loadpatents
Patent applications and USPTO patent grants for Morokuma; Hidetoshi.The latest application filed is for "mass spectrometer".
Patent | Date |
---|---|
Mass spectrometer and mass analyzing method for efficiently ionizing a sample with less carry-over Grant 9,543,135 - Kumano , et al. January 10, 2 | 2017-01-10 |
Mass spectrometer Grant 9,281,169 - Morokuma , et al. March 8, 2 | 2016-03-08 |
Sample preparation container Grant D748,813 - Ishiguro , et al. February 2, 2 | 2016-02-02 |
Component analyzer Grant D746,476 - Noda , et al. December 29, 2 | 2015-12-29 |
Mass spectrometer and mass analyzing method Grant 9,184,037 - Kumano , et al. November 10, 2 | 2015-11-10 |
Mass spectrometer Grant 9,171,704 - Morokuma , et al. October 27, 2 | 2015-10-27 |
Mass spectrometer and mass spectrometry Grant 9,105,453 - Shishika , et al. August 11, 2 | 2015-08-11 |
Mass Spectrometer App 20150187554 - MOROKUMA; Hidetoshi ;   et al. | 2015-07-02 |
Mass Spectrometer And Mass Spectrometry App 20150108341 - Shishika; Tsukasa ;   et al. | 2015-04-23 |
Mass spectrometer Grant 9,006,679 - Morokuma , et al. April 14, 2 | 2015-04-14 |
Mass Spectrometer App 20150041641 - MOROKUMA; Hidetoshi ;   et al. | 2015-02-12 |
Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device Grant 8,881,067 - Nagatomo , et al. November 4, 2 | 2014-11-04 |
Method and apparatus for creating imaging recipe Grant RE45,224 - Miyamoto , et al. October 28, 2 | 2014-10-28 |
Mass spectrometer Grant 8,866,070 - Morokuma , et al. October 21, 2 | 2014-10-21 |
Method and apparatus for creating imaging recipe Grant RE45,204 - Miyamoto , et al. October 21, 2 | 2014-10-21 |
Scanning electron microscope and a method for imaging a specimen using the same Grant 8,853,630 - Miyamoto , et al. October 7, 2 | 2014-10-07 |
Sample holder for a component analyzer Grant D711,011 - Noda , et al. August 12, 2 | 2014-08-12 |
Mass spectrometer and mass spectrometry Grant 8,803,084 - Nishimura , et al. August 12, 2 | 2014-08-12 |
Component analyzer Grant D708,530 - Noda , et al. July 8, 2 | 2014-07-08 |
Scanning Electron Microscope And A Method For Imaging A Specimen Using The Same App 20140145078 - Miyamoto; Atsushi ;   et al. | 2014-05-29 |
Mass spectrometry method Grant 8,710,430 - Sugiyama , et al. April 29, 2 | 2014-04-29 |
Mass spectrometer Grant 8,680,464 - Hashimoto , et al. March 25, 2 | 2014-03-25 |
Mass spectrometer Grant 8,669,518 - Ishiguro , et al. March 11, 2 | 2014-03-11 |
Mass spectrometer Grant 8,664,588 - Noda , et al. March 4, 2 | 2014-03-04 |
Scanning electron microscope Grant 8,666,165 - Yamaguchi , et al. March 4, 2 | 2014-03-04 |
Scanning electron microscope and a method for imaging a specimen using the same Grant 8,642,957 - Miyamoto , et al. February 4, 2 | 2014-02-04 |
Mass Spectrometer App 20130320207 - MOROKUMA; Hidetoshi ;   et al. | 2013-12-05 |
Pattern measuring method and pattern measuring device Grant 8,507,856 - Sutani , et al. August 13, 2 | 2013-08-13 |
Method And Apparatus For Monitoring Cross-sectional Shape Of A Pattern Formed On A Semiconductor Device App 20130195346 - Nagatomo; Wataru ;   et al. | 2013-08-01 |
Mass Spectrometer And Mass Spectrometry App 20130161507 - NISHIMURA; Kazushige ;   et al. | 2013-06-27 |
Pattern measurement apparatus Grant 8,445,871 - Matsuoka , et al. May 21, 2 | 2013-05-21 |
Mass Spectrometer App 20130056633 - HASHIMOTO; Yuichiro ;   et al. | 2013-03-07 |
Mass Spectrometer And Mass Analyzing Method App 20130048851 - KUMANO; Shun ;   et al. | 2013-02-28 |
Mass Spectrometer App 20130032711 - ISHIGURO; Koji ;   et al. | 2013-02-07 |
Analyzer, ionization apparatus and analyzing method Grant 8,368,013 - Ishimaru , et al. February 5, 2 | 2013-02-05 |
Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device Grant 8,356,260 - Nagatomo , et al. January 15, 2 | 2013-01-15 |
Mass Spectrometry Method App 20120326027 - SUGIYAMA; Masuyuki ;   et al. | 2012-12-27 |
Mass Spectrometer And Mass Analyzing Method App 20120326022 - KUMANO; Shun ;   et al. | 2012-12-27 |
Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus Grant 8,338,804 - Morokuma , et al. December 25, 2 | 2012-12-25 |
Drug detection equipment Grant 8,319,194 - Hashimoto , et al. November 27, 2 | 2012-11-27 |
Mass Spectrometer App 20120248305 - NODA; Hiroyuki ;   et al. | 2012-10-04 |
Pattern Measuring Method And Pattern Measuring Device App 20120211653 - SUTANI; Takumichi ;   et al. | 2012-08-23 |
Pattern matching method and computer program for executing pattern matching Grant 8,244,042 - Sugiyama , et al. August 14, 2 | 2012-08-14 |
Scanning Electron Microscope and a Method for Imaging a Specimen Using the Same App 20120181426 - Miyamoto; Atsushi ;   et al. | 2012-07-19 |
Image forming method and charged particle beam apparatus Grant 8,203,504 - Kobaru , et al. June 19, 2 | 2012-06-19 |
Mass Spectrometer App 20120112061 - MOROKUMA; Hidetoshi ;   et al. | 2012-05-10 |
Pattern displacement measuring method and pattern measuring device Grant 8,173,962 - Sutani , et al. May 8, 2 | 2012-05-08 |
Scanning electron microscope and a method for imaging a specimen using the same Grant 8,158,938 - Miyamoto , et al. April 17, 2 | 2012-04-17 |
Drug Detection Equipment App 20120049055 - Hashimoto; Makoto ;   et al. | 2012-03-01 |
Method and system of displaying an exposure condition Grant 8,095,896 - Koike , et al. January 10, 2 | 2012-01-10 |
Mass Spectrometer App 20110315869 - ISHIGURO; KOUJI ;   et al. | 2011-12-29 |
SEM system and a method for producing a recipe Grant 8,073,242 - Miyamoto , et al. December 6, 2 | 2011-12-06 |
Analyzer, Ionization Apparatus And Analyzing Method App 20110253889 - ISHIMARU; Masako ;   et al. | 2011-10-20 |
Mass Spectrometer App 20110253891 - HASHIMOTO; Yuichiro ;   et al. | 2011-10-20 |
Method, device and computer program of length measurement Grant 8,019,161 - Morokuma , et al. September 13, 2 | 2011-09-13 |
Sample Dimension Inspecting/measuring Method And Sample Dimension Inspecting/measuring Apparatus App 20110158543 - Morokuma; Hidetoshi ;   et al. | 2011-06-30 |
Pattern Matching Method And Computer Program For Executing Pattern Matching App 20110150345 - SUGIYAMA; Akiyuki ;   et al. | 2011-06-23 |
Method and apparatus for observing a specimen Grant 7,935,927 - Miyamoto , et al. May 3, 2 | 2011-05-03 |
Pattern matching method and computer program for executing pattern matching Grant 7,925,095 - Sugiyama , et al. April 12, 2 | 2011-04-12 |
Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus Grant 7,923,703 - Morokuma , et al. April 12, 2 | 2011-04-12 |
Pattern matching method and pattern matching program Grant 7,889,909 - Shindo , et al. February 15, 2 | 2011-02-15 |
Method and apparatus for measuring shape of a specimen Grant 7,889,908 - Miyamoto , et al. February 15, 2 | 2011-02-15 |
Image Forming Method And Charged Particle Beam Apparatus App 20110032176 - KOBARU; Atsushi ;   et al. | 2011-02-10 |
Method and apparatus for semiconductor device production process monitoring and method and apparatus for estimating cross sectional shape of a pattern Grant 7,816,062 - Nagatomo , et al. October 19, 2 | 2010-10-19 |
Image forming method and charged particle beam apparatus Grant 7,817,105 - Kobaru , et al. October 19, 2 | 2010-10-19 |
Pattern Measurement Apparatus App 20100202654 - MATSUOKA; Ryoichi ;   et al. | 2010-08-12 |
Charged particle system Grant 7,772,554 - Sugiyama , et al. August 10, 2 | 2010-08-10 |
Charged Particle Beam Adjusting Method And Charged Particle Beam Apparatus App 20100181478 - Morokuma; Hidetoshi ;   et al. | 2010-07-22 |
Pattern Displacement Measuring Method And Pattern Measuring Device App 20100140472 - SUTANI; Takumichi ;   et al. | 2010-06-10 |
Pattern measurement apparatus Grant 7,732,792 - Matsuoka , et al. June 8, 2 | 2010-06-08 |
System and Method for Detecting a Defect App 20100138801 - MATSUOKA; Ryoichi ;   et al. | 2010-06-03 |
Charged particle beam adjusting method and charged particle beam apparatus Grant 7,705,300 - Morokuma , et al. April 27, 2 | 2010-04-27 |
Method and apparatus for monitoring exposure process Grant 7,685,560 - Nagatomo , et al. March 23, 2 | 2010-03-23 |
Pattern displacement measuring method and pattern measuring device Grant 7,679,055 - Sutani , et al. March 16, 2 | 2010-03-16 |
System and method for detecting defects in a semiconductor during manufacturing thereof Grant 7,681,159 - Matsuoka , et al. March 16, 2 | 2010-03-16 |
Sample Dimension Inspecting/measuring Method And Sample Dimension Inspecting/measuring Apparatus App 20090218491 - Morokuma; Hidetoshi ;   et al. | 2009-09-03 |
Pattern Measuring Method And Pattern Measuring Device App 20090200465 - SUTANI; Takumichi ;   et al. | 2009-08-13 |
Method and apparatus for creating imaging recipe Grant 7,559,047 - Miyamoto , et al. July 7, 2 | 2009-07-07 |
Scanning electron microscope Grant 7,521,695 - Nakada , et al. April 21, 2 | 2009-04-21 |
Pattern measuring method and pattern measuring device Grant 7,518,110 - Sutani , et al. April 14, 2 | 2009-04-14 |
Pattern Measurement Apparatus App 20090039263 - MATSUOKA; Ryoichi ;   et al. | 2009-02-12 |
Scanning Electron Microscope App 20090041333 - YAMAGUCHI; Satoru ;   et al. | 2009-02-12 |
Method and apparatus of measuring pattern dimension and controlling semiconductor device process having an error revising unit Grant 7,459,712 - Tanaka , et al. December 2, 2 | 2008-12-02 |
Scanning electron microscope Grant 7,439,505 - Yamaguchi , et al. October 21, 2 | 2008-10-21 |
Charged Particle System App 20080245965 - Sugiyama; Akiyuki ;   et al. | 2008-10-09 |
Method And Apparatus For Observing A Specimen App 20080237456 - MIYAMOTO; Atsushi ;   et al. | 2008-10-02 |
Pattern displacement measuring method and pattern measuring device App 20080224035 - Sutani; Takumichi ;   et al. | 2008-09-18 |
Method and System of Displaying an Exposure Condition App 20080204405 - Koike; Hirohito ;   et al. | 2008-08-28 |
Sem System And A Method For Producing A Recipe For Imaging Or Measuring A Specimen By Using The Sem System App 20080159609 - Miyamoto; Atsushi ;   et al. | 2008-07-03 |
Charged particle beam adjustment method and apparatus Grant 7,381,951 - Doi , et al. June 3, 2 | 2008-06-03 |
Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern Grant 7,365,322 - Miyamoto , et al. April 29, 2 | 2008-04-29 |
Method and apparatus for observing a specimen Grant 7,365,325 - Miyamoto , et al. April 29, 2 | 2008-04-29 |
Pattern matching method and computer program for executing pattern matching App 20080037830 - Sugiyama; Akiyuki ;   et al. | 2008-02-14 |
System and method for detecting a defect App 20080016481 - Matsuoka; Ryoichi ;   et al. | 2008-01-17 |
Workpiece size measurement method and apparatus App 20070221842 - Morokuma; Hidetoshi ;   et al. | 2007-09-27 |
Pattern matching method and pattern matching program App 20070223803 - Shindo; Hiroyuki ;   et al. | 2007-09-27 |
Scanning Electron Microscope And A Method For Imaging A Specimen Using The Same App 20070210252 - MIYAMOTO; Atsushi ;   et al. | 2007-09-13 |
Scanning electron microscope App 20070194234 - Nakada; Yoshinori ;   et al. | 2007-08-23 |
Method And Apparatus For Monitoring Cross-sectional Shape Of A Pattern Formed On A Semiconductor Device App 20070198955 - Nagatomo; Wataru ;   et al. | 2007-08-23 |
Image forming method and charged particle beam apparatus App 20070159662 - Kobaru; Atsushi ;   et al. | 2007-07-12 |
Method and apparatus for measuring three-dimensional shape of specimen by using SEM Grant 7,230,243 - Tanaka , et al. June 12, 2 | 2007-06-12 |
Apparatus for inspecting three dimensional shape of a specimen and method of watching an etching process using the same Grant 7,230,239 - Tanaka , et al. June 12, 2 | 2007-06-12 |
Method of measuring pattern dimension and method of controlling semiconductor device process App 20070120078 - Tanaka; Maki ;   et al. | 2007-05-31 |
Method and apparatus for observing a specimen App 20070114398 - Miyamoto; Atsushi ;   et al. | 2007-05-24 |
Scanning electron microscope Grant 7,217,925 - Nakada , et al. May 15, 2 | 2007-05-15 |
Method and apparatus for semiconductor device production process monitoring and method and apparatus for estimating cross sectional shape of a pattern App 20070105243 - Nagatomo; Wataru ;   et al. | 2007-05-10 |
Image forming method and charged particle beam apparatus Grant 7,187,345 - Kobaru , et al. March 6, 2 | 2007-03-06 |
Method of measuring pattern dimension and method of controlling semiconductor device process Grant 7,173,268 - Tanaka , et al. February 6, 2 | 2007-02-06 |
Image Forming Method And Charged Particle Beam Apparatus App 20070024528 - Kobaru; Atsushi ;   et al. | 2007-02-01 |
Method and apparatus for observing a specimen Grant 7,164,128 - Miyamoto , et al. January 16, 2 | 2007-01-16 |
Method and apparatus for measuring dimension of a pattern formed on a semiconductor wafer App 20060288325 - Miyamoto; Atsushi ;   et al. | 2006-12-21 |
Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern App 20060284081 - Miyamoto; Atsushi ;   et al. | 2006-12-21 |
Method and apparatus for measuring shape of a specimen App 20060210143 - Miyamoto; Atsushi ;   et al. | 2006-09-21 |
Pattern measuring method and pattern measuring device App 20060193508 - Sutani; Takumichi ;   et al. | 2006-08-31 |
Scanning electron microscope App 20060102840 - Nakada; Yoshinori ;   et al. | 2006-05-18 |
Scanning electron microscope App 20060097158 - Yamaguchi; Satoru ;   et al. | 2006-05-11 |
Scanning electron microscope Grant 7,009,178 - Nakada , et al. March 7, 2 | 2006-03-07 |
Charged particle beam adjustment method and apparatus App 20060043293 - Doi; Takashi ;   et al. | 2006-03-02 |
Scanning electron microscope Grant 7,002,151 - Yamaguchi , et al. February 21, 2 | 2006-02-21 |
Method and apparatus for measuring three-dimensional shape of specimen by using SEM App 20050285034 - Tanaka, Maki ;   et al. | 2005-12-29 |
Charged particle beam adjusting method and charged particle beam apparatus App 20050236570 - Morokuma, Hidetoshi ;   et al. | 2005-10-27 |
Method and apparatus for monitoring exposure process App 20050221207 - Nagatomo, Wataru ;   et al. | 2005-10-06 |
Scanning electron microscope App 20050178965 - Nakada, Yoshinori ;   et al. | 2005-08-18 |
Method of monitoring an exposure process Grant 6,929,892 - Shishido , et al. August 16, 2 | 2005-08-16 |
Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device Grant 6,913,861 - Shishido , et al. July 5, 2 | 2005-07-05 |
Method and apparatus for observing a specimen App 20050133718 - Miyamoto, Atsushi ;   et al. | 2005-06-23 |
Method and system for monitoring a semiconductor device manufacturing process Grant 6,909,930 - Shishido , et al. June 21, 2 | 2005-06-21 |
Method of measuring pattern dimension and method of controlling semiconductor device process App 20050116182 - Tanaka, Maki ;   et al. | 2005-06-02 |
Scanning electron microscope App 20050109937 - Yamaguchi, Satoru ;   et al. | 2005-05-26 |
Scanning electron microscope Grant 6,897,445 - Nakada , et al. May 24, 2 | 2005-05-24 |
Apparatus for inspecting three dimensional shape of a specimen and method of watching an etching process using the same App 20050048780 - Tanaka, Maki ;   et al. | 2005-03-03 |
Method of monitoring an exposure process App 20050037271 - Shishido, Chie ;   et al. | 2005-02-17 |
Scanning electron microscope Grant 6,803,573 - Yamaguchi , et al. October 12, 2 | 2004-10-12 |
Process conditions change monitoring systems that use electron beams, and related monitoring methods Grant 6,791,096 - Komuro , et al. September 14, 2 | 2004-09-14 |
Process conditions change monitoring systems that use electron beams, and related monitoring methods Grant 6,791,082 - Komuro , et al. September 14, 2 | 2004-09-14 |
Scanning electron microscope App 20040094713 - Nakada, Yoshinori ;   et al. | 2004-05-20 |
Scanning electron microscope Grant 6,713,761 - Nakada , et al. March 30, 2 | 2004-03-30 |
Scanning electron microscope App 20040016882 - Yamaguchi, Satoru ;   et al. | 2004-01-29 |
Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device App 20030219658 - Shishido, Chie ;   et al. | 2003-11-27 |
Scanning electron microscope Grant 6,627,888 - Yamaguchi , et al. September 30, 2 | 2003-09-30 |
Process conditions change monitoring systems that use electron beams, and related monitoring methods App 20030106999 - Komuro, Osamu ;   et al. | 2003-06-12 |
Process conditions change monitoring systems that use electron beams, and related monitoring methods App 20030038250 - Komuro, Osamu ;   et al. | 2003-02-27 |
Method and system for monitoring a semiconductor device manufacturing process App 20030015660 - Shishido, Chie ;   et al. | 2003-01-23 |
Scanning electron microscope App 20010054692 - Nakada, Yoshinori ;   et al. | 2001-12-27 |
Scanning electron microscope App 20010019109 - Yamaguchi, Satoru ;   et al. | 2001-09-06 |
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