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Semiconductor Device And Method For Manufacturing Semiconductor Device App 20220238719 - YAMAZAKI; Shunpei ;   et al. | 2022-07-28 |
Capacitor, semiconductor device, and manufacturing method of semiconductor device Grant 11,380,688 - Sato , et al. July 5, 2 | 2022-07-05 |
Wiring Layer And Manufacturing Method Therefor App 20220189996 - Okazaki; Yutaka ;   et al. | 2022-06-16 |
Semiconductor Device, Manufacturing Method Thereof, And Electronic Device App 20220115409 - KURATA; Motomu ;   et al. | 2022-04-14 |
Semiconductor device Grant 11,282,964 - Yamazaki , et al. March 22, 2 | 2022-03-22 |
Semiconductor device, manufacturing method thereof, and electronic device Grant 11,282,860 - Kurata , et al. March 22, 2 | 2022-03-22 |
Semiconductor device and method for manufacturing semiconductor device Grant 11,211,500 - Yamazaki , et al. December 28, 2 | 2021-12-28 |
Wiring layer and manufacturing method therefor Grant 11,211,408 - Okazaki , et al. December 28, 2 | 2021-12-28 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20210210635 - YAMAZAKI; Shunpei ;   et al. | 2021-07-08 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20210167194 - YAMAZAKI; Shunpei ;   et al. | 2021-06-03 |
Semiconductor device and method for manufacturing semiconductor device Grant 11,004,961 - Yamazaki , et al. May 11, 2 | 2021-05-11 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20200357923 - YAMAZAKI; Shunpei ;   et al. | 2020-11-12 |
Semiconductor Device, Manufacturing Method Thereof, And Electronic Device App 20200321360 - KURATA; Motomu ;   et al. | 2020-10-08 |
Wiring Layer and Manufacturing Method Therefor App 20200258914 - A1 | 2020-08-13 |
Device, manufacturing method thereof, and electronic device Grant 10,707,239 - Miyairi , et al. | 2020-07-07 |
Semiconductor device, manufacturing method thereof, and electronic device Grant 10,658,389 - Kurata , et al. | 2020-05-19 |
Wiring layer and manufacturing method therefor Grant 10,644,039 - Okazaki , et al. | 2020-05-05 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20200052099 - YAMAZAKI; Shunpei ;   et al. | 2020-02-13 |
Capacitor, Semiconductor Device, And Manufacturing Method Of Semiconductor Device App 20200043931 - SATO; Yuichi ;   et al. | 2020-02-06 |
Method for manufacturing semiconductor device Grant 10,541,337 - Moriwaka Ja | 2020-01-21 |
Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device Grant 10,488,671 - Tanaka , et al. Nov | 2019-11-26 |
Wiring Layer And Manufacturing Method Therefor App 20190355751 - OKAZAKI; Yutaka ;   et al. | 2019-11-21 |
Wiring layer and manufacturing method therefor Grant 10,304,864 - Okazaki , et al. | 2019-05-28 |
Device, Manufacturing Method Thereof, And Electronic Device App 20190027501 - MIYAIRI; Hidekazu ;   et al. | 2019-01-24 |
Method for manufacturing semiconductor device App 20180308985 - Moriwaka; Tomoaki | 2018-10-25 |
Device, manufacturing method thereof, and electronic device Grant 10,074,672 - Miyairi , et al. September 11, 2 | 2018-09-11 |
Method for manufacturing semiconductor device Grant 10,032,919 - Moriwaka July 24, 2 | 2018-07-24 |
Method Of Laser Irradiation, Laser Irradiation Apparatus, And Method Of Manufacturing A Semiconductor Device App 20180188546 - TANAKA; Koichiro ;   et al. | 2018-07-05 |
Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device Grant 9,910,285 - Tanaka , et al. March 6, 2 | 2018-03-06 |
Wiring Layer and Manufacturing Method Therefor App 20180006061 - Okazaki; Yutaka ;   et al. | 2018-01-04 |
Device, Manufacturing Method Thereof, And Electronic Device App 20170287940 - MIYAIRI; Hidekazu ;   et al. | 2017-10-05 |
Wiring layer and manufacturing method therefor Grant 9,773,820 - Okazaki , et al. September 26, 2 | 2017-09-26 |
Device, manufacturing method thereof, and electronic device Grant 9,728,559 - Miyairi , et al. August 8, 2 | 2017-08-08 |
Method Of Laser Irradiation, Laser Irradiation Apparatus, And Method Of Manufacturing A Semiconductor Device App 20170212354 - TANAKA; Koichiro ;   et al. | 2017-07-27 |
Semiconductor Device, Manufacturing Method Thereof, And Electronic Device App 20170117299 - KURATA; Motomu ;   et al. | 2017-04-27 |
Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device Grant 9,564,323 - Tanaka , et al. February 7, 2 | 2017-02-07 |
Semiconductor device, manufacturing method thereof, and electronic device Grant 9,553,202 - Kurata , et al. January 24, 2 | 2017-01-24 |
Device, Manufacturing Method Thereof, And Electronic Device App 20160233235 - MIYAIRI; Hidekazu ;   et al. | 2016-08-11 |
Wiring Layer and Manufacturing Method Therefor App 20160099259 - Okazaki; Yutaka ;   et al. | 2016-04-07 |
Semiconductor device and method for manufacturing the same Grant 9,276,125 - Shimomura , et al. March 1, 2 | 2016-03-01 |
Method for manufacturing semiconductor device App 20160049522 - Moriwaka; Tomoaki | 2016-02-18 |
Method Of Manufacturing Semiconductor Device App 20160035865 - NAGAMATSU; Sho ;   et al. | 2016-02-04 |
Method for manufacturing semiconductor device App 20160005611 - Moriwaka; Tomoaki | 2016-01-07 |
Semiconductor Device, Manufacturing Method Thereof, And Electronic Device App 20150349127 - Kurata; Motomu ;   et al. | 2015-12-03 |
Method for manufacturing semiconductor device Grant 9,177,811 - Moriwaka November 3, 2 | 2015-11-03 |
Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device Grant 8,993,421 - Tanaka , et al. March 31, 2 | 2015-03-31 |
Manufacturing method and manufacturing apparatus of semiconductor substrate Grant 8,985,173 - Omata , et al. March 24, 2 | 2015-03-24 |
Semiconductor Device And Method For Manufacturing The Same App 20140246668 - Shimomura; Akihisa ;   et al. | 2014-09-04 |
Method for forming SOI substrate and apparatus for forming the same Grant 8,802,534 - Komatsu , et al. August 12, 2 | 2014-08-12 |
Method Of Laser Irradiation, Laser Irradiation Apparatus, And Method Of Manufacturing A Semiconductor Device App 20140220768 - TANAKA; Koichiro ;   et al. | 2014-08-07 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device Grant 8,735,186 - Moriwaka May 27, 2 | 2014-05-27 |
Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device Grant 8,722,521 - Tanaka , et al. May 13, 2 | 2014-05-13 |
Method of manufacturing semiconductor device Grant 8,703,579 - Miyairi , et al. April 22, 2 | 2014-04-22 |
Beam Homogenizer, Laser Irradiation Apparatus, And Method For Manufacturing Semiconductor Device App 20140099781 - MORIWAKA; Tomoaki | 2014-04-10 |
Semiconductor substrate with stripes of different crystal plane directions and semiconductor device including the same Grant 8,653,568 - Moriwaka February 18, 2 | 2014-02-18 |
Laser Irradiation Method, Laser Irradiation Apparatus, And Method Of Manufacturing A Semiconductor Device App 20140011343 - TANAKA; Koichiro ;   et al. | 2014-01-09 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device Grant 8,623,675 - Moriwaka January 7, 2 | 2014-01-07 |
Method Of Laser Irradiation, Laser Irradiation Apparatus, And Method Of Manufacturing A Semiconductor Device App 20130323866 - TANAKA; Koichiro ;   et al. | 2013-12-05 |
Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device Grant 8,530,788 - Tanaka , et al. September 10, 2 | 2013-09-10 |
Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device Grant 8,507,334 - Tanaka , et al. August 13, 2 | 2013-08-13 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device Grant 8,457,463 - Tanaka , et al. June 4, 2 | 2013-06-04 |
Heat treatment apparatus, heat treatment method and method for manufacturing semiconductor device Grant 8,440,941 - Narita , et al. May 14, 2 | 2013-05-14 |
Manufacturing method of SOI substrate Grant 8,432,021 - Moriwaka April 30, 2 | 2013-04-30 |
Method of crystallizing semiconductor film and method of manufacturing semiconductor device Grant 8,349,714 - Tanaka , et al. January 8, 2 | 2013-01-08 |
Method For Forming Soi Substrate And Apparatus For Forming The Same App 20120322228 - KOMATSU; Yoshihiro ;   et al. | 2012-12-20 |
Crystalline semiconductor film, semiconductor device, and method for manufacturing thereof Grant 8,278,739 - Moriwaka October 2, 2 | 2012-10-02 |
Method for manufacturing crystalline semiconductor film Grant 8,216,892 - Moriwaka , et al. July 10, 2 | 2012-07-10 |
Manufacturing method of semiconductor device and electronic device Grant 8,178,438 - Moriwaka May 15, 2 | 2012-05-15 |
Method for manufacturing semiconductor layer and semiconductor device Grant 8,168,510 - Moriwaka May 1, 2 | 2012-05-01 |
Method For Manufacturing Soi Substrate App 20120045883 - KOMATSU; Yoshihiro ;   et al. | 2012-02-23 |
Semiconductor device and manufacturing method thereof Grant 8,058,709 - Moriwaka November 15, 2 | 2011-11-15 |
Method of Manufacturing Semiconductor Device App 20110275191 - Miyairi; Hidekazu ;   et al. | 2011-11-10 |
Beam Homogenizer, Laser Irradiation Apparatus, And Method For Manufacturing Semiconductor Device App 20110256695 - MORIWAKA; Tomoaki | 2011-10-20 |
Beam Homogenizer, Laser Irradiation Apparatus, And Method For Manufacturing Semiconductor Device App 20110230037 - TANAKA; Koichiro ;   et al. | 2011-09-22 |
Manufacturing Method And Manufacturing Apparatus Of Semiconductor Substrate App 20110214610 - Omata; Takatsugu ;   et al. | 2011-09-08 |
Method For Manufacturing Crystalline Semiconductor Film And Semiconductor Device App 20110201183 - MORIWAKA; Tomoaki ;   et al. | 2011-08-18 |
Method of manufacturing semiconductor device Grant 7,994,021 - Miyairi , et al. August 9, 2 | 2011-08-09 |
Manufacturing methods of SOI substrate and semiconductor device Grant 7,994,023 - Moriwaka August 9, 2 | 2011-08-09 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device Grant 7,978,412 - Moriwaka July 12, 2 | 2011-07-12 |
Manufacturing method of semiconductor device Grant 7,972,943 - Moriwaka July 5, 2 | 2011-07-05 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device Grant 7,953,310 - Tanaka , et al. May 31, 2 | 2011-05-31 |
Manufacturing method and manufacturing apparatus of semiconductor substrate Grant 7,947,570 - Omata , et al. May 24, 2 | 2011-05-24 |
Semiconductor Substrate, Semiconductor Device, And Manufacturing Method Thereof App 20110114998 - MORIWAKA; Tomoaki | 2011-05-19 |
Method for manufacturing crystalline semiconductor device Grant 7,935,584 - Moriwaka , et al. May 3, 2 | 2011-05-03 |
Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device Grant 7,927,983 - Tanaka , et al. April 19, 2 | 2011-04-19 |
Heat Treatment Apparatus, Heat Treatment Method And Method For Manufacturing Semiconductor Device App 20110070692 - Narita; Akihiro ;   et al. | 2011-03-24 |
Manufacturing Method Of Semiconductor Device And Electronic Device App 20110053324 - MORIWAKA; Tomoaki | 2011-03-03 |
Method of manufacturing a semiconductor device including a semiconductor substrate with stripes of different crystal plane directions Grant 7,879,689 - Moriwaka February 1, 2 | 2011-02-01 |
Manufacturing methods of SOI substrate and semiconductor device App 20110008946 - Moriwaka; Tomoaki | 2011-01-13 |
Manufacturing method of semiconductor device and electronic device Grant 7,851,352 - Moriwaka December 14, 2 | 2010-12-14 |
Manufacturing Method Of Soi Substrate App 20100304550 - MORIWAKA; Tomoaki | 2010-12-02 |
Beam homogenizer and laser irradiation apparatus Grant 7,842,565 - Moriwaka November 30, 2 | 2010-11-30 |
Manufacturing methods of SOI substrate and semiconductor device Grant 7,795,114 - Moriwaka September 14, 2 | 2010-09-14 |
Method for manufacturing semiconductor substrate Grant 7,790,572 - Moriwaka September 7, 2 | 2010-09-07 |
Semiconductor Device And Manufacturing Method Thereof App 20100207253 - Moriwaka; Tomoaki | 2010-08-19 |
Laser irradiation apparatus, laser irradiation method, and manufacturing method for a semiconductor device Grant 7,772,519 - Tanaka , et al. August 10, 2 | 2010-08-10 |
Semiconductor device and manufacturing method thereof Grant 7,709,309 - Moriwaka May 4, 2 | 2010-05-04 |
Laser treatment device, laser treatment method, and semiconductor device fabrication method Grant 7,682,949 - Tanaka , et al. March 23, 2 | 2010-03-23 |
Method For Manufacturing Semiconductor Layer And Semiconductor Device App 20100055872 - MORIWAKA; Tomoaki | 2010-03-04 |
Method for manufacturing crystalline semiconductor film and semiconductor device Grant 7,662,703 - Moriwaka , et al. February 16, 2 | 2010-02-16 |
Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device Grant 7,623,292 - Tanaka , et al. November 24, 2 | 2009-11-24 |
Manufacturing Apparatus Of Composite Substrate And Manufacturing Method Of Composite Substrate With Use Of The Manufacturing Apparatus App 20090223628 - OHNUMA; Hideto ;   et al. | 2009-09-10 |
Manufacturing Method And Manufacturing Apparatus Of Semiconductor Substrate App 20090181518 - OMATA; Takatsugu ;   et al. | 2009-07-16 |
Method of fabricating semiconductor device Grant 7,547,593 - Miyairi , et al. June 16, 2 | 2009-06-16 |
Semiconductor Substrate, Semiconductor Device, And Manufacturing Method Thereof App 20090127591 - Moriwaka; Tomoaki | 2009-05-21 |
Method For Manufacturing Semiconductor Substrate App 20090093102 - MORIWAKA; Tomoaki | 2009-04-09 |
Beam Homogenizer And Laser Irradiation Apparatus App 20090068802 - MORIWAKA; Tomoaki | 2009-03-12 |
Manufacturing methods of SOI substrate and semiconductor device App 20090042362 - Moriwaka; Tomoaki | 2009-02-12 |
Beam homogenizer and laser irradiation apparatus Grant 7,486,444 - Moriwaka February 3, 2 | 2009-02-03 |
Method for manufacturing crystalline semiconductor film and semiconductor device App 20080318398 - Moriwaka; Tomoaki ;   et al. | 2008-12-25 |
Manufacturing Method Of Semiconductor Device And Electronic Device App 20080280402 - MORIWAKA; Tomoaki | 2008-11-13 |
Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device Grant 7,450,307 - Tanaka , et al. November 11, 2 | 2008-11-11 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device App 20080230723 - Tanaka; Koichiro ;   et al. | 2008-09-25 |
Method for manufacturing semiconductor device App 20080233689 - Moriwaka; Tomoaki | 2008-09-25 |
Manufacturing Method Of Semiconductor Device App 20080213984 - MORIWAKA; Tomoaki | 2008-09-04 |
Method Of Crystallizing Semiconductor Film And Method Of Manufacturing Semiconductor Device App 20080214021 - TANAKA; Koichiro ;   et al. | 2008-09-04 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device Grant 7,418,172 - Tanaka , et al. August 26, 2 | 2008-08-26 |
Method for manufacturing crystalline semiconductor film and semiconductor device App 20080171410 - Moriwaka; Tomoaki ;   et al. | 2008-07-17 |
Laser irradiation method, method for manufacturing semiconductor device, and laser irradiation system Grant 7,387,922 - Tanaka , et al. June 17, 2 | 2008-06-17 |
Method of manufacturing semiconductor device App 20080026543 - Miyairi; Hidekazu ;   et al. | 2008-01-31 |
Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device App 20080011968 - Tanaka; Koichiro ;   et al. | 2008-01-17 |
Crystalline semiconductor film, semiconductor device, and method for manufacturing thereof App 20070222038 - Moriwaka; Tomoaki | 2007-09-27 |
Method of fabricating semiconductor device App 20070141816 - Miyairi; Hidekazu ;   et al. | 2007-06-21 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device App 20070111348 - Moriwaka; Tomoaki | 2007-05-17 |
Semiconductor device and manufacturing method thereof App 20070087488 - Moriwaka; Tomoaki | 2007-04-19 |
Optical component and laser irradiation apparatus Grant 7,187,507 - Oishi , et al. March 6, 2 | 2007-03-06 |
Method of fabricating semiconductor device Grant 7,179,699 - Miyairi , et al. February 20, 2 | 2007-02-20 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device Grant 7,169,630 - Moriwaka January 30, 2 | 2007-01-30 |
Laser treatment device, laser treatment method, and semiconductor device fabrication method App 20070017907 - Tanaka; Koichiro ;   et al. | 2007-01-25 |
Beam homogenizer and laser irradiation apparatus App 20060222041 - Moriwaka; Tomoaki | 2006-10-05 |
Laser treatment device, laser treatment method, and semiconductor device fabrication method Grant 7,112,517 - Tanaka , et al. September 26, 2 | 2006-09-26 |
Method of manufacturing a semiconductor device by providing a mirror in the attenuation region Grant 7,078,281 - Tanaka , et al. July 18, 2 | 2006-07-18 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device App 20050079645 - Moriwaka, Tomoaki | 2005-04-14 |
Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device App 20050055016 - Tanaka, Koichiro ;   et al. | 2005-03-10 |
Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device App 20050035104 - Tanaka, Koichiro ;   et al. | 2005-02-17 |
Method of fabricating semiconductor device App 20050020096 - Miyairi, Hidekazu ;   et al. | 2005-01-27 |
Method of fabricating semiconductor device Grant 6,841,434 - Miyairi , et al. January 11, 2 | 2005-01-11 |
Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device App 20040266223 - Tanaka, Koichiro ;   et al. | 2004-12-30 |
Optical component and laser irradiation apparatus App 20040240086 - Oishi, Hirotada ;   et al. | 2004-12-02 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device App 20040213514 - Tanaka, Koichiro ;   et al. | 2004-10-28 |
Laser irradiation apparatus, laser irradiation method, and manufacturing method for a semiconductor device App 20040214388 - Tanaka, Koichiro ;   et al. | 2004-10-28 |
Laser irradiation method, method for manufacturing semiconductor device, and laser irradiation system App 20040140297 - Tanaka, Koichiro ;   et al. | 2004-07-22 |
Laser irradiation apparatus, laser irradiation method, and manufacturing method for a semiconductor device Grant 6,765,175 - Tanaka , et al. July 20, 2 | 2004-07-20 |
Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device Grant 6,750,423 - Tanaka , et al. June 15, 2 | 2004-06-15 |
Method of fabricating semiconductor device App 20030219935 - Miyairi, Hidekazu ;   et al. | 2003-11-27 |
Laser irradiation apparatus, laser irradiation method, and manufacturing method for a semiconductor device App 20030141287 - Tanaka, Koichiro ;   et al. | 2003-07-31 |
Laser treatment device, laser treatment method, and semiconductor device fabrication method App 20030100169 - Tanaka, Koichiro ;   et al. | 2003-05-29 |
Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device App 20030080099 - Tanaka, Koichiro ;   et al. | 2003-05-01 |
Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device App 20030058916 - Tanaka, Koichiro ;   et al. | 2003-03-27 |
Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device App 20030042430 - Tanaka, Koichiro ;   et al. | 2003-03-06 |