Morey; Ian J.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Morey; Ian J..The latest application filed is for "convertible hot edge ring to improve low-k dielectric etch".

Company Profile

0.8.4

Morey; Ian J. - Singapore SG
Morey; Ian J. - San Jose CA
Morey, Ian J. - Singapor SG
Morey, Ian J - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Unique process chemistry for etching organic low-k materials Grant 6,841,483 - Zhu , et al. January 11, 2	2005-01-11
Post-etch photoresist strip with O2 and NH3 for organosilicate glass low-K dielectric etch applications Grant 6,777,344 - Annapragada , et al. August 17, 2	2004-08-17
Technique for etching a low capacitance dielectric layer Grant 6,696,366 - Morey , et al. February 24, 2	2004-02-24
Convertible hot edge ring to improve low-K dielectric etch Grant 6,653,734 - Flanner , et al. November 25, 2	2003-11-25
Convertible hot edge ring to improve low-K dielectric etch App 20030045101 - Flanner, Janet M. ; et al.	2003-03-06
Unique process chemistry for etching organic low-k materials App 20020111036 - Zhu, Helen H. ; et al.	2002-08-15
Post-etch photoresist strip with O2 and NH3 for organosilicate glass low-K dielectric etch applications App 20020111041 - Annapragada, Rao V. ; et al.	2002-08-15
Convertible hot edge ring to improve low-K dielectric etch Grant 6,383,931 - Flanner , et al. May 7, 2	2002-05-07
Convertible hot edge ring to improve low-k dielectric etch App 20020022281 - Flanner, Janet M ; et al.	2002-02-21
Self-aligned contacts for semiconductor device Grant 6,165,910 - Flanner , et al. December 26, 2	2000-12-26
Techniques for etching a low capacitance dielectric layer on a substrate Grant 6,114,250 - Ellingboe , et al. September 5, 2	2000-09-05
Reactive ion etch process including hydrogen radicals Grant 5,242,538 - Hamrah , et al. September 7, 1	1993-09-07

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