loadpatents
Patent applications and USPTO patent grants for Morishima; Masato.The latest application filed is for "method for processing workpiece".
Patent | Date |
---|---|
Method for processing workpiece Grant 10,763,106 - Ouchi , et al. Sep | 2020-09-01 |
Plasma electrode and plasma processing device Grant 10,600,621 - Morishima , et al. | 2020-03-24 |
Method For Processing Workpiece App 20190189437 - OUCHI; Kenji ;   et al. | 2019-06-20 |
Plasma Electrode And Plasma Processing Device App 20190108984 - MORISHIMA; Masato ;   et al. | 2019-04-11 |
Film forming method and film forming apparatus Grant 9,926,624 - Yamada , et al. March 27, 2 | 2018-03-27 |
Film Forming Method And Film Forming Apparatus App 20150368802 - YAMADA; Kazuki ;   et al. | 2015-12-24 |
Refrigerant compressor Grant 9,051,937 - Kubota , et al. June 9, 2 | 2015-06-09 |
Substrate Processing Apparatus And Substrate Processing Method App 20150132960 - Nishimura; Eiichi ;   et al. | 2015-05-14 |
Film Forming Device App 20140373783 - SAWADA; Ikuo ;   et al. | 2014-12-25 |
Sealed Compressor App 20130266459 - MORISHIMA; Masato ;   et al. | 2013-10-10 |
Refrigerant Compressor App 20130121809 - KUBOTA; Akihiko ;   et al. | 2013-05-16 |
Film Formation Apparatus App 20120247390 - Sawada; Ikuo ;   et al. | 2012-10-04 |
Process gas introducing mechanism and plasma processing device Grant 8,191,505 - Kamaishi , et al. June 5, 2 | 2012-06-05 |
Substrate Processing Apparatus And Substrate Processing Method App 20100206846 - Nishimura; Eiichi ;   et al. | 2010-08-19 |
Process gas introducing mechanism and plasma processing device App 20090260762 - Kamaishi; Takayuki ;   et al. | 2009-10-22 |
Method for manufacturing a fin field effect transistor App 20080132077 - Morishima; Masato | 2008-06-05 |
Film formation method App 20060127601 - Murakami; Seishi ;   et al. | 2006-06-15 |
Process gas introducing mechanism and plasma processing device App 20060060141 - Kamaishi; Takayuki ;   et al. | 2006-03-23 |
Worktable device, film formation apparatus, and film formation method for semiconductor process App 20050257747 - Wakabayashi, Satoshi ;   et al. | 2005-11-24 |
CVD method App 20010021414 - Morishima, Masato ;   et al. | 2001-09-13 |
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