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Processing Apparatus, Exhaust Processing Process And Plasma Processing Process App 20090145555 - SAWAYAMA; TADASHI ;   et al. | 2009-06-11 |
Method for forming semiconductor device and method for forming photovoltaic device Grant 7,534,628 - Takai , et al. May 19, 2 | 2009-05-19 |
Processing Apparatus, Exhaust Processing Process And Plasma Processing Process App 20090114155 - Sawayama; Tadashi ;   et al. | 2009-05-07 |
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Method For Forming Semiconductor Device And Method For Forming Photovoltaic Device App 20080096291 - Takai; Yasuyoshi ;   et al. | 2008-04-24 |
Processing Apparatus, Exhaust Processing Process And Plasma Processing Process App 20080014345 - SAWAYAMA; TADASHI ;   et al. | 2008-01-17 |
Exhaust Processing Method, Plasma Processing Method And Plasma Processing Apparatus App 20070169890 - SHISHIDO; TAKESHI ;   et al. | 2007-07-26 |
Exhaust processing method, plasma processing method and plasma processing apparatus Grant 7,211,708 - Shishido , et al. May 1, 2 | 2007-05-01 |
Method of forming silicon-based thin film, silicon-based thin film, and photovoltaic element Grant 7,074,641 - Kondo , et al. July 11, 2 | 2006-07-11 |
Method of forming silicon-based thin film, silicon-based thin film, and photovoltaic element App 20050227457 - Kondo, Takaharu ;   et al. | 2005-10-13 |
Vacuum-processing method using a movable cooling plate during processing Grant 6,858,087 - Hori , et al. February 22, 2 | 2005-02-22 |
Apparatus and method for processing a substrate Grant 6,833,155 - Shimoda , et al. December 21, 2 | 2004-12-21 |
Process for forming a silicon-based film on a substrate using a temperature gradient across the substrate axis Grant 6,794,275 - Kondo , et al. September 21, 2 | 2004-09-21 |
Processing apparatus, exhaust processing process and plasma processing process App 20040161533 - Sawayama, Tadashi ;   et al. | 2004-08-19 |
Method and apparatus for forming deposited film Grant 6,667,240 - Ozaki , et al. December 23, 2 | 2003-12-23 |
Apparatus and method for processing a substrate App 20030194482 - Shimoda, Hiroshi ;   et al. | 2003-10-16 |
Processing Apparatus, Exhaust Processing Process And Plasma Processing App 20030164225 - SAWAYAMA, TADASHI ;   et al. | 2003-09-04 |
Apparatus and method for processing a substrate Grant 6,602,347 - Shimoda , et al. August 5, 2 | 2003-08-05 |
Vacuum-processing apparatus and method for vacuum-processing an object App 20030136517 - Hori, Tadashi ;   et al. | 2003-07-24 |
Silicon film, semiconductor device, and process for forming silicon films App 20030104664 - Kondo, Takaharu ;   et al. | 2003-06-05 |
Vacuum-processing apparatus using a movable cooling plate during processing Grant 6,547,922 - Hori , et al. April 15, 2 | 2003-04-15 |
Method and apparatus for forming deposited film App 20020015802 - Ozaki, Hiroyuki ;   et al. | 2002-02-07 |
Exhaust processing method, plasma processing method and plasma processing apparatus App 20020006477 - Shishido, Takeshi ;   et al. | 2002-01-17 |
Vacuum-processing apparatus and method for vacuum-processing an object App 20020005171 - Hori, Tadashi ;   et al. | 2002-01-17 |
Film forming method Grant 6,338,872 - Yoshino , et al. January 15, 2 | 2002-01-15 |
Film forming apparatus Grant 6,273,955 - Yoshino , et al. August 14, 2 | 2001-08-14 |
Process for producing photovoltaic element Grant 6,261,862 - Hori , et al. July 17, 2 | 2001-07-17 |
Plasma processing method and apparatus Grant 6,031,198 - Moriyama , et al. February 29, 2 | 2000-02-29 |