Morrison, Alan F.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Morrison, Alan F..The latest application filed is for "chamber for constructing a film on a semiconductor wafer".
- Morrison, Alan F. - San Jose CA
| Patent | Date |
|---|---|
| Chamber for constructing a film on a semiconductor wafer App 20040099215 - Danek, Michal ; et al. | 2004-05-27 |
| Method for constructing a film on a semiconductor wafer Grant 6,699,530 - Danek , et al. March 2, 2 | 2004-03-02 |
| Chamber For Constructing A Film On A Semiconductor Wafer App 20020001976 - DANEK, MICHAL ; et al. | 2002-01-03 |
| Heater with shadow ring and purge above wafer surface Grant 5,888,304 - Umotoy , et al. March 30, 1 | 1999-03-30 |
| Chemical vapor deposition of a thin film onto a substrate Grant 5,856,240 - Sinha , et al. January 5, 1 | 1999-01-05 |
| Substrate support shield in wafer processing reactors Grant 5,855,687 - DuBois , et al. January 5, 1 | 1999-01-05 |
| Removable ring for controlling edge deposition in substrate processing apparatus Grant 5,766,365 - Umotoy , et al. June 16, 1 | 1998-06-16 |
| Chemical vapor deposition chamber with a purge guide Grant 5,516,367 - Lei , et al. May 14, 1 | 1996-05-14 |
| Compound clamp ring for semiconductor wafers Grant 5,421,401 - Sherstinsky , et al. June 6, 1 | 1995-06-06 |
| Lift fingers for substrate processing apparatus Grant 5,332,443 - Chew , et al. July 26, 1 | 1994-07-26 |
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