Mori; Glen T.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mori; Glen T..The latest application filed is for "erosion resistant metal fluoride coatings, methods of preparation and methods of use thereof".

Company Profile

1.14.18

Mori; Glen T. - Gilroy CA
Mori; Glen T. - Pacifica CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Erosion Resistant Metal Fluoride Coatings, Methods Of Preparation And Methods Of Use Thereof App 20220181124 - Duan; Ren-Guan ; et al.	2022-06-09
Methods and apparatus for backside via reveal processing Grant 11,289,387 - Lianto , et al. March 29, 2	2022-03-29
Methods And Apparatus For Backside Via Reveal Processing App 20220037216 - LIANTO; Prayudi ; et al.	2022-02-03
Methods And Apparatus For Processing A Substrate App 20210166953 - HSIUNG; Chien-Kang ; et al.	2021-06-03
Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications Grant 10,629,430 - Wong , et al.	2020-04-21
Variable Frequency Microwave (vfm) Processes And Applications In Semiconductor Thin Film Fabrications App 20180240666 - WONG; Loke Yuen ; et al.	2018-08-23
Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications Grant 9,960,035 - Wong , et al. May 1, 2	2018-05-01
Structure and method of fabricating three-dimensional (3D) metal-insulator-metal (MIM) capacitor and resistor in semi-additive plating metal wiring Grant 9,954,051 - See , et al. April 24, 2	2018-04-24
Variable Frequency Microwave (vfm) Processes And Applications In Semiconductor Thin Film Fabrications App 20170117146 - WONG; Loke Yuen ; et al.	2017-04-27
Structure And Method Of Fabricating Three-dimensional (3d) Metal-insulator-metal (mim) Capacitor And Resistor In Semi-additive Plating Metal Wiring App 20170104056 - SEE; Guan Huei ; et al.	2017-04-13
Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications Grant 9,548,200 - Wong , et al. January 17, 2	2017-01-17
In situ chamber clean with inert hydrogen helium mixture during wafer process Grant 9,269,562 - Dinsmore , et al. February 23, 2	2016-02-23
Methods and apparatus for cleaning a substrate Grant 9,177,782 - Holden , et al. November 3, 2	2015-11-03
Integrated processing of porous dielectric, polymer-coated substrates and epoxy within a multi-chamber vacuum system confirmation Grant 9,171,714 - Mori , et al. October 27, 2	2015-10-27
Finned shutter disk for a substrate process chamber Grant 9,147,558 - Chia , et al. September 29, 2	2015-09-29
Boron ionization for aluminum oxide etch enhancement Grant 9,051,655 - Wu , et al. June 9, 2	2015-06-09
Boron Ionization For Aluminum Oxide Etch Enhancement App 20150076110 - WU; Kai ; et al.	2015-03-19
Variable Frequency Microwave (vfm) Processes And Applications In Semiconductor Thin Film Fabrications App 20150056819 - WONG; Loke Yuen ; et al.	2015-02-26
Methods And Apparatus For Cleaning A Substrate App 20140251374 - HOLDEN; JAMES MATTHEW ; et al.	2014-09-11
In Situ Chamber Clean With Inert Hydrogen Helium Mixture During Wafer Process App 20140196746 - Dinsmore; Robert ; et al.	2014-07-17
Finned Shutter Disk For A Substrate Process Chamber App 20140196848 - CHIA; BONNIE T. ; et al.	2014-07-17
Integrated Processing Of Porous Dielectric, Polymer-coated Substrates And Epoxy Within A Multi-chamber Vacuum System Confirmation App 20140068962 - MORI; GLEN T. ; et al.	2014-03-13
Pre-treatment to eliminate the defects formed during electrochemical plating App 20070080067 - Gu; Haiyang ; et al.	2007-04-12
Chamber having components with textured surfaces and method of manufacture Grant 6,933,025 - Lin , et al. August 23, 2	2005-08-23
Contact ring spin during idle time and deplate for defect reduction App 20040222101 - Ajmera, Hiral M. ; et al.	2004-11-11
Chamber having components with textured surfaces and method of manufacture App 20040180158 - Lin, Shyh-Nung ; et al.	2004-09-16
Chamber components having textured surfaces and method of manufacture Grant 6,777,045 - Lin , et al. August 17, 2	2004-08-17
Metal deposition process with pre-cleaning before electrochemical deposition App 20040118697 - Wen+, Mei ; et al.	2004-06-24
Process chamber components having textured internal surfaces and method of manufacture App 20030026917 - Lin, Shyh-Nung ; et al.	2003-02-06
Method and apparatus for reducing target arcing during sputter deposition Grant 6,416,634 - Mostovoy , et al. July 9, 2	2002-07-09

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