Patent | Date |
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Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof Grant 7,736,833 - Angelopoulos , et al. June 15, 2 | 2010-06-15 |
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof Grant 7,709,177 - Angelopoulos , et al. May 4, 2 | 2010-05-04 |
Ultrathin polymeric photoacid generator layer and method of fabricating at least one of a device and a mask by using said layer Grant 7,638,266 - Angelopoulos , et al. December 29, 2 | 2009-12-29 |
Dielectric material Grant 7,485,964 - Cotte , et al. February 3, 2 | 2009-02-03 |
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof App 20080124650 - Angelopoulos; Marie ;   et al. | 2008-05-29 |
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof App 20080124649 - Angelopoulos; Marie ;   et al. | 2008-05-29 |
Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof Grant 7,361,444 - Angelopoulos , et al. April 22, 2 | 2008-04-22 |
Process of removing residue from a precision surface using liquid or supercritical carbon dioxide composition Grant 7,332,436 - Cotte , et al. February 19, 2 | 2008-02-19 |
Method of making a packaged radiation sensitive resist film-coated workpiece Grant 7,168,224 - Angelopoulos , et al. January 30, 2 | 2007-01-30 |
Dielectric material App 20060180922 - Cotte; John M. ;   et al. | 2006-08-17 |
Process of insulating a semiconductor device using a polymeric material Grant 7,056,837 - Cotte , et al. June 6, 2 | 2006-06-06 |
Ultrathin polymeric photoacid generator layer and method of fabricating at least one of a device and a mask by using said layer App 20060035167 - Angelopoulos; Marie ;   et al. | 2006-02-16 |
Process of removing residue from a precision surface using liquid or supercritical critical carbon dioxide composition App 20050224748 - Cotte, John Michael ;   et al. | 2005-10-13 |
Apparatus and process for supercritical carbon dioxide phase processing Grant 6,953,042 - Jur , et al. October 11, 2 | 2005-10-11 |
Apparatus and process for supercritical carbon dioxide phase processing Grant 6,892,741 - Jur , et al. May 17, 2 | 2005-05-17 |
Process of removing residue material from a precision surface Grant 6,890,855 - Cotte , et al. May 10, 2 | 2005-05-10 |
Liquid or supercritical carbon dioxide composition Grant 6,838,015 - Cotte , et al. January 4, 2 | 2005-01-04 |
Check valve for micro electro mechanical structure devices Grant 6,834,671 - Cotte , et al. December 28, 2 | 2004-12-28 |
Apparatus and process for supercritical carbon dioxide phase processing App 20040149317 - Jur, Jesse Stephen ;   et al. | 2004-08-05 |
Check valve for micro electro mechanical structure devices App 20040134538 - Cotte, John Michael ;   et al. | 2004-07-15 |
Apparatus for cleaning filters Grant 6,739,346 - Cotte , et al. May 25, 2 | 2004-05-25 |
Packaged radiation sensitive coated workpiece process for making and method of storing same App 20040045866 - Angelopoulos, Marie ;   et al. | 2004-03-11 |
Energy sensitive electrically conductive admixtures, uses thereof, methods of fabrication and structures fabricated therewith Grant 6,685,853 - Angelopoulos , et al. February 3, 2 | 2004-02-03 |
Process of removing ion-implanted photoresist from a workpiece Grant 6,683,008 - Cotte , et al. January 27, 2 | 2004-01-27 |
Process of providing a semiconductor device with electrical interconnection capability Grant 6,653,233 - Cotte , et al. November 25, 2 | 2003-11-25 |
Dielectric material and process of insulating a semiconductor device using same App 20030211312 - Cotte, John M. ;   et al. | 2003-11-13 |
Process and apparatus for contacting a precision surface with liquid or supercritical carbon dioxide App 20030196679 - Cotte, John Michael ;   et al. | 2003-10-23 |
Electromechanical device and a process of preparing same Grant 6,622,507 - Cotte , et al. September 23, 2 | 2003-09-23 |
Process for cleaning a workpiece using supercritical carbon dioxide Grant 6,558,475 - Jur , et al. May 6, 2 | 2003-05-06 |
Apparatus and process for supercritical carbon dioxide phase processing App 20030066544 - Jur, Jesse Stephen ;   et al. | 2003-04-10 |
Liquid or supercritical carbon dioxide composition and process of removing residue from a precision surface using same App 20030045117 - Cotte, John Michael ;   et al. | 2003-03-06 |
Packaged radiation sensitive coated workpiece process for making and method of storing same App 20030019782 - Angelopoulos, Marie ;   et al. | 2003-01-30 |
Check valve for micro electro mechanical structure devices App 20030019528 - Cotte, John Michael ;   et al. | 2003-01-30 |
Electromechanical device and a process of preparing same App 20030019540 - Cotte, John Michael ;   et al. | 2003-01-30 |
Fixtures for processing a workpiece in a supercritical fluid App 20030010363 - Cotte, John Michael ;   et al. | 2003-01-16 |
Dielectric material and process of insulating a semiconductor device using same App 20030008129 - Cotte, John M. ;   et al. | 2003-01-09 |
Apparatus for cleaning filters App 20030000556 - Cotte, John Michael ;   et al. | 2003-01-02 |
Process of providing a semiconductor device with electrical interconnection capability App 20030003746 - Cotte, John Michael ;   et al. | 2003-01-02 |
Process of removing residue material from a precision surface App 20030003762 - Cotte, John Michael ;   et al. | 2003-01-02 |
Process for depositing a film on a nanometer structure Grant 6,451,375 - Cotte , et al. September 17, 2 | 2002-09-17 |
Process for removing chemical mechanical polishing residual slurry Grant 6,425,956 - Cotte , et al. July 30, 2 | 2002-07-30 |
Process For Depositing A Film On A Nanometer Structure App 20020090458 - Cotte, John Michael ;   et al. | 2002-07-11 |
Process For Removing Chemical Mechanical Polishing Residual Slurry App 20020088477 - Cotte, John Michael ;   et al. | 2002-07-11 |
Process of drying semiconductor wafers using liquid or supercritical carbon dioxide Grant 6,398,875 - Cotte , et al. June 4, 2 | 2002-06-04 |
Method for selective extraction of sacrificial place-holding material used in fabrication of air gap-containing interconnect structures Grant 6,346,484 - Cotte , et al. February 12, 2 | 2002-02-12 |
Highly Sensitive Positive Photoresist Compositions App 20010049071 - MERRITT, DAVID PAUL ;   et al. | 2001-12-06 |
Detection of a gaseous substance emanating from a layer of polymeric composition App 20010001370 - Collins, James Patrick ;   et al. | 2001-05-24 |
Polymeric dyes for antireflective coatings Grant 6,051,364 - Knors , et al. April 18, 2 | 2000-04-18 |
Highly sensitive positive photoresist composition Grant 6,051,659 - Merritt , et al. April 18, 2 | 2000-04-18 |
Reworkable polymer chip encapsulant Grant 5,930,597 - Call , et al. July 27, 1 | 1999-07-27 |
Making of microlithographic structures with an underlayer film containing a thermolyzed azide compound Grant 5,795,701 - Conley , et al. August 18, 1 | 1998-08-18 |
Method for patterning a photoresist material wherein an anti-reflective coating comprising a copolymer of bisphenol A and benzophenone is used Grant 5,736,301 - Fahey , et al. April 7, 1 | 1998-04-07 |
Reworkable polymer chip encapsulant Grant 5,659,203 - Call , et al. August 19, 1 | 1997-08-19 |
Polymeric dyes for antireflective coatings Grant 5,654,376 - Knors , et al. August 5, 1 | 1997-08-05 |