Patent applications and USPTO patent grants for Morales; Carmen.The latest application filed is for "concurrent measurement of critical dimension and overlay in semiconductor manufacturing".
Patent | Date |
---|---|
Concurrent measurement of critical dimension and overlay in semiconductor manufacturing Grant 7,080,330 - Choo , et al. July 18, 2 | 2006-07-18 |
System to determine suitability of sion arc surface for DUV resist patterning Grant 6,597,463 - Singh , et al. July 22, 2 | 2003-07-22 |
Monitor CMP process using scatterometry Grant 6,594,024 - Singh , et al. July 15, 2 | 2003-07-15 |
Method and system for providing inorganic vapor surface treatment for photoresist adhesion promotion Grant 6,515,342 - Gupta , et al. February 4, 2 | 2003-02-04 |
System and method for facilitating determining suitable material layer thickness in a semiconductor device fabrication process Grant 6,459,945 - Singh , et al. October 1, 2 | 2002-10-01 |
Method and system for providing inorganic vapor surface treatment for photoresist adhesion promotion Grant 6,066,578 - Gupta , et al. May 23, 2 | 2000-05-23 |
NCAGE Code | 3AZ29 | MORALES, CARMEN |
CAGE Code | 3AZ29 | MORALES, CARMEN |
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