| Patent | Date |
|---|
Substrate Processing Apparatus And Substrate Processing Method
App 20220154342 - Morikawa; Katsuhiro ; et al. | 2022-05-19 |
Substrate Processing Method And Substrate Processing Apparatus
App 20220130691 - TACHIBANA; Kouzou ; et al. | 2022-04-28 |
Substrate Processing Apparatus And Substrate Processing Method
App 20220056590 - Morita; Satoshi ; et al. | 2022-02-24 |
Substrate transfer device and substrate transfer method
Grant 11,244,849 - Morikawa , et al. February 8, 2 | 2022-02-08 |
Substrate Processing Method
App 20220020611 - Tachibana; Kouzou ; et al. | 2022-01-20 |
Substrate processing apparatus
Grant 11,208,725 - Mizunaga , et al. December 28, 2 | 2021-12-28 |
Substrate transfer device and substrate transfer method
Grant 11,097,907 - Morikawa August 24, 2 | 2021-08-24 |
Drying Apparatus, Substrate Processing System, And Drying Method
App 20200365425 - MORIKAWA; Katsuhiro | 2020-11-19 |
Substrate Processing Apparatus And Substrate Processing Method
App 20200312678 - Morikawa; Katsuhiro ; et al. | 2020-10-01 |
Substrate Transfer Device and Substrate Transfer Method
App 20200172351 - MORIKAWA; Katsuhiro | 2020-06-04 |
Substrate Processing Apparatus
App 20200107404 - Morita; Satoshi ; et al. | 2020-04-02 |
Substrate Processing Apparatus And Substrate Processing Method
App 20200105574 - Morita; Satoshi ; et al. | 2020-04-02 |
Substrate Processing Apparatus
App 20200102654 - Mizunaga; Kouichi ; et al. | 2020-04-02 |
Substrate Processing Apparatus
App 20200105550 - Morikawa; Katsuhiro ; et al. | 2020-04-02 |
Substrate Transfer Device And Substrate Transfer Method
App 20200013666 - Morikawa; Katsuhiro ; et al. | 2020-01-09 |
Substrate transfer device and substrate transfer method
Grant 10,460,976 - Morikawa , et al. Oc | 2019-10-29 |
Substrate transfer method and storage medium
Grant 10,128,138 - Morikawa , et al. November 13, 2 | 2018-11-13 |
Substrate processing apparatus, method for correcting positional displacement, and storage medium
Grant 10,042,356 - Iida , et al. August 7, 2 | 2018-08-07 |
Substrate Transfer Device And Substrate Transfer Method
App 20170358479 - Morikawa; Katsuhiro ; et al. | 2017-12-14 |
Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport container
Grant 9,773,690 - Morikawa , et al. September 26, 2 | 2017-09-26 |
Substrate processing apparatus, method of operating substrate processing apparatus, and storage medium
Grant 9,696,262 - Morikawa , et al. July 4, 2 | 2017-07-04 |
Substrate Transfer Method And Storage Medium
App 20170178935 - Morikawa; Katsuhiro ; et al. | 2017-06-22 |
Substrate processing apparatus
Grant 9,666,463 - Morikawa , et al. May 30, 2 | 2017-05-30 |
Substrate transfer apparatus, substrate transfer method, and storage medium
Grant 9,627,238 - Morikawa , et al. April 18, 2 | 2017-04-18 |
Substrate transfer device, substrate processing apparatus, and substrate accommodation method
Grant 9,373,531 - Murata , et al. June 21, 2 | 2016-06-21 |
Substrate Processing Apparatus, Substrate Processing System, And Method Of Detecting Abnormality In Transport Container
App 20160172225 - MORIKAWA; Katsuhiro ; et al. | 2016-06-16 |
Substrate Processing Apparatus, Method Of Operating Substrate Processing Apparatus, And Storage Medium
App 20150300960 - MORIKAWA; Katsuhiro ; et al. | 2015-10-22 |
Substrate Processing Apparatus, Method For Correcting Positional Displacement, And Storage Medium
App 20150235888 - IIDA; Naruaki ; et al. | 2015-08-20 |
Substrate Processing Apparatus
App 20150187621 - Morikawa; Katsuhiro ; et al. | 2015-07-02 |
Substrate Transfer Device, Substrate Processing Apparatus, And Substrate Accommodation Method
App 20140234058 - Murata; Akira ; et al. | 2014-08-21 |
Substrate Transfer Apparatus, Substrate Transfer Method, And Storage Medium
App 20140178162 - Morikawa; Katsuhiro ; et al. | 2014-06-26 |
Substrate transfer method and substrate transfer apparatus
Grant 8,554,360 - Morikawa October 8, 2 | 2013-10-08 |
Device and method for supporting a substrate
Grant 8,528,889 - Nakano , et al. September 10, 2 | 2013-09-10 |
Substrate transfer method and apparatus
Grant 8,441,618 - Nakaharada , et al. May 14, 2 | 2013-05-14 |
Interference Filter Assembly
App 20120154914 - Moriguchi; Chihiro ; et al. | 2012-06-21 |
Substrate Transfer Method And Substrate Transfer Apparatus
App 20110257783 - MORIKAWA; Katsuhiro | 2011-10-20 |
Substrate transfer method and substrate transfer apparatus
Grant 7,987,019 - Morikawa July 26, 2 | 2011-07-26 |
Substrate Transfer Method And Apparatus
App 20100321648 - NAKAHARADA; Masahiro ; et al. | 2010-12-23 |
Device And Method For Supporting A Substrate
App 20100243168 - Nakano; Seiji ; et al. | 2010-09-30 |
Radar device
Grant 7,602,477 - Nakamura , et al. October 13, 2 | 2009-10-13 |
Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus
Grant 7,563,042 - Nakaharada , et al. July 21, 2 | 2009-07-21 |
Radar device for transmitting radio signal over angular scanning field
Grant 7,528,766 - Yamaguchi , et al. May 5, 2 | 2009-05-05 |
Radar device for transmitting radio signal over angular scanning field
App 20080204304 - Yamaguchi; Kazuhiko ; et al. | 2008-08-28 |
Substrate carrying apparatus, sustrate carrying method, and coating and developing apparatus
App 20070195297 - Nakaharada; Masahiro ; et al. | 2007-08-23 |
Substrate Transfer Method And Substrate Transfer Apparatus
App 20070128008 - Morikawa; Katsuhiro | 2007-06-07 |
Vehicle radar device
Grant 7,158,217 - Hoashi , et al. January 2, 2 | 2007-01-02 |
Radar device
App 20050200833 - Nakamura, Mitsuo ; et al. | 2005-09-15 |
Vehicle radar device
App 20040169840 - Hoashi, Yoshiaki ; et al. | 2004-09-02 |
Time measurement apparatus, distance measurement apparatus, and clock signal generating apparatus usable therein
Grant 6,757,054 - Watanabe , et al. June 29, 2 | 2004-06-29 |
Distance measurement apparatus
Grant 6,710,859 - Shirai , et al. March 23, 2 | 2004-03-23 |
Method and apparatus for measuring distance to a detection object
Grant 6,665,056 - Shirai , et al. December 16, 2 | 2003-12-16 |
Distance measurement apparatus
Grant 6,657,704 - Shirai , et al. December 2, 2 | 2003-12-02 |
Time measurement apparatus, distance measurement apparatus, and clock signal generating apparatus usable therein
App 20030197498 - Watanabe, Takamoto ; et al. | 2003-10-23 |
Distance measurement apparatus
Grant 6,628,374 - Shirai , et al. September 30, 2 | 2003-09-30 |
Method and apparatus for measuring distance to a detection object
App 20030103197 - Shirai, Noriaki ; et al. | 2003-06-05 |
Road-shape recognition system
Grant 6,567,039 - Shirai , et al. May 20, 2 | 2003-05-20 |
Method and apparatus for recognizing shape of road
Grant 6,553,283 - Shirai , et al. April 22, 2 | 2003-04-22 |
Distance measurement apparatus
App 20020186362 - Shirai, Noriaki ; et al. | 2002-12-12 |
Traveling-path estimation apparatus for vehicle
Grant 6,466,863 - Shirai , et al. October 15, 2 | 2002-10-15 |
Time measurement apparatus, distance measurement apparatus, and clock signal generating apparatus usable therein
App 20020131035 - Watanabe, Takamoto ; et al. | 2002-09-19 |
Road-shape recognition system
App 20020044080 - Shirai, Noriaki ; et al. | 2002-04-18 |
Traveling-path estimation apparatus for vehicle
App 20010053955 - Shirai, Noriaki ; et al. | 2001-12-20 |
Method of selecting a preceding vehicle, a preceding vehicle selecting apparatus, and a recording medium for selecting a preceding vehicle
App 20010037165 - Shirai, Noriaki ; et al. | 2001-11-01 |
Obstacle recognition system for vehicle
App 20010026238 - Shirai, Noriaki ; et al. | 2001-10-04 |
Method and apparatus for recognizing shape of road
App 20010025211 - Shirai, Noriaki ; et al. | 2001-09-27 |
Method and apparatus for recognizing shape of road
App 20010020201 - Shirai, Noriaki ; et al. | 2001-09-06 |
Obstacle detecting system for automotive vehicle
Grant 6,147,637 - Morikawa , et al. November 14, 2 | 2000-11-14 |
| 