Mos; Everhardus Cornelis

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mos; Everhardus Cornelis.The latest application filed is for "computational metrology".

Company Profile

24.74.73

Mos; Everhardus Cornelis - Best NL
Mos; Everhardus Cornelis - Eindhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Inspection method and apparatus and lithographic processing cell Grant RE49,199 - Mos , et al. September 6, 2	2022-09-06
Computational Metrology App 20220260925 - TEL; Wim Tjibbo ; et al.	2022-08-18
Method For Controlling A Semiconductor Manufacturing Process App 20220236647 - HAUPTMANN; Marc ; et al.	2022-07-28
Method for determining contribution to a fingerprint Grant 11,378,891 - Harutyunyan , et al. July 5, 2	2022-07-05
Computational metrology Grant 11,347,150 - Tel , et al. May 31, 2	2022-05-31
Method to change an etch parameter Grant 11,300,887 - Van Haren , et al. April 12, 2	2022-04-12
Methods and apparatus for calculating substrate model parameters and controlling lithographic processing Grant 11,300,891 - Menger , et al. April 12, 2	2022-04-12
Method And Apparatus For Inspection And Metrology App 20220027437 - MOS; Everhardus Cornelis ; et al.	2022-01-27
Computational Metrology App 20210349395 - WARNAAR; Patrick ; et al.	2021-11-11
Method And Apparatus For Optimization Of Lithographic Process App 20210349402 - HAUPTMANN; Marc ; et al.	2021-11-11
Method and apparatus for inspection and metrology Grant 11,170,072 - Mos , et al. November 9, 2	2021-11-09
Method and apparatus for optimization of lithographic process Grant 11,099,487 - Hauptmann , et al. August 24, 2	2021-08-24
Computational metrology Grant 11,067,902 - Warnaar , et al. July 20, 2	2021-07-20
Methods and Apparatus for Measuring a Property of a Substrate App 20210215622 - Elings; Wouter Lodewijk ; et al.	2021-07-15
Device manufacturing method Grant 11,061,336 - Simons , et al. July 13, 2	2021-07-13
Methods And Apparatus For Calculating Substrate Model Parameters And Controlling Lithographic Processing App 20210191286 - MENGER; Jasper ; et al.	2021-06-24
Computational Metrology App 20210191278 - TEL; Wim Tjibbo ; et al.	2021-06-24
Method and apparatus to reduce effects of nonlinear behavior Grant 11,036,146 - Van Haren , et al. June 15, 2	2021-06-15
Methods and apparatus for measuring a property of a substrate Grant 10,996,176 - Elings , et al. May 4, 2	2021-05-04
Computational metrology Grant 10,990,018 - Tel , et al. April 27, 2	2021-04-27
Method for characterizing distortions in a lithographic process, lithographic apparatus, lithographic cell and computer program Grant 10,928,737 - Mos , et al. February 23, 2	2021-02-23
Method and apparatus to correct for patterning process error Grant 10,915,689 - Ten Berge , et al. February 9, 2	2021-02-09
Method For Determining Contribution To A Fingerprint App 20210003927 - Harutyunyan; Davit ; et al.	2021-01-07
Methods and apparatus for calculating substrate model parameters and controlling lithographic processing Grant 10,859,930 - Menger , et al. December 8, 2	2020-12-08
Method For Optimization Of A Lithographic Process App 20200356012 - MOS; Everhardus Cornelis ; et al.	2020-11-12
Method for determining contribution to a fingerprint Grant 10,816,904 - Harutyunyan , et al. October 27, 2	2020-10-27
Method of monitoring and device manufacturing method Grant 10,809,631 - Mos , et al. October 20, 2	2020-10-20
Method for optimization of a lithographic process Grant 10,802,408 - Mos , et al. October 13, 2	2020-10-13
Methods and Apparatus for Measuring a Property of a Substrate App 20200319118 - ELINGS; Wouter Lodewijk ; et al.	2020-10-08
Methods and apparatus for measuring a property of a substrate Grant 10,746,668 - Elings , et al. A	2020-08-18
Computational Metrology App 20200249576 - Kind Code	2020-08-06
Method and apparatus for reticle optimization Grant 10,725,372 - Tel , et al.	2020-07-28
Method and apparatus to correct for patterning process error Grant 10,691,863 - Ten Berge , et al.	2020-06-23
Device Manufacturing Method App 20200081353 - SIMONS; Hubertus Johannes Gertrudus ; et al.	2020-03-12
Methods And Apparatus For Calculating Substrate Model Parameters And Controlling Lithographic Processing App 20200057395 - MENGER; Jasper ; et al.	2020-02-20
Method And Apparatus For Optimization Of Lithographic Process App 20200026201 - HAUPTMANN; Marc ; et al.	2020-01-23
Methods and apparatus for calculating substrate model parameters and controlling lithographic processing Grant 10,495,990 - Menger , et al. De	2019-12-03
Computational Metrology App 20190361358 - TEL; Wim Tjibbo ; et al.	2019-11-28
A Method For Optimization Of A Lithographic Process App 20190317412 - MOS; Everhardus Cornelis ; et al.	2019-10-17
A Processing Apparatus And A Method For Correcting A Parameter Variation Across A Substrate App 20190311921 - MOS; Everhardus Cornelis ; et al.	2019-10-10
Methods and Apparatus for Measuring a Property of a Substrate App 20190301850 - ELINGS; Wouter Lodewijk ; et al.	2019-10-03
A Method To Change An Etch Parameter App 20190285992 - VAN HAREN; Richard Johannes Franciscus ; et al.	2019-09-19
Method For Determining Contribution To A Fingerprint App 20190271919 - HARUTYUNYAN; Davit ; et al.	2019-09-05
Methods and apparatus for measuring a property of a substrate Grant 10,317,191 - Elings , et al.	2019-06-11
Method For Characterizing Distortions In A Lithographic Process, Lithographic Apparatus, Lithographic Cell And Computer Program App 20190011842 - MOS; Everhardus Cornelis ; et al.	2019-01-10
Method And Apparatus To Reduce Effects Of Nonlinear Behavior App 20180314168 - VAN HAREN; Richard Johannes Franciscus ; et al.	2018-11-01
Method Of Monitoring And Device Manufacturing Method App 20180307145 - MOS; Everhardus Cornelis ; et al.	2018-10-25
Method And Apparatus To Correct For Patterning Process Error App 20180307135 - TEN BERGE; Peter ; et al.	2018-10-25
Metrology target, method and apparatus, target design method, computer program and lithographic system Grant 10,061,212 - Van Der Schaar , et al. August 28, 2	2018-08-28
Method and apparatus for inspection and metrology Grant 9,971,478 - Mos , et al. May 15, 2	2018-05-15
Method And Apparatus For Inspection And Metrology App 20180067900 - MOS; Everhardus Cornelis ; et al.	2018-03-08
Method And Apparatus For Reticle Optimization App 20180011398 - TEL; Wim Tjibbo ; et al.	2018-01-11
Method of determining a measurement subset of metrology points on a substrate, associated apparatus and computer program Grant 9,811,006 - Wildenberg , et al. November 7, 2	2017-11-07
Metrology Target, Method and Apparatus, Target Design Method, Computer Program and Lithographic System App 20170293233 - VAN DER SCHAAR; Maurits ; et al.	2017-10-12
Methods And Apparatus For Calculating Substrate Model Parameters And Controlling Lithographic Processing App 20170277045 - MENGER; Jasper ; et al.	2017-09-28
Methods and Apparatus for Measuring a Property of a Substrate App 20170160073 - ELINGS; Wouter Lodewijk ; et al.	2017-06-08
Lithographic system, lithographic method and device manufacturing method Grant 9,632,430 - Mos , et al. April 25, 2	2017-04-25
Methods and apparatus for measuring a property of a substrate Grant 9,594,029 - Elings , et al. March 14, 2	2017-03-14
Method Of Determining A Measurement Subset Of Metrology Points On A Substrate, Associated Apparatus And Computer Program App 20160334717 - WILDENBERG; Jochem Sebastiaan ; et al.	2016-11-17
Method And Apparatus For Inspection And Metrology App 20160299438 - MOS; Everhardus Cornelis ; et al.	2016-10-13
Inspection apparatus and method for measuring a property of a substrate Grant 9,235,141 - Van Der Schaar , et al. January 12, 2	2016-01-12
Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus Grant 8,982,347 - Wei , et al. March 17, 2	2015-03-17
Control method and apparatus Grant 8,972,031 - Mos , et al. March 3, 2	2015-03-03
Methods and Apparatus for Measuring A Property of a Substrate App 20140354969 - Elings; Wouter Lodewijk ; et al.	2014-12-04
Inspection method and apparatus and lithographic processing cell Grant 8,887,107 - Mos , et al. November 11, 2	2014-11-11
Lithographic method and arrangement Grant 8,796,684 - Schoumans , et al. August 5, 2	2014-08-05
Alignment system, lithographic system and method Grant 8,706,442 - Mos , et al. April 22, 2	2014-04-22
Inspection Method and Apparatus and Lithographic Processing Cell App 20140089870 - MOS; Everhardus Cornelis ; et al.	2014-03-27
Optimization method and a lithographic cell Grant 8,612,045 - Mos , et al. December 17, 2	2013-12-17
Method for selecting sample positions on a substrate, method for providing a representation of a model of properties of a substrate, method of providing a representation of the variation of properties of a substrate across the substrate and device manufacturing method Grant 8,504,333 - Mos , et al. August 6, 2	2013-08-06
Substrate measurement method and apparatus Grant 8,497,976 - Corbeij , et al. July 30, 2	2013-07-30
Alignment Mark Deformation Estimating Method, Substrate Position Predicting Method, Alignment System and Lithographic Apparatus App 20130141723 - WEI; Xiuhong ; et al.	2013-06-06
Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method Grant 8,264,664 - Van Der Schaar , et al. September 11, 2	2012-09-11
Lithographic apparatus and device manufacturing method using overlay measurement Grant 8,264,686 - Den Boef , et al. September 11, 2	2012-09-11
Lithographic apparatus, device manufacturing method and device for correcting overlay errors between overlapping patterns Grant 8,248,579 - Mos , et al. August 21, 2	2012-08-21
Process, apparatus, and device for determining intra-field correction to correct overlay errors between overlapping patterns Grant 8,237,914 - Mos , et al. August 7, 2	2012-08-07
Control Method and Apparatus App 20120059505 - Mos; Everhardus Cornelis ; et al.	2012-03-08
Inspection Apparatus and Method, Lithographic Apparatus and Lithographic Processing Cell App 20120033193 - VAN DER SCHAAR; Maurits ; et al.	2012-02-09
Method of measurement, an inspection apparatus and a lithographic apparatus Grant 8,111,398 - Van der Schaar , et al. February 7, 2	2012-02-07
Lithographic System, Lithographic Method And Device Manufacturing Method App 20110299050 - Mos; Everhardus Cornelis ; et al.	2011-12-08
Substrate used in a method and apparatus for angular-resolved spectroscopic lithography characterization Grant 8,064,056 - Van Der Schaar , et al. November 22, 2	2011-11-22
Inspection apparatus, an apparatus for projecting an image and a method of measuring a property of a substrate Grant 7,969,577 - Werkman , et al. June 28, 2	2011-06-28
Substrate Used in a Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20110122496 - VAN DER SCHAAR; Maurits ; et al.	2011-05-26
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 7,898,662 - Van Der Schaar , et al. March 1, 2	2011-03-01
Lithographic method Grant 7,894,063 - Van Bilsen , et al. February 22, 2	2011-02-22
Method for Selecting Sample Positions on a Substrate, Method for Providing a Representation of a Model of Properties of a Substrate, Method of Providing a Representation of the Variation of Properties of a Substrate Across the Substrate and Device Manufacturing Method App 20110010000 - Mos; Everhardus Cornelis ; et al.	2011-01-13
Lithographic Method and Arrangement App 20100323461 - Schoumans; Nicole ; et al.	2010-12-23
Method of Measurement, an Inspection Apparatus and a Lithographic Apparatus App 20100277706 - Van der Schaar; Maurits ; et al.	2010-11-04
Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement Grant 7,821,650 - Van Der Schaar , et al. October 26, 2	2010-10-26
Optimization Method and a Lithographic Cell App 20100161099 - Mos; Everhardus Cornelis ; et al.	2010-06-24
Method of inspection, a method of manufacturing, an inspection apparatus, a substrate, a mask, a lithography apparatus and a lithographic cell Grant 7,724,370 - Mos , et al. May 25, 2	2010-05-25
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 7,710,572 - Mos , et al. May 4, 2	2010-05-04
Substrate Measurement Method And Apparatus App 20100091258 - Corbeij; Wilhelmus Maria ; et al.	2010-04-15
Process, Apparatus and Device App 20100092881 - MOS; Everhardus Cornelis ; et al.	2010-04-15
Lithographic apparatus and device manufacturing method Grant 7,683,351 - Mos , et al. March 23, 2	2010-03-23
Method of measurement, an inspection apparatus and a lithographic apparatus Grant 7,619,737 - Mos , et al. November 17, 2	2009-11-17
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method, substrate for use in the methods Grant 7,599,064 - Mos , et al. October 6, 2	2009-10-06
Lithographic Apparatus and Device Manufacturing Method Using Overlay Measurement App 20090244538 - DEN BOEF; Arie Jeffrey ; et al.	2009-10-01
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 7,573,584 - Den Boef , et al. August 11, 2	2009-08-11
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 7,564,555 - Den Boef , et al. July 21, 2	2009-07-21
Alignment mark, use of a hard mask material, and method Grant 7,550,379 - Van Haren , et al. June 23, 2	2009-06-23
Device manufacturing method and computer program product Grant 7,547,495 - Verstappen , et al. June 16, 2	2009-06-16
Lithographic apparatus and device manufacturing method using overlay measurement Grant 7,532,305 - Den Boef , et al. May 12, 2	2009-05-12
Alignment Method and Apparatus, Lithographic Apparatus, Metrology Apparatus and Device Manufacturing Method App 20090097008 - MOS; Everhardus Cornelis ; et al.	2009-04-16
Method For Producing A Marker On A Substrate, Lithographic Apparatus And Device Manufacturing Method App 20090066921 - Van Der Schaar; Maurits ; et al.	2009-03-12
Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement Grant 7,486,408 - Van Der Schaar , et al. February 3, 2	2009-02-03
Lithographic Apparatus and Device Manufacturing Method with Reduced Scribe Lane Usage for Substrate Measurement App 20090027691 - Van Der Schaar; Maurits ; et al.	2009-01-29
Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method Grant 7,476,490 - Van Der Schaar , et al. January 13, 2	2009-01-13
Method of selecting a grid model for correcting a process recipe for grid deformations in a lithographic apparatus and lithographic assembly using the same Grant 7,468,795 - Simons , et al. December 23, 2	2008-12-23
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method, substrate for use in the methods App 20080218767 - Mos; Everhardus Cornelis ; et al.	2008-09-11
Method of inspection, a method of manufacturing, an inspection apparatus, a substrate, a mask, a lithography apparatus and a lithographic cell App 20080212097 - Mos; Everhardus Cornelis ; et al.	2008-09-04
Lithographic apparatus and device manufacturing method Grant 7,415,319 - Werkman , et al. August 19, 2	2008-08-19
Method of measurement, an inspection apparatus and a lithographic apparatus App 20080174753 - Mos; Everhardus Cornelis ; et al.	2008-07-24
Lithographic Apparatus, Device Manufacturing Method and Device App 20080165332 - Mos; Everhardus Cornelis ; et al.	2008-07-10
Lithographic apparatus and device manufacturing method using overlay measurement quality indication Grant 7,391,513 - Van Der Schaar , et al. June 24, 2	2008-06-24
Method of measurement, an inspection apparatus and a lithographic apparatus App 20080144036 - Schaar; Maurits Van Der ; et al.	2008-06-19
Lithographic apparatus and device manufacturing method App 20080128642 - Mos; Everhardus Cornelis ; et al.	2008-06-05
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method App 20080128644 - Mos; Everhardus Cornelis ; et al.	2008-06-05
Alignment mark, use of a hard mask material, and method App 20080085599 - Van Haren; Richard Johannes Franciscus ; et al.	2008-04-10
Method and apparatus for angular-resolved spectroscopic lithography characterization App 20080074666 - Boef; Arie Jeffrey Den ; et al.	2008-03-27
Inspection apparatus, an apparatus for projecting an image and a method of measuring a property of a substrate App 20080068609 - Werkman; Roy ; et al.	2008-03-20
Method and apparatus for angular-resolved spectroscopic lithography characterization App 20080043239 - Boef; Arie Jeffrey Den ; et al.	2008-02-21
Method and apparatus for angular-resolved spectroscopic lithography characterization App 20080036984 - Mos; Everhardus Cornelis ; et al.	2008-02-14
Method and apparatus for angular-resolved spectroscopic lithography characterization App 20070291269 - Van Der Schaar; Maurits ; et al.	2007-12-20
Lithographic apparatus and device manufacturing method using overlay measurement App 20070229785 - Den Boef; Arie Jeffrey ; et al.	2007-10-04
Lithographic apparatus and device manufacturing method using overlay measurement quality indication App 20070229837 - Schaar; Maurits Van Der ; et al.	2007-10-04
Lithographic apparatus and device manufacturing method App 20070233305 - Werkman; Roy ; et al.	2007-10-04
Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement App 20070222960 - Van Der Schaar; Maurits ; et al.	2007-09-27
Device manufacturing method and computer program product App 20070141486 - Verstappen; Leonardus Henricus Marie ; et al.	2007-06-21
Method of selecting a grid model for correcting a process recipe for grid deformations in a lithographic apparatus and lithographic assembly using the same App 20070021860 - Gertrudus Simons; Hubertus Johannes ; et al.	2007-01-25
Device inspection method and apparatus using an asymmetric marker Grant 7,112,813 - Den Boef , et al. September 26, 2	2006-09-26
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,030,961 - Den Boef , et al. April 18, 2	2006-04-18
Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method App 20060008714 - Van Der Schaar; Maurits ; et al.	2006-01-12
Alignment system for lithographic apparatus for measuring a position of an alignment mark Grant 6,879,868 - Mos , et al. April 12, 2	2005-04-12
Alignment system for lithographic apparatus for measuring a position of an alignment mark App 20040187722 - Mos, Everhardus Cornelis ; et al.	2004-09-30
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20040174508 - Den Boef, Arie Jeffrey ; et al.	2004-09-09
Device inspection App 20040129900 - Den Boef, Arie Jeffrey ; et al.	2004-07-08
Computer program for determining a corrected position of a measured alignment mark, device manufacturing method, and device manufactured thereby Grant 6,732,004 - Mos , et al. May 4, 2	2004-05-04
Computer program for determining a corrected position of a measured alignment mark, device manufacturing method, and device manufactured thereby App 20020147520 - Mos, Everhardus Cornelis ; et al.	2002-10-10