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Selective Cobalt Deposition On Copper Surfaces App 20220298625 - YU; Sang-Ho ;   et al. | 2022-09-22 |
Selective cobalt deposition on copper surfaces Grant 11,384,429 - Yu , et al. July 12, 2 | 2022-07-12 |
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Deposition Mask And Methods Of Manufacturing And Using A Deposition Mask App 20200295265 - MORAES; Kevin ;   et al. | 2020-09-17 |
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Substrate Carrier Having Hard Mask App 20190211442 - LERNER; ALEXANDER ;   et al. | 2019-07-11 |
Methods For Depositing Dielectric Barrier Layers And Aluminum Containing Etch Stop Layers App 20190027403 - KESAPRAGADA; Sree Rangasai V. ;   et al. | 2019-01-24 |
Methods for depositing dielectric barrier layers and aluminum containing etch stop layers Grant 10,109,520 - Kesapragada , et al. October 23, 2 | 2018-10-23 |
Electromigration Improvement Using Tungsten For Selective Cobalt Deposition On Copper Surfaces App 20180144973 - Ye; Weifeng ;   et al. | 2018-05-24 |
Selective Cobalt Deposition On Copper Surfaces App 20170321320 - YU; Sang-Ho ;   et al. | 2017-11-09 |
Amorphous Layer Extreme Ultraviolet Lithography Blank, And Manufacturing And Lithography Systems Therefor App 20170168383 - Hofmann; Ralf ;   et al. | 2017-06-15 |
Pattern fortification for HDD bit patterned media pattern transfer Grant 9,660,185 - Gouk , et al. May 23, 2 | 2017-05-23 |
Methods For Depositing Dielectric Barrier Layers And Aluminum Containing Etch Stop Layers App 20170098575 - KESAPRAGADA; Sree Rangasai V. ;   et al. | 2017-04-06 |
Amorphous layer extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor Grant 9,612,521 - Hofmann , et al. April 4, 2 | 2017-04-04 |
Pattern Fortification For Hdd Bit Patterned Media Pattern Transfer App 20160260896 - GOUK; Roman ;   et al. | 2016-09-08 |
Pattern fortification for HDD bit patterned media pattern transfer Grant 9,343,664 - Gouk , et al. May 17, 2 | 2016-05-17 |
Selective Cobalt Deposition On Copper Surfaces App 20150325446 - YU; Sang-Ho ;   et al. | 2015-11-12 |
Pattern Fortification For Hdd Bit Patterned Media Pattern Transfer App 20150214475 - GOUK; Roman ;   et al. | 2015-07-30 |
Low resistivity tungsten PVD with enhanced ionization and RF power coupling Grant 8,895,450 - Cao , et al. November 25, 2 | 2014-11-25 |
Amorphous Layer Extreme Ultraviolet Lithography Blank, And Manufacturing And Lithography Systems Therefor App 20140268081 - Hofmann; Ralf ;   et al. | 2014-09-18 |
Process for forming cobalt-containing materials Grant 8,815,724 - Ganguli , et al. August 26, 2 | 2014-08-26 |
Pattern Fortification For Hdd Bit Patterned Media Pattern Transfer App 20140131308 - GOUK; Roman ;   et al. | 2014-05-15 |
Low Resistivity Tungsten Pvd With Enhanced Ionization And Rf Power Coupling App 20140042016 - CAO; Yong ;   et al. | 2014-02-13 |
Metal gate structures and methods for forming thereof Grant 8,637,390 - Ganguli , et al. January 28, 2 | 2014-01-28 |
Semiconductor device with gate electrode stack including low resistivity tungsten and method of forming Grant 8,558,299 - Cao , et al. October 15, 2 | 2013-10-15 |
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Process for forming cobalt-containing materials Grant 8,110,489 - Ganguli , et al. February 7, 2 | 2012-02-07 |
Low Resistivity Tungsten Pvd With Enhanced Ionization And Rf Power Coupling App 20110303960 - CAO; YONG ;   et al. | 2011-12-15 |
Metal Gate Structures And Methods For Forming Thereof App 20110298062 - GANGULI; SESHADRI ;   et al. | 2011-12-08 |
Process For Forming Cobalt-containing Materials App 20110124192 - Ganguli; Seshadri ;   et al. | 2011-05-26 |
Substrate Processing System And Methods Thereof App 20100304027 - Lee; Wei Ti ;   et al. | 2010-12-02 |
Selective Cobalt Deposition On Copper Surfaces App 20090269507 - Yu; Sang-Ho ;   et al. | 2009-10-29 |
Process For Forming Cobalt-containing Materials App 20070202254 - GANGULI; SESHADRI ;   et al. | 2007-08-30 |