Morikawa; Haruo
Patent Applications and Registrations
Patent applications and USPTO patent grants for Morikawa; Haruo.The latest application filed is for "reaction tube structure and substrate processing apparatus".
- Morikawa; Haruo - Toyama JP
- MORIKAWA; Haruo - Toyama-shi JP
| Patent | Date |
|---|---|
| Reaction tube structure and substrate processing apparatus Grant 11,359,283 - Marubayashi , et al. June 14, 2 | 2022-06-14 |
| Reaction Tube Structure And Substrate Processing Apparatus App 20180142353 - MARUBAYASHI; Tetsuya ; et al. | 2018-05-24 |
| Substrate processing method and film forming method Grant 8,507,296 - Ueno , et al. August 13, 2 | 2013-08-13 |
| Substrate processing apparatus and substrate processing method Grant 8,501,599 - Ueno , et al. August 6, 2 | 2013-08-06 |
| Substrate processing method and film forming method App 20090197352 - Ueno; Masaaki ; et al. | 2009-08-06 |
| Substrate Processing Apparatus and Substrate Processing Method App 20090029486 - Ueno; Masaaki ; et al. | 2009-01-29 |
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