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Substrate processing apparatus and recording medium Grant 10,978,361 - Sasaki , et al. April 13, 2 | 2021-04-13 |
Method of manufacturing semiconductor device Grant 10,714,316 - Kamakura , et al. | 2020-07-14 |
Substrate Processing Apparatus And Recording Medium App 20200098653 - SASAKI; Takafumi ;   et al. | 2020-03-26 |
Method of manufacturing semiconductor device Grant 10,424,520 - Sasaki , et al. Sept | 2019-09-24 |
Method Of Manufacturing Semiconductor Device App 20190244790 - KAMAKURA; Tsukasa ;   et al. | 2019-08-08 |
Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device Grant 9,502,236 - Hirochi , et al. November 22, 2 | 2016-11-22 |
Substrate processing apparatus Grant 9,487,863 - Matsui , et al. November 8, 2 | 2016-11-08 |
Substrate Processing Apparatus App 20160230280 - MATSUI; Shun ;   et al. | 2016-08-11 |
Reaction tube, substrate processing apparatus, and method of manufacturing semiconductor device Grant 9,412,582 - Sasaki , et al. August 9, 2 | 2016-08-09 |
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium Grant 9,163,309 - Yamamoto , et al. October 20, 2 | 2015-10-20 |
Reaction Tube, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device App 20150270125 - SASAKI; Takafumi ;   et al. | 2015-09-24 |
Substrate processing apparatus including shielding unit for suppressing leakage of magnetic field Grant 9,084,298 - Hirochi , et al. July 14, 2 | 2015-07-14 |
Substrate Processing Apparatus, Non-transitory Computer-readable Recording Medium And Method Of Manufacturing Semiconductor Device App 20150194304 - Hirochi; Yukitomo ;   et al. | 2015-07-09 |
Substrate Processing Apparatus, Non-Transitory Computer-Readable Recording Medium and Method of Manufacturing Semiconductor Device App 20150194306 - HIROCHI; Yukitomo ;   et al. | 2015-07-09 |
Heat treatment apparatus Grant 9,074,284 - Fukuda , et al. July 7, 2 | 2015-07-07 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,070,554 - Toyoda , et al. June 30, 2 | 2015-06-30 |
Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device Grant 9,064,695 - Hirochi , et al. June 23, 2 | 2015-06-23 |
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20150093916 - YAMAMOTO; Tetsuo ;   et al. | 2015-04-02 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20150093913 - TOYODA; Kazuyuki ;   et al. | 2015-04-02 |
Substrate Processing Apparatus, Semiconductor Device Manufacturing Method And Substrate Manufacturing Method App 20110306212 - SATO; Akihiro ;   et al. | 2011-12-15 |
Semiconductor processing apparatus App 20110253049 - Fukuda; Masanao ;   et al. | 2011-10-20 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device And Method Of Manufacturing Substrate App 20110210118 - HIROCHI; Yukitomo ;   et al. | 2011-09-01 |
Heat Treatment Apparatus And Method Of Heat Treatment App 20100282166 - FUKUDA; Masanao ;   et al. | 2010-11-11 |
Heat Treatment Apparatus App 20100275848 - Fukuda; Masanao ;   et al. | 2010-11-04 |
Semiconductor processing apparatus App 20090029561 - Fukuda; Masanao ;   et al. | 2009-01-29 |
Substrate processing apparatus, substrate holder, and manufacturing method of semiconductor device Grant 7,455,734 - Yamaguchi , et al. November 25, 2 | 2008-11-25 |
Semiconductor device producing apparatus and producing method of semiconductor device Grant 7,198,447 - Morimitsu , et al. April 3, 2 | 2007-04-03 |
Substrate treatment apparatus, substrate holding device, and semiconductor device manufacturing method App 20070007646 - Yamaguchi; Takatomo ;   et al. | 2007-01-11 |
Heat treatment apparatus and method for processing substrates Grant 6,737,613 - Yamaguchi , et al. May 18, 2 | 2004-05-18 |
Heat treatment apparatus and method for processing substrates App 20030183614 - Yamaguchi, Takatomo ;   et al. | 2003-10-02 |
Substrate processing apparatus and method for manufacturing a semiconductor device App 20020012581 - Odake, Shigeru ;   et al. | 2002-01-31 |