpe, Ajit P. ; et al. | 2002-08-01 |
Thermally conductive chuck with thermally separated sealing structures
Grant 6,378,600 - Moslehi April 30, 2 | 2002-04-30 |
Approaches for mitigating the narrow poly-line effect in silicide formation
Grant 6,376,372 - Paranjpe , et al. April 23, 2 | 2002-04-23 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method
Grant 6,365,502 - Paranjpe , et al. April 2, 2 | 2002-04-02 |
Method For Forming A Copper Film On A Substrate
App 20020006468 - PARANJPE, AJIT P. ; et al. | 2002-01-17 |
Apparatus and method for multi-zone high-density inductively-coupled plasma generation
App 20010047760 - Moslehi, Mehrdad M. | 2001-12-06 |
Semiconductor chip interconnect barrier material and fabrication method
Grant 6,294,836 - Paranjpe , et al. September 25, 2 | 2001-09-25 |
Method for fabricating a device on a substrate
Grant 6,274,495 - Omstead , et al. August 14, 2 | 2001-08-14 |
Method for planarized deposition of a material
Grant 6,245,655 - Moslehi June 12, 2 | 2001-06-12 |
Hermetically-sealed inductively-coupled plasma source structure and method of use
Grant 6,209,480 - Moslehi April 3, 2 | 2001-04-03 |
Hermetically-sealed inductively-coupled plasma source structure and method of use
Grant 6,203,620 - Moslehi March 20, 2 | 2001-03-20 |
Method for inductively-coupled-plasma-enhanced ionized physical-vapor deposition
Grant 6,197,166 - Moslehi March 6, 2 | 2001-03-06 |
Method and system for dispensing process gas for fabricating a device on a substrate
Grant 6,190,732 - Omstead , et al. February 20, 2 | 2001-02-20 |
High-performance energy transfer system and method for thermal processing applications
Grant 6,188,044 - Lee , et al. February 13, 2 | 2001-02-13 |
Multizone illuminator for rapid thermal processing with improved spatial resolution
Grant 6,167,195 - Moslehi , et al. December 26, 2 | 2000-12-26 |
Apparatus for inductively-coupled-plasma-enhanced ionized physical-vapor deposition
Grant 6,136,165 - Moslehi October 24, 2 | 2000-10-24 |
Shutter for thin-film processing equipment
Grant 6,132,805 - Moslehi October 17, 2 | 2000-10-17 |
Method of magnetically orienting thin magnetic films with a multiple-coil electromagnet
Grant 6,126,790 - Moslehi , et al. October 3, 2 | 2000-10-03 |
Thin-film processing electromagnet for low-skew magnetic orientation
Grant 6,106,682 - Moslehi , et al. August 22, 2 | 2000-08-22 |
Multizone illuminator for rapid thermal processing with improved spatial resolution
Grant 6,108,490 - Lee , et al. August 22, 2 | 2000-08-22 |
Apparatus including integral actuator with control for automated calibration of temperature sensors in rapid thermal processing equipment
Grant 6,106,148 - Moslehi , et al. August 22, 2 | 2000-08-22 |
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure using target indexing
Grant 6,051,113 - Moslehi April 18, 2 | 2000-04-18 |
Wafer handler for multi-station tool
Grant 6,048,162 - Moslehi April 11, 2 | 2000-04-11 |
Method for doped shallow junction formation using direct gas-phase doping
Grant 6,048,782 - Moslehi April 11, 2 | 2000-04-11 |
Multiple-coil electromagnet for magnetically orienting thin films
Grant 6,042,707 - Moslehi , et al. March 28, 2 | 2000-03-28 |
Ultra-high vacuum apparatus and method for high productivity physical vapor deposition.
Grant 6,039,848 - Moslehi , et al. March 21, 2 | 2000-03-21 |
Ultra high-speed chip semiconductor integrated circuit interconnect structure and fabrication method using free-space dielectrics
Grant 6,016,000 - Moslehi January 18, 2 | 2000-01-18 |
Method for automated calibration of temperature sensors in rapid thermal processing equipment
Grant 6,004,029 - Moslehi , et al. December 21, 1 | 1999-12-21 |
Multi-zone gas injection apparatus and method for microelectronics manufacturing equipment
Grant 5,976,261 - Moslehi , et al. November 2, 1 | 1999-11-02 |
High throughput optical curing process for semiconductor device manufacturing
Grant 5,972,803 - Shu , et al. October 26, 1 | 1999-10-26 |
Insulated-gate field-effect transistor structure and method
Grant 5,949,105 - Moslehi September 7, 1 | 1999-09-07 |
Thermally conductive chuck for vacuum processor
Grant 5,936,829 - Moslehi August 10, 1 | 1999-08-10 |
High magnetic flux cathode apparatus and method for high productivity physical-vapor deposition
Grant 5,876,573 - Moslehi , et al. March 2, 1 | 1999-03-02 |
Programmable ultraclean electromagnetic substrate rotation apparatus and method for microelectronics manufacturing equipment
Grant 5,871,588 - Moslehi , et al. February 16, 1 | 1999-02-16 |
Direct gas-phase doping of semiconductor wafers using an organic dopant source
Grant 5,866,472 - Moslehi February 2, 1 | 1999-02-02 |
Method for multi-zone high-density inductively-coupled plasma generation
Grant 5,846,883 - Moslehi December 8, 1 | 1998-12-08 |
High magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition
Grant 5,746,897 - Heimanson , et al. May 5, 1 | 1998-05-05 |
Apparatus for semiconductor device fabrication diagnosis and prognosis
Grant 5,719,495 - Moslehi February 17, 1 | 1998-02-17 |
Insulated-gate field-effect transistor structure and method
Grant 5,716,861 - Moslehi February 10, 1 | 1998-02-10 |
Rapid thermal processing high-performance multizone illuminator for wafer backside heating
Grant 5,715,361 - Moslehi February 3, 1 | 1998-02-03 |
Dry microlithography process
Grant 5,700,628 - Moslehi December 23, 1 | 1997-12-23 |
Direct gas-phase doping of semiconductor wafers using an organic dopant source of phosphorus
Grant 5,641,707 - Moslehi June 24, 1 | 1997-06-24 |
Real-time multi-zone semiconductor wafer temperature and process uniformity control system
Grant 5,635,409 - Moslehi June 3, 1 | 1997-06-03 |
Method and apparatus for uniform semiconductor material processing using induction heating with a chuck member
Grant 5,525,780 - Moslehi June 11, 1 | 1996-06-11 |
Planarized material layer deposition using condensed-phase processing
Grant 5,504,040 - Moslehi April 2, 1 | 1996-04-02 |
Gas-phase doping method using germanium-containing additive
Grant 5,489,550 - Moslehi February 6, 1 | 1996-02-06 |
Method for real-time semiconductor wafer temperature measurement based on a surface roughness characteristic of the wafer
Grant 5,474,381 - Moslehi December 12, 1 | 1995-12-12 |
Multi-electrode plasma processing apparatus
Grant 5,464,499 - Moslehi , et al. * November 7, 1 | 1995-11-07 |
Programmable multizone gas injector for single-wafer semiconductor processing equipment
Grant 5,453,124 - Moslehi , et al. September 26, 1 | 1995-09-26 |
High performance multi-zone illuminator module for semiconductor wafer processing
Grant 5,446,825 - Moslehi , et al. August 29, 1 | 1995-08-29 |
Lamp-heated chuck for uniform wafer processing
Grant 5,446,824 - Moslehi August 29, 1 | 1995-08-29 |
Multi-zone lamp interference correction system
Grant 5,444,815 - Lee , et al. August 22, 1 | 1995-08-22 |
Real-time multi-zone semiconductor wafer temperature and process uniformity control system
Grant 5,436,172 - Moslehi * July 25, 1 | 1995-07-25 |
Method and apparatus for low-temperature semiconductor processing
Grant 5,435,379 - Moslehi , et al. July 25, 1 | 1995-07-25 |
Temperature sensor calibration wafer structure and method of fabrication
Grant 5,436,494 - Moslehi July 25, 1 | 1995-07-25 |
Junction contact process and structure for semiconductor technologies
Grant 5,420,056 - Moslehi May 30, 1 | 1995-05-30 |
Apparatus for and method of rapid testing of semiconductor components at elevated temperature
Grant 5,410,162 - Tigelaar , et al. April 25, 1 | 1995-04-25 |
Method and apparatus for time-division plasma chopping in a multi-channel plasma processing equipment
Grant 5,405,492 - Moslehi April 11, 1 | 1995-04-11 |
Process chamber purge module for semiconductor processing equipment
Grant 5,405,444 - Moslehi April 11, 1 | 1995-04-11 |
Low-temperature in-situ dry cleaning process for semiconductor wafer
Grant 5,403,434 - Moslehi April 4, 1 | 1995-04-04 |
High-performance insulated-gate field-effect transistor
Grant 5,397,909 - Moslehi March 14, 1 | 1995-03-14 |
Source and method for generating high-density plasma with inductive power coupling
Grant 5,397,962 - Moslehi March 14, 1 | 1995-03-14 |
Method of fabrication of integrated circuit isolation structure
Grant 5,387,538 - Moslehi February 7, 1 | 1995-02-07 |
Sensor apparatus and method for real-time in-situ measurements of sheet resistance and its uniformity pattern in semiconductor processing equipment
Grant 5,377,071 - Moslehi December 27, 1 | 1994-12-27 |
Low-RC multi-level interconnect technology for high-performance integrated circuits
Grant 5,372,969 - Moslehi December 13, 1 | 1994-12-13 |
SOI/semiconductor heterostructure fabrication by wafer bonding
Grant 5,373,184 - Moslehi December 13, 1 | 1994-12-13 |
Multi-zone illuminator with embedded process control sensors
Grant 5,367,606 - Moslehi , et al. November 22, 1 | 1994-11-22 |
Method and apparatus for physical-vapor deposition of material layers
Grant 5,354,443 - Moslehi October 11, 1 | 1994-10-11 |
Wireless temperature calibration device and method
Grant 5,326,170 - Moslehi , et al. July 5, 1 | 1994-07-05 |
Soi wafer fabrication by selective epitaxial growth
Grant 5,321,298 - Moslehi June 14, 1 | 1994-06-14 |
Fiber optic network for multi-point emissivity-compensated semiconductor wafer pyrometry
Grant 5,317,656 - Moslehi , et al. May 31, 1 | 1994-05-31 |
Apparatus and method for determining wafer temperature using pyrometry
Grant 5,305,417 - Najm , et al. April 19, 1 | 1994-04-19 |
Conditioning of semiconductor wafers for uniform and repeatable rapid thermal processing
Grant 5,296,385 - Moslehi , et al. March 22, 1 | 1994-03-22 |
Sensor for semiconductor device manufacturing process control
Grant 5,293,216 - Moslehi March 8, 1 | 1994-03-08 |
Multi-electrode plasma processing apparatus
Grant 5,286,297 - Moslehi , et al. February 15, 1 | 1994-02-15 |
Process chamber purge module for semiconductor processing equipment
Grant 5,275,976 - Moslehi January 4, 1 | 1994-01-04 |
Method and apparatus for time-division plasma chopping in a multi-channel plasma processing equipment
Grant 5,273,609 - Moslehi December 28, 1 | 1993-12-28 |
Method and apparatus for semiconductor device fabrication diagnosis and prognosis
Grant 5,270,222 - Moslehi December 14, 1 | 1993-12-14 |
Multi zone illuminator with embeded process control sensors and light interference elimination circuit
Grant 5,268,989 - Moslehi , et al. December 7, 1 | 1993-12-07 |
Wireless temperature calibration device and method
Grant 5,265,957 - Moslehi , et al. November 30, 1 | 1993-11-30 |
Semiconductor wafer cleaning using condensed-phase processing
Grant 5,261,965 - Moslehi November 16, 1 | 1993-11-16 |
Doped well structure and method for semiconductor technologies
Grant 5,256,563 - Moslehi , et al. October 26, 1 | 1993-10-26 |
Multi-point pyrometry with real-time surface emissivity compensation
Grant 5,255,286 - Moslehi , et al. October 19, 1 | 1993-10-19 |
Multi-zone plasma processing method and apparatus
Grant 5,252,178 - Moslehi October 12, 1 | 1993-10-12 |
Self-aligned single-mask CMOS/BiCMOS twin-well formation with flat surface topography
Grant 5,252,501 - Moslehi October 12, 1 | 1993-10-12 |
Method of making semiconductor well structure
Grant 5,219,783 - Moslehi June 15, 1 | 1993-06-15 |
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