Morioka; Ikuhisa
Patent Applications and Registrations
Patent applications and USPTO patent grants for Morioka; Ikuhisa.The latest application filed is for "electrostatic chuck assembly, electrostatic chuck, and focus ring".
- Morioka; Ikuhisa - Handa JP
- MORIOKA; Ikuhisa - Handa-City JP
- Morioka; Ikuhisa - Handa-Shi JP
| Patent | Date |
|---|---|
| Electrostatic chuck and method for manufacturing the same Grant 11,282,734 - Kuno , et al. March 22, 2 | 2022-03-22 |
| Electrostatic Chuck Assembly, Electrostatic Chuck, And Focus Ring App 20200251371 - Kind Code | 2020-08-06 |
| Electrostatic Chuck And Method For Manufacturing The Same App 20200126837 - Kuno; Tatsuya ; et al. | 2020-04-23 |
| Electrostatic chuck with heater and manufacturing method thereof Grant 8,136,820 - Morioka , et al. March 20, 2 | 2012-03-20 |
| Heating device Grant 7,763,831 - Morioka , et al. July 27, 2 | 2010-07-27 |
| Electrostatic chuck Grant 7,576,967 - Morioka , et al. August 18, 2 | 2009-08-18 |
| Heating Apparatus App 20090159588 - Morioka; Ikuhisa ; et al. | 2009-06-25 |
| Heating Device App 20080142501 - MORIOKA; Ikuhisa ; et al. | 2008-06-19 |
| Electrostatic Chuck App 20080062612 - MORIOKA; Ikuhisa ; et al. | 2008-03-13 |
| Electrostatic Chuck With Heater And Manufacturing Method Thereof App 20080049374 - Morioka; Ikuhisa ; et al. | 2008-02-28 |
| Electrostatic Chuck App 20070223175 - Morioka; Ikuhisa ; et al. | 2007-09-27 |
| Electrostatic Chuck App 20070146961 - Morioka; Ikuhisa ; et al. | 2007-06-28 |
| Electrostatic adsorption device Grant 6,728,091 - Tsuruta , et al. April 27, 2 | 2004-04-27 |
| Electrostatic adsorption device App 20030059627 - Tsuruta, Hideyoshi ; et al. | 2003-03-27 |
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