loadpatents
Patent applications and USPTO patent grants for MORIKAWA; Yasuhiro.The latest application filed is for "silicon dry etching method".
Patent | Date |
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Silicon Dry Etching Method App 20220044938 - DOI; Kenta ;   et al. | 2022-02-10 |
Filling Packaging Machine, Content Filling Container, And Manufacturing Method Therefor App 20220002017 - Morikawa; Yasuhiro ;   et al. | 2022-01-06 |
Method Of Processing Wiring Substrate App 20200315021 - SATO; Muneyuki ;   et al. | 2020-10-01 |
Plasma processing device Grant 10,079,133 - Murayama , et al. September 18, 2 | 2018-09-18 |
Plasma Processing Device App 20170316917 - MURAYAMA; Takahide ;   et al. | 2017-11-02 |
Plasma Etching Apparatus App 20150200078 - MORIKAWA; Yasuhiro | 2015-07-16 |
Etching method Grant 8,993,449 - Morikawa , et al. March 31, 2 | 2015-03-31 |
Plasma Etching Apparatus App 20120186746 - Morikawa; Yasuhiro | 2012-07-26 |
Etching Method App 20120171869 - Morikawa; Yasuhiro ;   et al. | 2012-07-05 |
Etching method and system Grant 8,153,926 - Morikawa , et al. April 10, 2 | 2012-04-10 |
Semiconductor device and etching apparatus Grant 8,125,069 - Hayashi , et al. February 28, 2 | 2012-02-28 |
Plasma Processing Method and Plasma Processing Apparatus App 20110180388 - Morikawa; Yasuhiro ;   et al. | 2011-07-28 |
Plasma Processing Method App 20110117742 - Morikawa; Yasuhiro ;   et al. | 2011-05-19 |
Semiconductor Device And Method For Manufacturing The Same, Dry-etching Process, Method For Making Electrical Connections, And Etching Apparatus App 20100270654 - HAYASHI; Toshio ;   et al. | 2010-10-28 |
Method For Dry Etching Interlayer Insulating Film App 20100219158 - Morikawa; Yasuhiro ;   et al. | 2010-09-02 |
Etching Method And System App 20100203737 - MORIKAWA; Yasuhiro ;   et al. | 2010-08-12 |
Dry Etching Apparatus And Dry Etching Method App 20100133235 - Morikawa; Yasuhiro ;   et al. | 2010-06-03 |
Dry Etching Method App 20100133233 - Morikawa; Yasuhiro ;   et al. | 2010-06-03 |
Etching method and system Grant 7,728,252 - Morikawa , et al. June 1, 2 | 2010-06-01 |
Dry Etching Method App 20100062606 - Morikawa; Yasuhiro ;   et al. | 2010-03-11 |
Dry Etching Method App 20090277873 - Morikawa; Yasuhiro ;   et al. | 2009-11-12 |
Apparatus And Method For Dry Etching App 20090261066 - Morikawa; Yasuhiro ;   et al. | 2009-10-22 |
Semiconductor device and method for manufacturing the same, dry-etching process, method for making electrical connections, and etching apparatus App 20090102025 - Hayashi; Toshio ;   et al. | 2009-04-23 |
Shoe that fits to a foot with belts Grant 7,380,354 - Yamashita , et al. June 3, 2 | 2008-06-03 |
Wrestling shoe with separated outer soles Grant 7,325,336 - Yamashita , et al. February 5, 2 | 2008-02-05 |
Shoe with slip preventive member Grant 7,322,131 - Yamashita , et al. January 29, 2 | 2008-01-29 |
Ethcing method and system App 20070166844 - Morikawa; Yasuhiro ;   et al. | 2007-07-19 |
Shoe with slip preventive member App 20060059716 - Yamashita; Yoshio ;   et al. | 2006-03-23 |
Shoe that fits to a foot with belts App 20050115111 - Yamashita, Yoshio ;   et al. | 2005-06-02 |
Wrestling shoe with separated outer soles App 20050108901 - Yamashita, Yoshio ;   et al. | 2005-05-26 |
Method for etching organic film, method for fabricating semiconductor device and pattern formation method Grant 6,828,247 - Nakagawa , et al. December 7, 2 | 2004-12-07 |
Method for etching organic film, method for fabricating semiconductor device and pattern formation method App 20020197747 - Nakagawa, Hideo ;   et al. | 2002-12-26 |
Method for etching organic film, method for fabricating semiconductor device and pattern formation method App 20010049150 - Nakagawa, Hideo ;   et al. | 2001-12-06 |
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