Morisada; Masahiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Morisada; Masahiro.The latest application filed is for "anti-vibration technique".

Company Profile

0.13.10

Morisada; Masahiro - Utsunomiya JP
Morisada; Masahiro - Tochigi JP
Morisada; Masahiro - Utsunomiya-shi JP
Morisada; Masahiro - Tokyo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Stage control apparatus and method, stage apparatus and exposure apparatus Grant 7,342,645 - Morisada March 11, 2	2008-03-11
Active damping apparatus, exposure apparatus and device manufacturing method Grant 7,264,235 - Morisada September 4, 2	2007-09-04
Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method Grant 7,119,879 - Morisada October 10, 2	2006-10-10
Anti-vibration technique App 20060206237 - Morisada; Masahiro	2006-09-14
Stage control apparatus and method, stage apparatus and exposure apparatus App 20060176464 - Morisada; Masahiro	2006-08-10
Anti-vibration technique Grant 7,069,114 - Morisada June 27, 2	2006-06-27
Anti-vibration technique Grant 7,024,284 - Morisada April 4, 2	2006-04-04
Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method App 20060044537 - Morisada; Masahiro	2006-03-02
Anti-vibration technique App 20060036352 - Morisada; Masahiro	2006-02-16
Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method Grant 6,975,383 - Morisada December 13, 2	2005-12-13
Active damping apparatus, exposure apparatus and device manufacturing method App 20050217956 - Morisada, Masahiro	2005-10-06
Active damping apparatus, exposure apparatus and device manufacturing method Grant 6,937,317 - Morisada August 30, 2	2005-08-30
Stage control apparatus, exposure apparatus, and device manufacturing method Grant 6,903,806 - Morisada June 7, 2	2005-06-07
Anti-vibration technique App 20050119795 - Morisada, Masahiro	2005-06-02
Active anti-vibration apparatus and exposure apparatus and device manufacturing method using the same Grant 6,864,962 - Morisada March 8, 2	2005-03-08
Active damping apparatus, exposure apparatus and device manufacturing method App 20030197845 - Morisada, Masahiro	2003-10-23
Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method App 20030164930 - Morisada, Masahiro	2003-09-04
Stage control apparatus, exposure apparatus, and device manufacturing method App 20030147062 - Morisada, Masahiro	2003-08-07
Active anti-vibration apparatus and exposure apparatus and device manufacturing method using the same App 20020140921 - Morisada, Masahiro	2002-10-03
Scanning type exposure apparatus, position control apparatus, and method therefor Grant 6,160,612 - Itoh , et al. December 12, 2	2000-12-12
Device and method comprising a motor and/or a digital signal processor, means for supplying signals of a plurality of channels in serial form, or means for causing an actuator to abut an object Grant 5,612,602 - Kubota , et al. March 18, 1	1997-03-18
Adaptive apparatus Grant 5,305,193 - Shinnaka , et al. April 19, 1	1994-04-19
Servo control system for controlling tracking of an optical head on an optical disk Grant 5,233,586 - Morisada August 3, 1	1993-08-03

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