Morita; Akihiko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Morita; Akihiko.The latest application filed is for "filter coupling device and a substrate treating apparatus having same".

Company Profile

0.18.12

Morita; Akihiko - Kyoto JP
MORITA; Akihiko - Kyoto-shi JP
Morita; Akihiko - Shimogyo-ku N/A JP
Morita; Akihiko - Tokyo JP
Morita; Akihiko - Kamikyo-ku JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Filter coupling device and a substrate treating apparatus having same Grant 10,617,983 - Kashiyama , et al.	2020-04-14
Filter Coupling Device And A Substrate Treating Apparatus Having Same App 20170120173 - KASHIYAMA; Masahito ; et al.	2017-05-04
Exposure device, substrate processing apparatus, method for exposing substrate and substrate processing method Grant 9,152,054 - Nishimura , et al. October 6, 2	2015-10-06
Substrate Cleaning And Drying Method And Substrate Developing Method App 20140261571 - GOTO; Tomohiro ; et al.	2014-09-18
Substrate heat treatment apparatus Grant 8,608,885 - Goto , et al. December 17, 2	2013-12-17
Exposure Device, Substrate Processing Apparatus, Method For Exposing Substrate And Substrate Processing Method App 20130258299 - NISHIMURA; Kazuhiro ; et al.	2013-10-03
Substrate transport apparatus and heat treatment apparatus Grant 8,383,990 - Morita , et al. February 26, 2	2013-02-26
Substrate heat treatment apparatus Grant 8,003,919 - Goto , et al. August 23, 2	2011-08-23
Substrate Transport Apparatus And Heat Treatment Apparatus App 20090060686 - Morita; Akihiko ; et al.	2009-03-05
Substrate heat treatment apparatus Grant 7,432,476 - Morita , et al. October 7, 2	2008-10-07
Remote order acceptance design system and elevator remote order acceptance method Grant 7,359,840 - Akasaka , et al. April 15, 2	2008-04-15
Remote order acceptance design system and elevator remote order acceptance method App 20070250199 - Akasaka; Shingo ; et al.	2007-10-25
Remote order acceptance design system and elevator remote order acceptance method Grant 7,249,250 - Akasaka , et al. July 24, 2	2007-07-24
Substrate Heat Treatment Apparatus App 20070128570 - Goto; Shigehiro ; et al.	2007-06-07
Substrate Heat Treatment Apparatus App 20070128888 - Goto; Shigehiro ; et al.	2007-06-07
Substrate heat treatment apparatus App 20060289432 - Morita; Akihiko ; et al.	2006-12-28
Chemical pump and method of discharging chemical solution Grant 7,048,801 - Morita May 23, 2	2006-05-23
Developing apparatus and developing method Grant 6,869,234 - Sanada , et al. March 22, 2	2005-03-22
Chemical pump and method of discharging chemical solution App 20040170772 - Morita, Akihiko	2004-09-02
Developing apparatus and developing method App 20040028403 - Sanada, Masakazu ; et al.	2004-02-12
Diaphragm valve, substrate processing unit and substrate processing apparatus App 20030111178 - Morita, Akihiko	2003-06-19
Substrate cleaning apparatus and method Grant 6,286,525 - Nishimura , et al. September 11, 2	2001-09-11
Substrate cleaning apparatus and method Grant 6,260,562 - Morinishi , et al. July 17, 2	2001-07-17
Substrate processing apparatus having regulated power consumption and method therefor Grant 6,060,697 - Morita , et al. May 9, 2	2000-05-09
Substrate processing apparatus, substrate transport apparatus and substrate transfer apparatus Grant 6,051,101 - Ohtani , et al. April 18, 2	2000-04-18
Substrate spin treating method and apparatus Grant 5,853,483 - Morita , et al. December 29, 1	1998-12-29

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